• Journal of Information Display
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• 제2권4호
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• pp.1-7
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• 2001

This paper investigates the characteristics of a newly developed high density hollow cathode plasma(HCP) system and its application for the etching of silicon wafers. We used $SF_6$ and $O_2$ gases in the HCP dry etch process. This paper demonstrates very high plasma density of $2{\times}10^{12}cm^{-3}$ at a discharge current of 20 rna, Silicon etch rate of 1.3 ${\mu}m$/min was achieved with $SF_6/O_2$ plasma conditions of total gas pressure of 50 mTorr, gas flow rate of 40 seem, and RF power of200W. This paper presents surface etching characteristics on a crystalline silicon wafer and large area cast type multicrystlline silicon wafer. We obtained field emitter tips size of less than 0.1 ${\mu}m$ without any photomask step as well as with a conventional photolithography. Our experimental results can be applied to various display systems such as thin film growth and etching for TFT-LCDs, emitter tip formations for FEDs, and bright plasma discharge for PDP applications. In this research, we studied silicon etching properties by using the hollow cathode plasma system.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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• pp.2140-2142
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• 2005

This paper presents the experimental results on the preliminary breakdown characteristics under a highly non-uniform electric field in $SF_6/CO_2$ gas mixtures. The impulse preliminary breakdown developments are investigated by the measurements of corona current and light emission images. As a result, the preliminary breakdown development mechanisms for both positive and negative polarities are same. The first streamer corona is initiated at the tip of needle electrode, and the leaders develop with a stepwise propagation and bridge the test gap. The pause time of leader pulses in the positive polarity is significantly shorter than that in the negative polarity. Also, the time interval between the first streamer corona onset and breakdown in the negative polarity was much longer than that in the positive polarity The discharge channel paths in the positive polarity were zigzag. On the other hands, the leader channel in the negative polarity was thicker than that in the positive polarity.

• 대한핵의학회:학술대회논문집
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• 대한핵의학회 2001년도 제40차 춘계학술대회 및 연수교육
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• pp.60-65
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• 2001

The positron emission tomography (PET) has been used for the evaluation of the characteristics of various tumors. The role of PET in oncology has been evolved from a pure research tool to a methodology of enormous clinical potential. The unique characteristics of PET imaging make sophisticated quantitation possible. Several quantitative methods, such as standardized uptake values (SUV), simplified quantitative method, Patlak graphical analysis, and Sokoloff's glucose metabolism measurement, have been used in the field of oncology. However, each quantitative method has limitations of its own. For example, the SUV has been used as a quantitative index of glucose metabolism for tumor classification and monitoring response to treatment, even though it depends on blood glucose level, body configuration of patient, and scanning time. The quantitative methods of PET are reviewed and strategy for implementing these methods are presented.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.552-555
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• 2004

The reliability issue of the probe tip/recording media interface is one of the most crucial concerns in the Atomic Force Microscope (AFM)-based recording technology. In this work, the tribological characteristics of the probe/media interface were investigated by performing wear tests using an AFM. The ranges of applied normal load and sliding velocity for the wear test were 10 to 50nN and 2 to 20$\mu$m/s respectively. The damage of the probe tip was quantitatively as well as qualitatively characterized by Field Emission Scanning Probe Microscope (FESEM) analysis and calculated based on Archard s wear equation. It was shown that the wear coefficient of the probe tip was in the order of 10$^{-4}$ ~ 10$^{-3}$ , and significant contamination at the end of the probe tip was observed. Thus in order to implement the AFM-based recording technology, tribological optimization of the probe/media interface must be achieved.

• 한국공작기계학회논문집
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• 제16권4호
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• pp.13-21
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• 2007

This paper presents characteristics of steady flow by variation of a combustion chamber and an intake port. Gas flow field inside a combustion chamber is the important factor in improving combustion stability and reduction of emission level. The flow characteristics such as flow coefficient, tumble ratio and swirl ratio are measured by the steady flow rig test with an impulse meter in this study. In the measuring, the valve lifts are varied between 1mm to 10mm. The three combustion chambers and two intake ports were applied to the steady flow apparatus in order to investigate the effect of swirl and tumble on the in-cylinder flow. As a result, tumble ratio were found to be different by variation of the combustion chambers and the intake ports. The data from the present study can be applied to design of a similar engine as basic data.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 춘계학술대회논문집B
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• pp.847-852
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• 2000

Three dimensional CFD investigations are carried out to understand the complex flow field in a gas turbine combustor with multi-element fuel injectors. The gas turbine considered here is the GE7FA model which has aye fuel injectors in each combustor can and utilizes lean-premixed combustion to meet nitric oxide emission requirements. Detailed three-dimensional flow characteristics and fuel-air mixture formation process inside the fuel nozzle and gas turbine combustor including five swirl nozzle tips are analyzed using commercial FLUENT code.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.974-979
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• 2003

This study aimed to analyze spray characteristics and the ambient flow field in the mixture preparation state of the premixed combustion stage. It is very important to understand the spray characteristics and the fuel injection conditions in direct injection diesel engine because the emission gas compositions from diesel engines are related to spray formation processes of the premixed combustion stage. The numerical simulation was performed using the STAR-CD which is a commercial CFD code. Computed results of the transient high pressure diesel spray were compared with experimental results of the same spray injection condition in the constant volume chamber. The results show that spray patterns of numerical simulation agree with this experimental results comparatively.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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• pp.250-251
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• 2005

Tin dioxide (SnO$_2$) thin films have been prepared on Si wafer (100) by Plasma Enhanced Chemical Vapor Deposition (PECVD). SnO$_2$ thin films were prepared from mixtures of dibutyltin diacetate as a precursor, oxygen as an oxidant at 275, 325, 375, 425$^{\circ}C$, respectively. The microstructure of deposited films was characterized by X-ray diffraction and field emission scanning electron microscopy. Structural characteristics of prepared SnO$_2$ thin films were investigated with different substrate temperature. The deposition rate was linearly increased with substrate temperature. Surface morphology and uniformity of prepared thin film was excellent at 375$^{\circ}C$ and grain size was averagely 25nm.

• 한국표면공학회지
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• 제36권5호
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• pp.398-405
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• 2003

The stainless steel wire requires good corrosion resistance and mechanical properties, such as drawing ability, combined with a high resistance to corrosion. For increasing drawing ability of stainless steel, Ni coating methods have been used in this study. However, there is no information on the electrochemical corrosion behavior of drawed wires after Ni coating. To investigate corrosion resistance and mechanical property of drawed wire, the characteristics of Ni coated wires have been determined by tensile strength tester, hardness tester, field emission scanning microscope, energy dispersive x-ray analysis and potentiodynamic method in 0.1 M HCl. The drawed stainless steel wires showed the strain-induced martensitic structure, whereas non-drawed stainless steel wire showed annealing twin in the matrix of austenitic structure. The hardness and tensile strength of drawed stainless steel wire were higer than that of non-drawed stainless steel wire. Electrochemical measurements showed that, in the case of drawed stainless steel o ire after Ni coating, the corrosion resistance and pitting potential increased compared with non-coated and drawed stainless steel wire due to decrease in the surface roughness.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2014년도 추계학술대회 논문집
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• pp.185-185
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• 2014

In this study, we investigated surface characteristics of hydroxyapatite coated surface on nano/micro pore structured Ti-35Ta-xNb alloys. This paper was focus on morphology and corrosion resistance of Anodic oxidation. To prepare the samples, Ti-35Ta-xNb (x= 0, 10 wt. %) alloys were manufactured by arc melting and heat-treated for 12 h at $1050^{\circ}C$ in Ar atmosphere at $0^{\circ}C$ water quenching. Micro-pore structured surface was performed using anodization with a DC power supply at 280 V for 3 min, nanotube formed on Ti-35Ta-xNb alloys was performed using DC power supply at 30 V in 60 min at room temperature. Surface morphology and structure were examined by field-emission scanning electron microscopy, energy-dispersive X-ray spectroscopy and X-ray diffraction.