• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.9
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• pp.812-817
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• 2008

A catalytic combustible sensor for LPG/LNG detection was fabricated on $Al_2O_3$ substrate using planar technology. The catalysts of Pd and Pt were added to ${\alpha}$- and ${\gamma}-Al_2O_3$ powders. The mixture of Pt, Pd and $Al_2O_3$ were homogenized by using a three roll mixer. TCR characteristics of Pt heater were optimized with the heat treatment temperature. Sensing properties were investigated as a function of the microstructure of $Al_2O_3$, the gas concentration and the variation of input voltage. ${\alpha}-Al_2O_3$ sintered at 500 $^{\circ}C$ is more suitable as LPG/LNG sensor due to good grain shape and size distribution of about 300 nm than that of ${\gamma}-Al_2O_3$ which is in irregular shape and with a particle size of 5-30 ${\mu}m$. The sensor has shown maximum output voltage of 14 mV for 1000 ppm $C_4H_{10}$ and 3.8 mV for 1000 ppm $CH_4$ at 5.0 V input voltage.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.939-942
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• 2004

Al doped Zinc Oxide(ZnO:Al) films, which is widely used as a transparent conductor in optoelectronic devices such as solar cell, liquid crystal display, plasma display panel, thermal heater, and other sensors were Prepared by using the capacitively coupled RF magnetron sputtering method. In this paper the effect of RF discharge power on the electrical, optical and structural properties were investigated experimentally. The results show that the structural and electrical properties of the film are highly affected by the variation of RF discharge power. The optimum growth conditions were obtained for films doped with 2 wt% of $Al_2O_3$ and 200 W in RF discharge power, which exhibit a resistivity of $10.4{\times}10^{-4}{\Omega}-cm$ associated with a transmittance of 89.66 % for 1000nm in films thickness in the wavelength range of the visible spectrum.

• Proceedings of the Korea Society for Energy Engineering kosee Conference
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• 2004.05a
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• pp.201-212
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• 2004

An experimental study of the absorption process of water vapor into a lithium bromide solution was performed. For the purpose of developing high performance absorption chiller/hater utilizing lithium bromide solution as working fluid, it is important to improve the performance of absorber with the larger heat transfer area of the four heat exchangers. The experimental apparatus was composed of a plate type absorber which could increase the heat exchange area per unit volume to investigate more detail characteristics instead of the conventional type, that is, horizontal tube bundle type. The size of plate absorbers were made for 0.4m$\times$0.6m and the design objective of a refrigeration capacity was 1RT. In this experiment, three kinds of plate absorbers namely flat plate, dimple plate and groove plate were used. The obtained results were less than the design objective values, that is, the refrigeration capacity was about 0.3 ～0.4RT and the overall heat transfer coefficient was 500～600 kcal/$m^2$h$^{\circ}C$ at the standard conditions.

• Journal of the Microelectronics and Packaging Society
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• v.31 no.1
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• pp.29-34
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• 2024

The heating element utilizing the Joule heating generated when current flows through a conductor is widely researched and developed for various industrial applications such as moisture removal in automotive windshield, high-speed train windows, and solar panels. Recently, research utilizing heating elements with various nanostructures has been actively conducted to develop flexible heating elements capable of maintaining stable heating even under mechanical deformation conditions. In this study, flexible polyurethane possessing excellent flexibility was selected as the substrate, and silver (Ag) thin films with low electrical resistivity (1.6 μΩ-cm) were fabricated as the heating layer using magnetron sputtering. The 2D heating structure of the Ag thin films demonstrated excellent heating reproducibility, reaching 95% of the target temperature within 20 seconds. Furthermore, excellent heating characteristics were maintained even under mechanically deforming environments, exhibiting outstanding flexibility with less than a 3% increase in electrical resistance observed in repetitive bending tests (10,000 cycles, based on a curvature radius of 5 mm). This demonstrates that polyurethane/Ag planar heating structure bears promising potential as a flexible/wearable heating element for curved-shaped appliances and objects subjected to diverse stresses such as human body parts.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.182.2-182.2
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• 2015

최근 학계나 산업계에서 투명 전자 소자에 대하여 활발한 연구가 진행되면서, 투명 전 도성 산화물(TCO: transparent conductive oxide)에 대한 관심이 높아지고 있다. 대표적인 TCO 물질인 Indium Tin Oxide (ITO)는 가시 광 영역에서의 높은 투과 및 높은 도전성을 가져 전압을 인가하면 발열이 가능하므로 이를 투명 면상 발열체에 적용시키는 연구가 활발히 진행되고 있다. 하지만, ITO는 발열 테스트 결과 온도가 상승함에 따라 발열이 일부분에 집중되는 현상이 있으며, 전도성을 높이기 위하여 추가공정이 필요하다. 또한, 글라스의 곡면 부분에서 ITO를 사용하면 유연성이 부족하므로 크랙이 발생한다는 단점이 있다. 따라서, 최근 Silver nanowire (AgNW), Single-walled Carbon nanotube (SWCNT), ITO를 기반으로 한 AgNW에 ITO를 증착 하거나 SWCNT를 코팅하여 우수한 전기적, 광학적 특성을 지닌 하이브리드 전극이 투명 면상 발열체 재료로서 사용되고 있다. 하지만 대체된 재료들도 다양한 문제점을 가지고 있다. 예를 들어 고온에서 발열을 유지하지 못하고 끊어지거나 가시광영역의 투과율이 낮은 점 등이 있다. 이런 다양한 문제점들을 보완 할 수 있는 새로운 투명 면상 발열체에 적용한 연구가 요구되고 있다. 본 연구에서는 GZO/Ag/GZO 하이브리드 구조의 투명 면상 발열체를 제작하여 전기적, 광학적 특성을 비교하고 발열량, 온도 균일 성, 발열 유지 안정도를 확인하였다. 본 연구에서는 $50{\times}50mm$ 크기의 Non-alkali glass (삼성코닝 E2000) 기판 상에 DC마그네트론 스퍼터링 공정을 이용하여 상온에서 GZO, Ag, GZO 박막을 연속적으로 증착 하여 다층구조의 하이브리드형 투명 면상 발열체를 제조하였다. 박막 증착 파워는 DC (Ag) power 50 W, RF (GZO) power 200 W로 하였으며 GZO박막두께는 45 nm로 고정 시키고 Ag박막 두께는 5~20 nm로 변화를 주었다. 증착원은 3인치 GZO 세라믹 타깃 (2.27 wt. % Ga2O3) 과 Ag 금속 타깃 (순도 99.99%)을 사용하였으며, Ar을 40 sccm 주입 후 Working pressure는 고 순도 Ar을 사용하여 1.0 Pa로 고정하며 10분간 Pre-sputtering을하고 증착을 진행하였다. 앞선 실험을 통해 증착한 박막의 전기적, 광학적 특성은 각각 Hall-effect measurements system (ECOPIA, HMS3000), UV-Vis spectrophotometer (UV-1800, Shimadzu)를 사용해 측정 되었으며, 하이브리드 표면의 구조 및 형상은 FESEM으로 관찰하였다. 또한 표면온도 측정기infrared camera (IR camera)를 이용하여 4~12 V/cm의 전압을 인가 시 시간에 따른 투명 면상 발열체의 표면 온도변화를 관찰하였다.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.13 no.5
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• pp.235-240
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• 2003

The development of large area GaN substrates is one of important issues in expanding of GaN-based applications. In order to investigate the possibility, GaN thick films were grown by a sublimation technique, using MOCVD-GaN films grown on a sapphire as a seed-crystal substrate and a commercial GaN powder as a source material. The pressure in chamber under the fixed flow rate of $N_2$ gas and $NH_3$ gas was kept at 1 atmosphere and the effects of the various processing parameters such as the distance between source material and seed crystal, the temperature of top- and bottom heater and the growth time during the growth of GaN thick film were investigated. The growth feature and microstructure of the GaN thick films were observed by SEM and XRD. The optical bandgap properties and the defects were evaluated by the PL measurement. By these results, the growth conditions such as the distance between the GaN source and the seed substrate, the growth temperature and the growth time were determined for the satisfied growth of GaN thick films.

• Journal of Sensor Science and Technology
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• v.16 no.1
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• pp.7-10
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• 2007

A thick film catalytic gas sensors which can be operated at $142^{\circ}C$ in presence of ultra violet-light emitting diode has been developed to measure hydrogen concentration in 0-5 % range. The sensing material as a combustion catalyst consists of $TiO_{2}$ (5 wt%) and Pd/Pt (20 wt%) supported on $Al_{2}O_{3}$ powder and the reference material to compensate the heat capacity of it in a bridge circuit was an catalyst free $Al_{2}O_{3}$ powder. Platinum heater and sensor materials were formed on the alumina plate by screen printing method and heat treatment. The effect of UV radiation in the presence of photo catalyst $TiO_{2}$ on the sensor sensitivity, response and recovery time has been investigated. The reduction of operating temperature from $192^{\circ}C$ to $142^{\circ}C$ for hydrogen gas sensing property in presence of UV radiation is attributed to the hydroxy radical and superoxide which was formed at the surface of $TiO_{2}$ under UV radiation.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.236.2-236.2
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• 2014

세계 반도체 시장은 컴퓨터 기능이 더해진 모바일 기기의 수요가 증가함에 따라 메모리반도체의 시장규모가 최근 빠른 속도로 증가했다. 특히 모바일 기기에서 저장장치 역할을 하는 비휘발성 반도체인 NAND Flash Memory는 스마트폰 및 태블릿PC 등 휴대용 기기의 수요 증가, SSD (Solid State Drive)를 탑재한 PC의 수요 확대, 서버용 SSD시장의 활성화 등으로 연평균 18.9%의 성장을 보이고 있다. 이러한 경제적인 배경 속에서 NAND Flash 미세공정 기술의 마지막 단계로 여겨지는 1Xnm 공정이 개발되었다. 그러나 1Xnm Flash Memory의 생산은 새로운 제조설비 구축과 차세대 공정 기술의 적용으로 제조비용이 상승하는 단점이 있다. 이에 따라 제조공정기술을 미세화하지 않고 기존의 수평적 셀구조에서 수직적 셀구조로 설계 구조를 다양화하는 기술이 대두되고 있는데 이 중 Flash Memory의 대용량화와 수명 향상을 동시에 추구할 수 있는 3D NAND 기술이 주목을 받게 되면서 공정기술의 변화도 함께 대두되고 있다. 3D NAND 기술은 기존라인에서 전환하는데 드는 비용이 크지 않으며, 노광장비의 중요도가 축소되는 반면, 증착(Chemical Vapor Deposition) 및 식각공정(Etching)의 기술적 난이도와 스텝수가 증가한다. 이 중 V-NAND 3D 기술에서 사용하는 박막증착 공정의 경우 산화막과 질화막을 번갈아 증착하여 30layer 이상을 하나의 챔버 내에서 연속으로 증착한다. 다층막 증착 공정이 비정상적으로 진행되었을 경우, V-NAND Flash Memory를 제조하기 위한 후속공정에 영향을 미쳐 웨이퍼를 폐기해야 하는 손실을 초래할 수 있다. 본 연구에서는 V-NAND 다층막 증착공정 중에 다층막의 두께를 가상 계측하는 알고리즘을 개발하고자 하였다. 증착공정이 진행될수록 박막의 두께는 증가하여 커패시터 관점에서 변화가 생겨 RF 신호의 진폭과 위상의 변화가 생긴다는 점을 착안하여 증착 공정 중 PECVD 장비 RF matcher와 heater에서 RF 신호의 진폭과 위상을 실시간으로 측정하여 데이터를 수집하고, 박막의 두께와의 상관성을 분석하였다. 이 연구 결과를 토대로 V-NAND Flash memory 제조 품질향상 및 웨이퍼 손실 최소화를 실현하여 제조 시스템을 효율적으로 운영할 수 있는 효과를 기대할 수 있다.

• Journal of Sensor Science and Technology
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• v.11 no.3
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• pp.145-154
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• 2002

NiCr-heaters with three different thicknesses ranging from 400 nm to 800 nm were fabricated and their characteristics were compared for the purpose of developing a chromel-alumel multijunction thermal converter for low input voltage with low frequency. The thermoelectric effect-induced AC-DC voltage transfer difference of the thermal converter with a built-in NiCr-heater of 400 nm-thickness was ${\pm}0.51{\sim}1.69\;ppm$ in the DC reversing frequency of $40\;Hz{\sim}10\;kHz$ with appling $0.5\;V_{rms}$ and the difference was increased to ${\pm}40{\sim}{\pm}115\;ppm$ in the frequency of $40\;Hz{\sim}1\;MHz$, when both thermoelectric effects and frequency effects were considered, showing the thermal converter would be suitable for the low input voltage application with low frequency.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.12S
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• pp.1217-1223
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• 2003

Nerve gas sensor based on tin oxide was fabricated and its characteristics were examined. Target gas is dimethyl methyl phosphonate(C$_3$ $H_{9}$ $O_3$P, DMMP) that is simulant gas of nerve gas. Sensing materials were Sn $O_2$ added a-Al$_2$ $O_3$ with 0∼20wt.% and were physically mixed each material. They were deposited by screen printing method on alumina substrate. The sensor device was consisted of sensing electrode with interdigit(IDT) type in front and a heater in back side. Total size of device was 7${\times}$10${\times}$0.6㎣. Crystallite size & phase identification and morphology of fabricated Sn $O_2$ powders were analyzed by X-ray diffraction and by a scanning electron microscope, respectively. Fabricated sensor was measured as flow type and resistance change of sensing material was monitored as real time using LabVIEW program. The best sensitivity was 75% at adding 4wt.% $\alpha$-Al$_2$ $O_3$, operating temperature 30$0^{\circ}C$ to DMMP 0.5ppm. Response and recovery time were about 1 and 3min., respectively. Repetition measurement was very good with $\pm$3％ in full scale.TEX>$\pm$3％ in full scale.