Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Fabrication and Gas-Sensing Characteristics of $NO_x$ Sensors using $WO_3$ Thin Films

$WO_3$ 박막을 이용한 $NO_x$ 센서의 제조 및 가스감도 특성

  • 유광수 (서울시립대학교 공과대학 재료공학과) ;
  • 김태송 (한국과학기술원 세라믹스연구부) ;
  • 정형진 (한국과학기술원 세라믹스연구부)
  • Published : 1995.12.01
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Abstract

The WO3 thin-film NOx sensor which is of practical use and includes the heater and the temperature sensor was fabricated. The WO3 thin films as a gas-sensing layer was deposited at ambient temperature in a high-vacuum resistance heated evaporator. The highest sensitivity of the WO3 thin-film sensor to NOx was obtained under the condition of the annealing temperature of 50$0^{\circ}C$ and the operating temperature of 30$0^{\circ}C$. The gas sensing characteristics of this sensor was excellent, i.e. high sensitivity (Rgas/Rair in 3 ppm NO2=53) and fast response time (4 seconds).

Keywords

References

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