• JSTS:Journal of Semiconductor Technology and Science
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• 제1권4호
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• pp.197-201
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• 2001

The influence of argon, oxygen, and nitrogen admixtures on the dissociation of $Cl_2$ molecules in a glow discharge low-temperature plasma under the constant pressure conditions was investigated. For $Cl_2/Ar$ and $Cl_2/O_2$mixtures, the concentration of chlorine atoms was observed to be a practically constant at argon or oxygen concentrations up to 50%. This invariability is a most pro bably explained by relative increase in rate of $Cl_2$ direct electron impact dissociation due to the changes in electrophysical parameters of plasma such as EEDF, electron drift rate and mean energy. For all the considered mixtures, the contribution of stepwise dissociation involving active species from gas additives (metastable atoms and molecules, vibrationally excited molecules) was found to be negligible.

• Journal of Welding and Joining
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• 제13권2호
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• pp.122-131
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• 1995

The effects of cooling rate on the microstructures, precipitation of Cu-cluster, .epsilon.-Cu and impact toughness of high strength low alloy(HSLA) steel were studied using hardness tester, impact tester, DSC(differential scanning calorimetry), AES(auger electron spectroscopy) and TEM(transmission electron microscopy). Not only the Cu-precipitates but also the segregation of Cu, As, Sb, P, S, N, Sn along grain boundary were not observed at the specimens heat treated from 800.deg. C to 300.deg. C with the cooling time of 12-125 sec. The Cu-cluster, .epsilon.-Cu are formed by introducing ageing after cooling and the effect of precipitates on hardening increase after cooling was the same in all cooling rate. The peak hardness was obtained at an ageing of 500.deg. C in all cooling conditions. The impact energy become higher as the cooling time increases. This fact can be explained to be due to the tempering effect applied on the cooling stage since the present alloy has a relatively high Ms temperature and the local high concentration of the retained austenite.

• 방사선산업학회지
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• 제5권2호
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• pp.145-149
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• 2011

Poly(butylenes terephthalate) have made large strides in applications of injection, extrusion, and molding material due to their excellent thermal resistance and appropriate mechanical properties. However, PBT was not hard polymer but a soft polymer which caused low absorption of external energy and the defect of being easily broken with the strong impact. Thus, the electron beam irradiation was carried out over a range of irradiation doses from 100 to 1,000 kGy for enhancing the properties. The decreases of $T_m$, $T_c$, and enthalpy were observed as increasing the absorbed dose in the results of DSC analysis. The improvement in the impact strength of PBT was clearly observed as the absorbed dose was increased. This was probably due to the 3-dimensional network structures, resulting in increasing the absorption of impact energy. In addition, the wear properties had increased at higher than 300 kGy. The negative deviation of weight loss confirmed the improvement of the wear properties of PBT, as evidenced by SEM observation on the wear surfaces.

• 한국세라믹학회지
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• 제39권5호
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• pp.433-437
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• 2002

Impact-collision ion scattering spectroscopy was applied to study the geometrical structure of epitaxially grown TiO layers on the MgO(100) surface. Hetero-epitaxial TiO layer was formed by thermal evaporation of titanium onto the MgO(100) surface followed by the exposure to oxygen at $400{\circ}$. The well-ordered TiO structure was confirmed by the impact-collision ion scattering spectroscopy and reflection high energy electron diffraction patterns. It is revealed that the Ti and O atoms are located on the on-top site of the MgO(100) surface and the TiO overlayers are composed of little three dimensional islands.

• 한국결정학회:학술대회논문집
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• 한국결정학회 2002년도 정기총회 및 추계학술연구발표회
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• pp.17-17
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• 2002

Time-of-flight impact collision ion scattering spectroscopy (TOF-ICISS) was applied to study the geometrical structure of the epitaxially grown BaTiO₃ layers on the MgO(100) surface. Hetero-epitaxial BaTiO₃ layers can be deposited by the following steps: first thermal evaporation of titanium onto the MgO(100) surface in the atmosphere of oxygen at 400℃, secondly thermal evaporation of barium in the same manner, and finally annealing at 800℃. Well ordered perovskite BaTiO₃ was confirmed from the ICISS spectra and reflection high electron energy diffraction (RHEED) patterns. It was also revealed that BaTiO₃ had cubic structure with the same lattice parameter of bulk phase.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.171.1-171.1
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• 2015

Carbon nanotube emitters is very promising electron emitter for electron beam applications. We introduced the carbon nanotube electron beam (C-beam) exposure technic using triode structure. As a source, the electron beam emit from CNT emitters placed at the cathode by high electric field. Through the gate mesh, with high accelerating energy, the electron can be extracted easily and impact at the anode plate. For thin film modification, after the C-beam exposure on the amorphous silicon thin film, we found phase changes and it showed a high crystallinity from the Raman measurement. We expect that this crystallized film will be a good candidate as a new active layer of TFT.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.243.2-243.2
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• 2016

Tungsten (W) is recently gaining attention as a potential candidate to replace Cu in semiconductor metallization due to its expected improvement in material reliability and reduced resistivity size effect. In this study, the impact of electron scattering at grain boundaries in a polycrystalline W thin film was investigated. Two nominally 300 nm-thick films, a (110)-oriented single crystal film and a (110)-textured polycrystalline W film, were prepared onto (11-20) Al2O3 substrate and thermally oxidized Si substrate, respectively in identical fabrication conditions. The lateral grain size for the polycrystalline film was determined to be $119{\pm}7nm$ by TEM-based orientation mapping technique. The film thickness was chosen to significantly exceed the electron mean free path in W (16.1 and 77.7 nm at 293 and 4.2 K, respectively), which allows the impact of surface scattering on film resistivity to be negligible. Then, the difference in the resistivity of the two films can be attributed to grain boundary scattering. quantitative analyses were performed by employing the Mayadas-Shatzkes (MS) model, where the grain boundary reflection coefficient was determined to be $0.42{\pm}0.02$ and $0.40{\pm}0.02$ at 293 K and 4.2 K, respectively.

• 한국표면공학회지
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• 제35권6호
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• pp.408-414
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• 2002

TiN and TiAlN coating layer were deposited on WC-Co steel substrates by an arc ion plating(AIP) technique. The crystallinity and morphology for the deposited coating layers were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The impact behaviors of the deposited TiN and TiAlN coating layer were investigated with a ball-on-plate impact tester. Beyond $10^2$ impact cycle, TiAlN coating layer showed superior impact wear resistance compared to TiN coating layer. On the other hand, both TiN and TiAlN coating layers started to be partially failed between $10^2$ and $10^3$ impact cycle. Above $10^3$ impact cycle, TiN and TiAlN coating layers showed similar impact behavior because of the substrate effect.

• Nuclear Engineering and Technology
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• 제54권2호
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• pp.486-492
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• 2022

Nitrogen oxides (NO_x; NO and NO₂) are major air pollutants and can cause harmful effects on the human body. Electron Beam Flue Gas Treatment (EBFGT) is a technology that generates electrons with an energy of 0.5-1 MeV using electron accelerators and effectively processes exhaust gases. In this study, NO_x was removed using an electron beam accelerator with spraying additives (NaOH and NH₄OH). NO and NO₂ were 100% and more than 94% removed, respectively, at an electron beam absorbed dose of 20 kGy and an additive concentration of 0.02 M (mol/L). In most cases, NO_x was removed better with lower initial NOx concentrations and higher electron beam absorbed doses. As the irradiation strength (mA) of the electron beam increases, the probability of electron impact on the material accordingly rises, which may lead to increase removal efficiency. The results of the present study show that the continuous electron beam process using additives achieved more effective removal efficiency than either individual process (wet-scrubbing or EB irradiation only).

• Nuclear Engineering and Technology
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• 제55권12호
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• pp.4678-4684
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• 2023

Using the Monte Carlo method, the impact of the angular distribution of the electron source on the dose distribution for the 2.5 MeV ELV electron accelerator was explored. The experiment measured the 3-D dose distribution in the irradiation chamber for electron energies of 1.0 MeV and 2.5 MeV. The simulation used the MCNP6.2 code to evaluate three angular distribution models of the source: a mono-directional beam, a cone shape, and a triangular shape. Of the three models, the triangular shape with angles θ = 30°, φ = 0° best represents the angle of the scan hood through which the electron beam exits. The MCNP6.2 simulation results demonstrated that the triangular model is the most accurate representation of the angular distribution of the electron source for the 2.5 MeV ELV electron accelerator.