• Journal of Mechanical Science and Technology
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• 제19권6호
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• pp.1338-1346
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• 2005

Effects of thermal contact resistance between heater and susceptor, susceptor and graphite board in a MOCVD reactor on temperature distribution and film growth rate were analyzed. One-dimensional thermal resistance model considering thermal contact resistance and heat transfer area was made up at first to find the temperature drop at the surface of graphite board. This one-dimensional model predicted the temperature drop of 18K at the board surface. Temperature distribution of a reactor wall from the three-dimensional computational fluid dynamics analysis including the gap at the wafer position showed the temperature drop of 20K. Film growth rates of InP and GaAs were predicted using computational fluid dynamics technique with chemical reaction model. Temperature distribution from the three-dimensional heat transfer calculation was used as a thermal boundary condition to the film growth rate simulations. Temperature drop due to the thermal contact resistance affected to the GaAs film growth a little but not to the InP film growth.

• 한국세라믹학회지
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• 제32권12호
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• pp.1369-1376
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• 1995

The WO3 thin-film NOx sensor which is of practical use and includes the heater and the temperature sensor was fabricated. The WO3 thin films as a gas-sensing layer was deposited at ambient temperature in a high-vacuum resistance heated evaporator. The highest sensitivity of the WO3 thin-film sensor to NOx was obtained under the condition of the annealing temperature of 50$0^{\circ}C$ and the operating temperature of 30$0^{\circ}C$. The gas sensing characteristics of this sensor was excellent, i.e. high sensitivity (Rgas/Rair in 3 ppm NO2=53) and fast response time (4 seconds).

• 한국재료학회지
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• 제14권4호
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• pp.276-280
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• 2004

Carbon nanotubes(CNT) were synthesized by arc-discharge method. To fabricate CNT sensor, CNT powder was dispersed in $\alpha$-Terpinol($C_{10}$ $H_{17}$OH) solution. The CNT films were fabricated by screen printing on the interdigitated Pt/Pd alloy electrode. The microstructure of CNT film were observed by scanning electron microscopy (SEM). In order to investigate the gas sensing characteristics of the film, the CNT film was experimented to measure NH$_3$ response and recovery time. And this sensor shows better reproductibility and faster recovery time than another CNT sensors. We suggest the possibility to utilize a CNT as new sensing materials for environmental monitoring.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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• pp.474-475
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• 2009

As a substitute of ITO material, carbon nanotube (CNT) is widely studied for transparent conductive film (TCF). Current sheet resistance of CNT-TCF is about 100 ${\Omega}$/sq at 80% transmittance. But CNT-TCF performance in manufacturable level is about 500 ${\Omega}$/sq at 83% based on the Topnanosys Co's result. Therefore, critical issue in CNT-TCF research is to reduce the sheet resistance with manufacturing reliability. In this report, recent developments using CNT-TCF are introduced. Touch panel, transparent LED signboard, transparent speaker and transparent heater are representative examples. Also I describe the future issues and prospect of CNT-TCF for the flexible display.

• Corrosion Science and Technology
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• 제5권3호
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• pp.112-116
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• 2006

This study has been conducted to monitor the corrosion rate of cathodically protected structure and corrosion inhibited system using multi-line thin-film electrical resistance (TFER) sensor in various environments. The field test data of TFER sensor for the corrosion monitoring of cathodically protected underground pipeline in soil environments and of corrosion inhibited gas heaters were also presented. The sensor was found to be a powerful method to commit the sensitive pick-up of small corrosion rate which can be observed in the cathodically protected and corrosion inhibited systems.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1997년도 추계학술대회 논문집
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• pp.510-514
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• 1997

The thin film that is electrically conductive and optically transparent is called conductive transparent thin film. ITO(Indium-Tin Oxide) which is a kind of conductive transparent thin film has been widely used in solar cell, transparent electrical heater, selective optical filter, FDP(Flat Display Panel) such as LCD(Liquid Crystal Display), PDP(Plasma Display Panel) and so on. Especially in PDP, ITO films is used as a transparent electrode in order to maintain discharge and decrease consumption power through the improvement of cell structure. In this study, we prepared ITO by reactive r.f. sputtering with indium-tin(Sn 10wt%) alloy target instead of indium-tin oxide target. The ITO films deposited at low temperature 15$0^{\circ}C$ and 8% $O_2$. Partial pressure showed about 3.6 Ω/$\square$. At the end of firing, the resistance of ITO was decreased, the optical transparence was improved above 90%.

• 한국결정성장학회지
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• 제9권5호
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• pp.504-509
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• 1999

In-situ cleaning and subsequent silicon epitaxial film growth were performed in a load-locked reactor equipped with Hg-grid UV lamp and PBN heater to obtain the smooth and contaminant-free underlying surface and develop low-temperature epitaxial film growth process. The removals of organic and native oxide were investigated using UV-excited $O_2$ and $NF_{3}/H_{2}$, and the effect of the surface condition was examined on the quality of silicon epitaxial film grown at temperature as low as $750^{\circ}C$. UV-excited gas phase cleaning was found to be effective in removing the organic and native oxide successfully providing a smooth surface with RMS roughness of 0.5$\AA$ at optimal condition. Crystalline quality of epitaxial film was determined by smoothness of cleaned surface and the presence of native oxide and impurity. Crystalline defects such as dislocation loops or voids due to the surface roughness were observed by XTEM.

• 전자공학회논문지D
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• 제35D권11호
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• pp.46-54
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• 1998

직선 또는 필라멘트 모양의 NiCr 박막 히터 및 Bi-Sb 박막 열전퇴(thermopile)로 구성되는 평면형 Bi-Sb 다중접합 열전변환기를 제작하고, 10 Hz에서부터 10 ㎑까지의 교류 입력신호에 대한 변환기의 교류-직류 변환 특성을 논의하였다. 변환기의 열감도를 증가시키고 또한 교류-직류 변환오차를 감소시키기 위하여, NiCr 히터 및 Bi-Sb 열전퇴의 고온 접합부를 열차단막 역할을 하는 Si₃N₄/SiO₂/Si₃N₄ 다이아프램위에 각각 형성하였고, 열전퇴의 저온 접합부는 방열판 역할을 하는 실리콘 림(rim)에 의해 지지되는 Si₃N₄/SiO₂/Si₃N₄ 박막위에 형성하였다. 단일 bifilar NiCr 히터가 내장된 변환기의 열감도는 공기 및 진공중에서 각각 약 14.0 ㎷/㎽ 및 54.0 ㎷/㎽였고, 교류-직류 전압 및 전류 변환 오차범위는 공기중에서 각각 약 ±0.60 ppm 및 ±0.11 ppm이었다. 변환기의 교류-직류 변환 정확도가 상용 3차원 구조의 다중접합 열전변환기의 것보다 훨씬 더 높게 개선되었으나, 시간에 따른 출력 열기전력의 변화는 비교적 높게 나타났다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2011년도 춘계학술대회 및 Fine pattern PCB 표면 처리 기술 워크샵
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• pp.95-95
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• 2011

도막의 건조는 용액의 조건, 설비특성, 제품의 요구특성에 맞게 다양하게 적용되고 있다. 일반적으로 열풍에 의한 건조방식이 적용되고 있으나 Induction Heater, UV, EB 및 NIR방식 등 다양한 건조방식이 적용되고 있다. 여기서는 건조방법중 NIR에 의한 건조방식을 이용하여 품질특성에 미치는 인자를 검토하였다.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 1996년도 제24회 춘계학술대회
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• pp.126-132
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• 1996

A laboratory scale hot strip rolling wear simulator(HRWS) was developed for the purpose of investigating the tribological phenomena occurred in production hot strip rolling mills. The HRWS' main parts are the electric heater, the mechanical descaler, tandem type 2-4Hi rolling mill stands, the cooling chamber, the tension controller and coiler. By simulating the tribelogical phenomena in rolling process at laboratory, wear patterns, cracks, cat-ear wear, black film, effect of hot rolling oil lubrication, etc. were reproduced, and discussed on the performace of simulator.