Proceedings of the Korea Crystallographic Association Conference (한국결정학회:학술대회논문집)

Korean Crystallographic Association (한국결정학회)
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Structure Analysis of $BaTiO_3$ Film on the MgO(001) Surface by Time-Of-Flight Impact-Collision Ion Scattering Spectroscopy

  • Yeon Hwang (Department of Materials Science ＆ Engineering, Seoul National University of Technology) ;
  • Lee, Tae-Kun (Department of Materials Science ＆ Engineering, Seoul National University of Technology) ;
  • Ryutaro Souda (Advanced Materials Laboratory, National Institute far Materials Science)
  • Published : 2002.11.01
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Abstract

Time-of-flight impact collision ion scattering spectroscopy (TOF-ICISS) was applied to study the geometrical structure of the epitaxially grown BaTiO₃ layers on the MgO(100) surface. Hetero-epitaxial BaTiO₃ layers can be deposited by the following steps: first thermal evaporation of titanium onto the MgO(100) surface in the atmosphere of oxygen at 400℃, secondly thermal evaporation of barium in the same manner, and finally annealing at 800℃. Well ordered perovskite BaTiO₃ was confirmed from the ICISS spectra and reflection high electron energy diffraction (RHEED) patterns. It was also revealed that BaTiO₃ had cubic structure with the same lattice parameter of bulk phase.

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