• 산업공학
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• 제22권2호
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• pp.126-134
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• 2009

As product quality and yield are essential factors in semiconductor manufacturing, monitoring the main manufacturing steps is a critical task. For the purpose, FDC(Fault detection and classification) is used for diagnosing fault states in the processes by monitoring data stream collected by equipment sensors. This paper proposes an FDC model based on decision tree which provides if-then classification rules for causal analysis of the processing results. Unlike previous decision tree approaches, we reflect the structural aspect of the data stream to FDC. For this, we segment the data stream into multiple subregions, define structural features for each subregion, and select the features which have high relevance to results of the process and low redundancy to other features. As the result, we can construct simple, but highly accurate FDC model. Experiments using the data stream collected from etching process show that the proposed method is able to classify normal/abnormal states with high accuracy.

• 한국산업융합학회 논문집
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• 제7권2호
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• pp.199-205
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• 2004

This paper describes the fault diagnosis method to order to construct CIM in complex system with hierarchical structure similar to human body structure. Complex system is divided into unit, item and component. For diagnosing this hierarchical complex system, it is necessary to implement a special neural network. Fault diagnosis system can forecast faults in a system and decide from the signal information of current machine state. Comparing with other diagnosis system for a single fault, the developed system deals with multiple fault diagnosis, comprising hierarchical neural network (HNN). HNN consists of four level neural network, i.e. first is fault symptom classification and second fault diagnosis for item, third is symptom classification and forth fault diagnosis for component. UNIX IPC is used for implementing HNN with multitasking and message transfer between processes in SUN workstation with X-Windows (Motif). We tested HNN at four units, seven items per unit, seven components per item in a complex system. Each one neural network represents a separate process in UNIX operating system, information exchanging and cooperating between each neural network was done by message queue.

• 한국소음진동공학회논문집
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• 제21권11호
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• pp.1020-1028
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• 2011

As rotating machines play an important role in industrial applications such as aeronautical, naval and automotive industries, many researchers have developed various condition monitoring system and fault diagnosis system by applying artificial neural network. Since using obtained signals without preprocessing as inputs of neural network can decrease performance of fault classification, it is very important to extract significant features of captured signals and to apply suitable features into diagnosis system according to the kinds of obtained signals. Therefore, this paper proposes a neural-network-based fault diagnosis system using AR coefficients as feature vectors by LPC(linear predictive coding) and EIV(errors-in variables) analysis. We extracted feature vectors from sound, vibration and current faulty signals and evaluated the suitability of feature vectors depending on the classification results and training error rates by changing AR order and adding noise. From experimental results, we conclude that classification results using feature vectors by EIV analysis indicate more than 90 % stably for less than 10 orders and noise effect comparing to LPC.

• Journal of Electrical Engineering and Technology
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• 제12권2호
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• pp.830-839
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• 2017

Support vector machine (SVM) is introduced as an effective fault diagnosis technique based on dissolved gases analysis (DGA) for oil-immersed transformers with maximum generalization ability; however, the applicability of the SVM is highly affected due to the difficulty of selecting the SVM parameters appropriately. Therefore, a novel approach combing SVM with improved imperialist competitive algorithm (IICA) for fault diagnosis of oil-immersed transformers was proposed in the paper. The improved ICA, which is proved to be an effective optimization approach, is employed to optimize the parameters of SVM. Cross validation and normalizations were applied in the training processes of SVM and the trained SVM model with the optimized parameters was established for fault diagnosis of oil-immersed transformers. Three classification benchmark sets were studied based on particle swarm optimization SVM (PSOSVM) and IICASVM with four multiple classification schemes to select the best scheme for transformer fault diagnosis. The results show that the proposed model can obtain higher diagnosis accuracy than other methods. The comparisons confirm that the proposed model is an effective approach for classification problems.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2002년도 춘계학술대회논문집
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• pp.39-52
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• 2002

Research Direction The significant research direction in mechanical fault diagnosis area: Theorles and approaches for fault feature extracting and fault classification. Identification Complicated fault generating mechanism and its model Intelligent fault diagnosis system (including the expert system and network based remote diagnosis system) One of the Key Points： Fault feature extracting techniques based on (modern) signal processing(omitted)

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 추계학술대회 논문집 학회본부 A
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• pp.131-133
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• 1999

This paper proposed the technique of the fault-types classification using Adaptive Network Fuzzy Inference System in the distribution system. Fault and fault-like data in the linear RL load, arc furnace load and converter load were extracted by EMTP. These were characterized into 5 input variables and fuzzified automatically by learning. This technique was tested using another fault data unused learning.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 하계학술대회 논문집 A
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• pp.252-254
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• 2001

Accurate detection and classification of faults on transmission lines is vitally important. High impedance faults(HIF) in particular pose difficulties for the commonly employed conventional overcurrent and distance relays, and if not detected, can cause damage to expensive equipment, threaten life and cause fire hazards. Although HIFs are far less common than LIFs, it is imperative that any protection device should be able to satisfactorily deal with both HIFs and LIFs. This paper proposes an algorithm for fault detection and classification for both LIFs and HIFs using Adaptive Network-based Fuzzy Inference System(ANFIS). The performance of the proposed algorithm is tested on a typical 154[kV] Korean transmission line system under various fault conditions. Test results show that the ANFIS can detect and classify faults including (LIFs and HIFs) accurately within half a cycle.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2013년도 추계학술대회 논문집
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• pp.331-337
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• 2013

Acoustic Emission technique is widely applied to develop the early fault detection system, and the problem about a signal processing method for AE signal is mainly focused on. In the signal processing method, envelope analysis is a useful method to evaluate the bearing problems and Wavelet transform is a powerful method to detect faults occurred on rotating machinery. However, exact method for AE signal is not developed yet. Therefore, in this paper two methods which are Hilbert transform and DET for feature extraction. In addition, we evaluate the classification performance with varying the parameter from 2 to 15 for feature selection DET, 0.01 to 1.0 for the RBF kernel function of SVR, and the proposed algorithm achieved 94% classification accuracy with the parameter of the RBF 0.08, 12 feature selection.

• 반도체디스플레이기술학회지
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• 제19권4호
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• pp.121-125
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• 2020

With miniaturization of semiconductor, the manufacturing process become more complex, and undetected small changes in the state of the equipment have unexpectedly changed the process results. Fault detection classification (FDC) system that conducts more active data analysis is feasible to achieve more precise manufacturing process control with advanced machine learning method. However, applying machine learning, especially in supervised learning criteria, requires an arduous data labeling process for the construction of machine learning data. In this paper, we propose a semi-supervised learning to minimize the data labeling work for the data preprocessing. We employed equipment status variable identification (SVID) data and optical emission spectroscopy data (OES) in silicon etch with SF6/O2/Ar gas mixture, and the result shows as high as 95.2% of labeling accuracy with the suggested semi-supervised learning algorithm.

• 한국기계가공학회지
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• 제18권9호
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• pp.29-35
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• 2019

The structure of the machinery industry due to the 4th industrial revolution is changing from precision and durability to intelligent and smart machinery through sensing and interconnection(IoT). There is a growing need for research on prognostics and health management(PHM) that can prevent abnormalities in processing machines and accurately predict and diagnose conditions. PHM is a technology that monitors the condition of a mechanical system, diagnoses signs of failure, and predicts the remaining life of the object. In this study, the vibration generated during machining is measured and a classification algorithm for normal and fault signals is developed. Arbitrary fault signal is collected by changing the conditions of un stable supply cutting oil and fixing jig. The signal processing is performed to apply the measured signal to the learning model. The sampling rate is changed for high speed operation and performed machine learning using raw signal without FFT. The fault classification algorithm for 1D convolution neural network composed of 2 convolution layers is developed.