• Title/Summary/Keyword: elemental components

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Dry Etching Properties of HfAlO3 Thin Film with Addition O2 gas Using a High Density Plasma

  • Woo, Jong-Chang;Lee, Yong-Bong;Kim, Jeong-Ho
    • Transactions on Electrical and Electronic Materials
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    • v.15 no.3
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    • pp.164-169
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    • 2014
  • We investigated the etching characteristics of $HfAlO_3$ thin films in $O_2/Cl_2/Ar$ and $O_2/BCl_3/Ar$ gas, using a high-density plasma (HDP) system. The etch rates of the $HfAlO_3$ thin film obtained were 30.1 nm/min and 36 nm/min in the $O_2/Cl_2/Ar$ (3:4:16 sccm) and $O_2/BCl_3/Ar$ (3:4:16 sccm) gas mixtures, respectively. At the same time, the etch rate was measured as a function of the etching parameter, namely as the process pressure. The chemical states on the surface of the etched $HfAlO_3$ thin films were investigated by X-ray photoelectron spectroscopy. Auger electron spectroscopy was used for elemental analysis on the surface of the etched $HfAlO_3$ thin films. These surface analyses confirm that the surface of the etched $HfAlO_3$ thin film is formed with nonvolatile by-product. Also, Cl-O can protect the sidewall due to additional $O_2$.

Stabilization of Industrial Wastes Landfill using Lab-lysimeter (모형매립조를 이용한 산업폐기물 매립지의 안정화 조사 기초 연구)

  • 박동일;최석규;홍종순;장인용
    • Journal of environmental and Sanitary engineering
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    • v.13 no.3
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    • pp.9-18
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    • 1998
  • An experimental research was conducted to establish primary data for the stabilization assessment of industrial wastes landfill with analysis of waste components and investigation of leachate and gas generation, using three sets of lysimeter as experimental apparatus. Comparing results of lysimeter from data of landfill, it is suggested that lysimeter of this study can be used to accomplish the stabilization assessment of the real landfill site. Moisture content was lower as landfill period was older and combustible component was the highest in lysimeter C. The C/N ratio of waste was 7.4~14.4 and, with the elemental analysis, the theoretical gas generation rate based on the modified Buswell equation was 0.47~0.49 $m^3/kg-dry$ waste in lysimeter C. Considering the C/N ratio of leachate, it is concluded that the addition of carbon source is needed to biodegrade leachate hereafter. Gas generation rate($m^3/kg-dry$ waste) from lysimeter A, B and C was 0.0009, 0.014 and 0.0067, respectively, and different from each other according to the landfill period of wastes. The results in this study show that the biodegradation of microorganism for stabilization of landfill was inhibited and more activated in acidogenic step than in methanogenic of anaerobic degradation.

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Implementation of Polycrystal Model in Rigid Plastic Finite Element Method (강소성 유한요소법에서의 다결정 모델의 구현)

  • Kang, G.P.;Lee, K.;Kim, Y.H.;Shin, K.S.
    • Transactions of Materials Processing
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    • v.26 no.5
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    • pp.286-292
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    • 2017
  • Magnesium alloy shows strong anisotropy and asymmetric behavior in tension and compression curve, especially at room temperature. These characteristics limit the application of finite element method (FEM) which is based on conventional continuum mechanics. To accurately predict the material behavior of magnesium alloy at microstructural level, a methodology of fully coupled multiscale simulation is presented and a crystal plasticity model as a constitutive equation in the simulation of metal forming process is introduced in this study. The existing constitutive equation for rigid plastic FEM is modified to accommodate deviatoric stress component and its derivatives with respect to strain rate components. Viscoplastic self-consistent (VPSC) polycrystal model was selected as a constitutive model because it was regarded as the most robust model compared to Taylor model or Sachs model. Stiffness matrix and load vector were derived based on the new approach and implemented into $DEFORM^{TM}-3D$ via a user subroutine handling stiffness matrix at an elemental level. The application to extrusion and rolling process of pure magnesium is presented in this study to assess the validity of the proposed multiscale process.

Microstructure and Tribological Properties of Ti-Si-C-N Nanocomposite Coatings Prepared by Filtered Vacuum Arc Cathode Deposition

  • Elangovan, T.;Kim, Do-Geun;Lee, Seung-Hun;Kim, Jong-Kuk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.54-54
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    • 2011
  • The demand for low-friction, wear and corrosion resistant components, which operate under severe conditions, has directed attentions to advanced surface engineering technologies. The Filtered Vacuum Arc Cathode Deposition (FVACD) process has demonstrated atomically smooth surface at relatively high deposition rates over large surface areas. Preparation of Ti-Si-C-N nanocomposite coatings on (100) Si and stainless steel substrates with tetramethylsilane (TMS) gas pressures to optimize the film preparation conditions. Ti-S-C-N coatings were characterized using X-ray diffraction, X-ray photoelectron spectroscopy, transmission electron microscopy, nanoindentation, Rockwell C indentation and ball-on-disk wear tests. The XRD results have confirmed phase formation information of TiSiCN coatings, which shows mixing of TiN and TiC structure, corresponding to (111), (200) and (220) planes of TiCN. The chemical composition of the film was investigated by XPS core level spectra. The binding energy of the elements present in the films was estimated using XPS measurements and it shows present of elemental information corresponding to Ti2p, N1s, Si 2p and C1. Film hardness and elastic modulus were measured with a nano-indenter, and film hardness reached 40 GPa. Tribological behaviors of the films were evaluated using a ball-on-disk tribometer, and the films demonstrated properties of low-friction and good wear resistance.

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Secondary Ion Mass Spectrometry : Theory and Recent trends (이차이온질량분석기의 원리와 분석법 동향)

  • Byeon, Mirang;Kim, Da Young;Hong, Tae Eun
    • Ceramist
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    • v.22 no.4
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    • pp.357-367
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    • 2019
  • Secondary Ion Mass Spectrometry(SIMS) is an analytical method that measures the distribution and concentration of elements or compounds by analyzing the mass of secondary ions released by irradiating ion beams with energy of hundreds eV to 20 keV on the sample surface. Unlike other similar analytical instruments, SIMS directly detect the elemental ions that constitute a sample, allowing you to accurately identify components and obtain concentration information in the depth direction. It is also a great feature for measuring isotopes and analyzing light elements, especially hydrogen. In particular, with the development of materials science, there is an increasing demand for trace concentration analysis and isotope measurements in the micro-regions of various materials. SIMS has a short history compared to other similar methods; nevertheless, SIMS is still advancing in hardware and is expected to contribute to the development of materials science through research and development of advanced analytical techniques.

Electron Beam Mediated Simple Synthetic Route to Preparing Layered Zinc Hydroxide

  • Bae, Hyo-Sun;Jung, Hyun
    • Bulletin of the Korean Chemical Society
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    • v.33 no.6
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    • pp.1949-1954
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    • 2012
  • We have developed a novel and eco-friendly synthetic route for the preparation of a two-dimensional layered zinc hydroxide with intercalated nitrate anions. The layered zinc hydroxide nitrate, called 'zinc basic salt', was, in general, successfully synthesized, using an electron beam irradiation technique. The 2-propanol solutions containing hydrated zinc nitrate were directly irradiated with an electron-beam at room temperature, under atmospheric conditions, without stabilizers or base molecules. Under electron beam irradiation, the reactive OH radicals were generated by radiolysis of water molecules in precursor metal salts. After further radiolytic processes, the hydroxyl anions might be formed by the reaction of solvated electrons and the OH radical. Finally, the $Zn_5(OH)_8(NO_3)_2{\cdot}2H_2O$ was precipitated by the reaction of zinc cation and hydroxyl anions. Structure and morphology of obtained compounds were characterized by powder X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), and high resolution transmission electron microscopy (HR-TEM). The chemical components of the products were determined by Fourier transform infrared spectroscopy (FT-IR) and elemental analysis (EA). The thermal behavior of products was studied by thermogravimetric (TG) and differential thermal analysis (DTA).

Investigation of PM2.5 Pollution Episodes in Gwangju (광주지역 PM2.5의 고농도 오염현상 조사)

  • Yu, Geun-Hye;Cho, Sung-Yong;Bae, Min-Suk;Lee, Kwon-Ho;Park, Seung-Shik
    • Journal of Korean Society for Atmospheric Environment
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    • v.31 no.3
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    • pp.269-286
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    • 2015
  • 24-hr integrated $PM_{2.5}$ measurements were performed between December 2013 and October 2014 at an urban site in Gwangju and the collected samples were analyzed for organic carbon (OC), elemental carbon (EC), ionic species, and elemental species. Objectives of this study were to identify $PM_{2.5}$ pollution episodes, to characterize their chemical components, and to examine their probable origins. Over the course of the study period, average $PM_{2.5}$ concentration was $37.7{\pm}23.6$ $(6.0{\sim}121.5){\mu}g/m^3$. Concentrations of secondary ionic species; $NH_4{^+}$, $NO_3{^-}$, and $SO_4{^{2-}}$ was on average $5.54{\mu}g/m^3$ (0.28~ 20.86), $7.60{\mu}g/m^3$ (0.45~ 33.53), and $9.05{\mu}g/m^3$ (0.50~ 34.98), accounting for 13.7% (4.6~ 22.7), 18.6% (2.9~ 44.8), and 22.9% (4.9~ 55.1) of the $PM_{2.5}$ concentration, respectively. Average OC and EC concentrations were $5.22{\mu}g/m^3$ and $1.54{\mu}g/m^3$, taking possession of 4.6 and 22.2% (as organic mass) of the $PM_{2.5}$, respectively. Frequencies at which 24-hr averaged $PM_{2.5}$ exceeded a 24-hr averaged Korean $PM_{2.5}$ standard of $50{\mu}g/m^3$ (termed as an "episode" in this study) were 30, accounting for 21.3% of total 141 measurements. These pollution episodes were mostly associated with haze phenomenon and weak surface wind speed. It is suggested that secondary formation of aerosol was one important formation mechanism of the episodes. The episodes were associated with enhancements of organic mass, $NO_3{^-}$ and $SO_4{^{2-}}$ in winter, of $NO_3{^-}$ and $SO_4{^{2-}}$ in spring, and of $SO_4{^{2-}}$ in summer. Potential source contribution function results indicate also that $PM_{2.5}$ episodes were likely attributed to local and regional haze pollution transported from northeastern China in winter, to atmospheric processing of local emissions rather than long-range transport of air pollutants in spring, and to the $SO_4{^{2-}}$ driven by photochemistry of $SO_2$ in summer.

Source Apportionment Study and Chemical Composition of PM10 and PM2.5 in the Industrial Complex of Busan City, Korea (SEM-EDX 분석법에 의한 부산 S공업단지의 PM10과 PM2.5의 화학적 조성 및 발생원 추정)

  • Kim, Yong-Seog;Choi, Kum-Chan;Suh, Jeong-Min
    • Journal of Environmental Science International
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    • v.26 no.11
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    • pp.1297-1306
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    • 2017
  • This study identified physical characteristics and aerosol particle sources of $PM_{10}$ and $PM_{2.5}$ in the industrial complex of Busan Metropolitan City, Korea. Samples of $PM_{10}$, $PM_{2.5}$ and also soil, were collected in several areas during the year of 2012 to investigate elemental composition. A URG cyclone sampler was used for collection. The samples were collected according to each experimental condition, and the analysis method of SEM-EDX was used to determine the concentration of each metallic element. The comparative analysis indicated that their mass concentration ranged from 1% to 3%. The elements in the industrial region that were above 10% were Si, Al, Fe, and Ca. Those below 5% were Na, Mg, and S. The remaining elements (1% of total mass) consisted of elements such as Ni, Co, Br and Pb. Finally, a statistical tool was applied to the elemental results to identify each source for the industrial region. From a principal components analysis (SPSS, Ver 20.0) performed to analyze the possible sources of $PM_{10}$ in the industrial region, five main factors were determined. Factor 1 (Si, Al), which accounted for 15.8% of the total variance, was mostly affected by soil and dust from manufacturing facilities nearby, Factors 2 (Cu, Ni), 3 (Zn, Pb), and 4 (Mn, Fe), which also accounted for some of variance, were mainly related to iron, non-ferrous metals, and other industrial manufacturing sources. Also, five factors determined to access possible sources of $PM_{2.5}$, Factor 1 (Na, S), accounted for 13.5% of the total variance and was affected by sea-salt particles and fuel incineration sources, and Factors 2 (Ti, Mn), 3 (Pb, Cl), 4 (K, Al) also explained significant proportions of the variance. Theses factors mean that the $PM_{2.5}$ emission sources may be considered as sources of incineration, and metals, and non-ferrous manufacturing industries.

Catalytic Characteristics of Mn-PC for VOCs Combustion (VOCs 연소용 Mn-PC 촉매 특성)

  • Seo, Seong-Gyu;Ma, Zhong-Kun;Liu, Yi;Yoon, Hyung-Sun;Kim, Sang-Chai
    • Journal of Korean Society of Environmental Engineers
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    • v.33 no.4
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    • pp.237-242
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    • 2011
  • In this study, the catalytic activity of Mn-Phthalocyanine (Mn-PC) for VOCs (acetadehyde, propionaldehyde and toluene) combustion was determined. The reaction was carried out in a fixed bed reactor at the temperature range of $200{\sim}380^{\circ}C$. We investigated the physicochemical properties of Mn-PC before and after the pretreatment (air, $450^{\circ}C$, 1 hr, 60 cc/min) by TGA (Thermogravimetric Analyzer), BET (Brunauer Emmett Teller), EA (Elemental Analyzer), XRD (X-ray Diffractometer) and SEM (Scanning Electronic Microscope). By TGA analysis, 88 wt.% mass loss of Mn-PC was found at $419^{\circ}C$. The BET surface area of Mn-PC increased after the pretreatment. The decomposition and combustion of organic components in Mn-PC were observed by EA analysis. We also confirmed that Mn-PC had transformed into a new manganese oxide phase ($Mn_3O_4$) after the pretreatment by XRD analysis. By SEM analysis, many of the micropores generated during the pretreatment were found. The catalytic activity of Mn-PC with the pretreatment for propionaldehyde combustion was higher than that of $Mn_3O_4$ and fresh Mn-PC. It showed the catalytic activity of Mn-PC with the pretreatment for VOCs combustion by the order of toluene < acetadehyde < propionaldehyde.

Investigation of Catalytic Deactivation by Small Content Oxygen Contained in Regeneration Gas Influenced on DSRP (직접 황 회수 공정으로 유입되는 재생가스에 함유된 미량산소의 촉매활성저하 원인 규명)

  • Choi, Hee-Young;Park, No-Kuk;Lee, Tae Jin
    • Clean Technology
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    • v.20 no.3
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    • pp.212-217
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    • 2014
  • In order to regenerate the sulfidated desulfurization sorbent, oxygen is used as the oxidant agent on the regeneration process. The small amount of oxygen un-reacted in regeneration process is flowed into direct sulfur recovery process. However, the reactivity for $SO_2$ reduction can be deteriorated with the un-reacted oxygen by various reasons. In this study, the deactivation effects of un-reacted oxygen contained in the off-gas of regeneration process flowed into direct sulfur recovery process of hot gas desulfurization system were investigated. Sn-Zr based catalysts were used as the catalyst for $SO_2$ reduction. The contents of $SO_2$ and $O_2$ contained in the regenerator off-gas used as the reactants were fixed to 5.0 vol% and 4.0 vol%, respectively. The catalytic activity tests with a Sn-Zr based catalyst were for $SO_2$ reduction performed at $300-450^{\circ}C$ and 1-20 atm. The un-reacted oxygen oxidized the elemental sulfur produced by $SO_2$ catalytic reduction and the conversion of $SO_2$ was reduced due to the production of $SO_2$. However, the temperature for the oxidation of elemental sulfur increased with increasing pressure in the catalytic reactor. Therefore, it was concluded that the decrease of reactivity at high pressure is occurred by catalytic deactivation, which is the re-oxidation of lattice oxygen vacancy in Sn-Zr based catalyst with the un-reacted oxygen on the catalysis by redox mechanism. Meanwhile the un-reacted oxygen oxidized CO supplied as the reducing agent and the temperature in the catalyst packed bed also increased due to the combustion of CO. It was concluded that the rapidly increasing temperature in the packed bed can induce the catalytic deactivation such as the sintering of active components.