• The Transactions of the Korean Institute of Electrical Engineers C
• /
• v.51 no.5
• /
• pp.191-195
• /
• 2002

Chemical mechanical Polishing (CMP) process is widely used for the global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP process, deionized water (DIW) pressure, purified $N_2$ ($PN_2$) gas, point of use (POU) slurry filler and high spray bar (HSB) were installed. Our experimental results show that DW pressure and P$N_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

• Korean Journal of Metals and Materials
• /
• v.48 no.12
• /
• pp.1090-1096
• /
• 2010

This pitting corrosion study of welded joints of austenitic stainless steels (AISI 304L and 316L) has addressed the differentiating solidification mode using three newly introduced filler wires with a flux-cored arc welding process (FCAW). The delta ferrite (${\delta}$-ferrite) content in the welded metals increased with an increasing equivalent weight ratio of chromium/nickel ($Cr_{eq}/Ni_{eq}$). Ductility dip cracking (DDC) was observed in the welded metal containing ferrite with none of AISI 304L and 0.1% of AISI 316L. The potentiodynamic anodic polarization results revealed that the $Cr_{eq}/Ni_{eq}$ ratio in a 3.5% NaCl solution didn't much affect the pitting potential ($E_{pit}$). The AISI 316L welded metals with ${\ddot{a}}$-ferrite content of over 10% had a superior $E_{pit}$ value. Though the AISI 316L welded metal with 0.1% ferrite had larger molybdenum contents than AISI 304L specimens, it showed a similar $E_{pit}$ value because the concentration of chloride ions and the corrosion product induced severe damage near the DDC.

• Korean Journal of Metals and Materials
• /
• v.50 no.9
• /
• pp.645-651
• /
• 2012

This study investigated changes in phase fraction caused by the addition of Mo, as well as the subsequent behaviour of N and its effect on the mechanical properties of welded 24Cr-N duplex stainless steel weld metals. Filler metal was produced by fixing the contents of Cr, Ni, N, and Mn while adjusting the Mo content to 1.4, 2.5, 3.5 wt%. The delta ferrite fraction increased as the Mo content increased. In contrast, the ${\gamma}$ fraction decreased and changed from a round to an acicular shape. Secondary austenite (${\gamma}^{\prime}$) was observed in all specimens in a refined form, but it decreased as the Mo content increased to the extent that it was nearly impossible to find any secondary austenite at 3.5 wt% Mo. Both tensile and yield strengths increased with the addition of Mo. In contrast, the highest value of ductility was observed at 1.41 wt% Mo. At all temperatures, impact energy absorption showed the lowest value at 3.5 wt% Mo, at which the amount of ${\delta}$-ferrite was greatest. There was no significant temperature dependence of the impact energy absorption values for any of the specimens. As the fraction of ${\gamma}$ phase decreased, the amount of N stacked in the ${\gamma}$ phase increased. Consequently, the stacking fault energy decreased, while the hardness of ${\gamma}$ increased.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.20 no.7
• /
• pp.105-112
• /
• 2021

Reduction of weld distortions and increase in productivity are some of the major goals of the shipbuilding industry. To address these issues, many researchers have attempted to apply new welding processes. In the shipbuilding industry, steel is the candidate material of choice owing to its good weldability. However, conventional welding techniques are not feasible for avoiding welding problems. Tip-rotating arc welding is one of the high-efficiency welding process that has several advantages, such as high welding speed, high melting rate, low heat input, and less distortion. The present study investigates the influence of the welding variables on the weld characteristics of tip-rotating arc welding. Welding was performed using EH36 as the base metal and SM-70s as the filler metal, which are widely used in shipbuilding. Basic experiments were conducted to understand the effects of the major welding variables, such as welding and tip-rotating speeds. The distortion and mechanical properties of the optimal welding conditions were used to evaluate the tip-rotating arc welding performance. Consequently, the feasibility of the tip-rotating arc welding process for joining steel components was investigated, so that the optimized welding conditions could be applied directly to ship body welding to enhance the quality of the welded joints.

• Advances in materials Research
• /
• v.2 no.1
• /
• pp.37-49
• /
• 2013

The transition metal salt doped solid polymer electrolyte [TSPE] were prepared with HPMC as a host polymer. The virgin and doped films were prepared by solution-casting method and investigated using wide angle X-ray scattering method. Micro structural parameters like lattice strain (g%), stacking/twin faults, the average number of unit cells counted in a direction perpendicular to the Bragg's plane (hkl) spacing of (hkl) planes dhkl, crystallite size Ds, distortion width, standard deviation were determined by whole pattern powder fitting (WPPF) method, which is an extension of single order method. It is found that the crystallite size decreases with the increase in the content of $FeCl_3$. This decrease is due to increase in localized breaking of polymer network which also accounts for the amorphous nature of the material. The filler inorganic salt $FeCl_3$ acts as plasticizer. FTIR study also confirms and justifies the interaction between the polymer and in-organic salt in the matrix. Physical properties like mechanical stability and Ac conductivity in these films are in conformity with the X-ray results.

• Journal of Powder Materials
• /
• v.20 no.2
• /
• pp.125-128
• /
• 2013

Magnetic and dielectric properties of rubber composites are controlled by using two kinds of high-permeability metal particles with different electrical conductivity (Sendust, Permalloy), and their effect on microwave absorbance has been investigated, focusing on the quasi-microwave frequency band (0.8-2 GHz). Noise absorbing sheets are composite materials of magnetic flake particles of high aspect ratio dispersed in polymer matrix with various filler amount of 80-90 wt.%. The frequency dispersion and magnitude of complex permeability is almost the same for Sendust and Permalloy composite specimens. However, the complex permittivity of the Permalloy composite (${{\varepsilon}_r}^{\prime}{\simeq}250$, ${{\varepsilon}_r}^{{\prime}{\prime}}{\simeq}50$) is much greater than that of Sendust composite (${{\varepsilon}_r}^{\prime}{\simeq}70$, ${{\varepsilon}_r}^{{\prime}{\prime}}{\simeq}0$). Due to the large dielectric permittivity of Permalloy composite, the absorbing band is shifted to lower frequency region. However, the investigation of impedance matching reveals that the magnetic permeability is still small to satisfy the zero-reflected condition at the quasi-microwave frequency band, resulting in a small microwave absorbance lower than 10 dB.

• Journal of Welding and Joining
• /
• v.30 no.6
• /
• pp.15-20
• /
• 2012

Brazing technology has been widely used among bonding technologies because it enables to bond various metals, even ceramics, dissimilar metals, and give higher bonding strength, cost down, automation, etc. However, there are many parameters to achieve optimal brazing joint such as brazing alloys, brazing atmospheres, designs and brazing methods, etc. The brazing parameters affect seriously on the characteristic of final brazing products. Stainless steel is broadly used in high temperature applications, chemical industry, heat exchangers, muffler of vehicles, and so on. Accordingly, in this article, brazing alloys, forms of brazing alloys, brazing methods and atmospheres for stainless steel were described.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2016.02a
• /
• pp.379.1-379.1
• /
• 2016

Recently, new types of wearable devices such as textile electronics are considered as the next generation wearable electronics. To realize the textile electronics, conductive fibers are required to supply the power and for signal processing. Conventionally, silver nanowires (Ag NWs) have been attracted as one of the conductive additives in the fibers, however, using the Ag NWs may lead to high production cost since it is a noble metal. Many researches have been done to replace the Ag NWs into a cheaper materials such as copper nanowires (Cu NWs). Here, we synthesized ultra-long Cu NWs for a conductive filler material in conductive fibers, taking advantages of their structural features. To investigate the effect of capping agents on the aspect ratio of the synthesized Cu NWs, we used various capping agents such as hexadecylamine, butylamine, ethylenedilamine and oleylamine in the Cu NW synthesis. In this research, the effects of capping agents on the structure and the synthesis of Cu NWs are presented.

• Proceedings of the Korean Society of Propulsion Engineers Conference
• /
• 2000.04a
• /
• pp.36-36
• /
• 2000

액체로켓엔진에 사용되는 2000psi이상의 고압 연소실(Combustion Chamber)의 냉각은 내피(Inner Shell)에 기계 가공된 냉각통로(Cooling Channel)로 냉각제를 흘려보내는 재생냉각방식이 널리 사용되며 기계 가공된 냉각 통로는 외피(Outer Shell)에 의해서 지지 밀봉된다. 일반적으로 내피 재료는 순수한 구리보다 강도가 우수하고 열전도도는 유사한 구리합금을 사용하고, 외피는 강도가 우수한 스테인레스 강을 사용하여 브레이징 접합된 구조를 형성한다. 브레이징 공정은 조립품을 약 $450^{\cire}C$ 이상의 액상선을 갖는 삽입금속(Filler Metal)을 사용하여 적당한 온도($450^{\cire}C$ ~ 모재의 고상선)에서 가열하여 접합시키는 방법으로, 용융 금속의 젖음 현상(Wetting Phenomena), 접합 틈새(Joint Clearance)로의 용융 삽입금속의 유입(Capillary Phenomena)과 접합 계면의 반응을 통해서 접합이 이루어진다. 이는 일반적인 접합 공정과 비교하여 모재의 변형이 적고, 이종 금속 간의 접합이 용이하며, 복잡한 부품을 정밀하게 접합할 수 있는 장점이 있으나, 접합될 제품의 표면 상태 및 분위기(Atmosphere), 접합될 부품간의 조립 틈새, 가열 싸이클(Heating Cycle) 등에 대한 공정 확립 및 관리가 매우 중요하다. 재생냉각 구조를 갖는 연소실은 우선 접합면의 형상이 매우 복잡하여 균일한 접합 틈새를 유지하면서 접합시키기가 매우 어려우며, 고온, 고압의 환경에서 작동하므로 일부 접합면이 접합되지 않을 경우 내피의 변형 및 파괴가 발생하고, 브레이징 시 용융된 삽입금속이 냉각통로 내로 유입될 경우 연소 시 이부근에서 재료의 용융이 발생될 수 있다. 따라서, 이러한 현상을 방지하기 위해서는 진공 분위기 하에서 적절한 접합 틈새를 유지할 수 있는 공정 및 장비의 개발이 필요하다.

• Journal of Welding and Joining
• /
• v.15 no.4
• /
• pp.166-177
• /
• 1997

The high strength AlZnMgCu0.5 alloy is a light metal with good age hardenability, and has a high tensile and yielding strength. Therefore, it can be used for structures requiring high speciple strength. Even though high strength AlZnMgCu alloy has good mechanical properties, it has a lot of problems in TIG and MIG welding processes. Since lots of high heat absorption is introduced into the weldment during TIG and MIG processes, the microstructural variation and hot cracks take place in heat affected zone. Therefore, the mechanical properties of high strength AlZnMgCu0.5 alloy can be degraded in weldment and heat affected zone. Welding process utilizing high density heat source such as electron beam should be developed to reduce pore and hot cracking, whichare usually accompanied by MIG and TIG welding processes. In this work, electron beam welding process were used with or without AlMg4.5Mn as filler material to avoid the degradation of mechanical properties. Mechanical and metallurgical characteristics were also studied in electron beam weldment and heat affected zone. Moreover hot cracking mechanism was also investigated.