• Title/Summary/Keyword: electro-mechanical system

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X-ray grayscale lithography for sub-micron lines with cross sectional hemisphere for Bio-MEMS application (엑스선 그레이 스케일 리소그래피를 활용한 반원형 단면의 서브 마이크로 선 패턴의 바이오멤스 플랫폼 응용)

  • Kim, Kanghyun;Kim, Jong Hyun;Nam, Hyoryung;Kim, Suhyeon;Lim, Geunbae
    • Journal of Sensor Science and Technology
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    • v.30 no.3
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    • pp.170-174
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    • 2021
  • As the rising attention to the medical and healthcare issue, Bio-MEMS (Micro electro mechanical systems) platform such as bio sensor, cell culture system, and microfluidics device has been studied extensively. Bio-MEMS platform mostly has high resolution structure made by biocompatible material such as polydimethylsiloxane (PDMS). In addition, three dimension structure has been applied to the bio-MEMS. Lithography can be used to fabricate complex structure by multiple process, however, non-rectangular cross section can be implemented by introducing optical apparatus to lithography technic. X-ray lithography can be used even for sub-micron scale. Here in, we demonstrated lines with round shape cross section using the tilted gold absorber which was deposited on the oblique structure as the X-ray mask. This structure was used as a mold for PDMS. Molded PDMS was applied to the cell culture platform. Moreover, molded PDMS was bonded to flat PDMS to utilize to the sub-micro channel. This work has potential to the large area bio-MEMS.

PZT Impedance-based Damage Detection for Civil Infrastructures (토목 구조물의 PZT Impedance 기반 손상추정기법)

  • S. H. Park;Y. Roh;C. B. Yun;J. H. Yi
    • Proceedings of the Computational Structural Engineering Institute Conference
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    • 2004.04a
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    • pp.373-380
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    • 2004
  • This paper presents the feasibility of an impedance-based damage detection technique using piezoelectric (PZT) transducers for civil infrastructures such as steel bridges. The impedance-based damage detection method is based on monitoring the changes in the electrical impedance. Those changes in the electrical impedance are due to the electro-mechanical coupling property of the piezoelectric material and structure. An effective integrated structural health monitoring system must include a statistical process of damage detection that is automated and real time assessment of damage in the structure. Once measured, damage sensitive features from this impedance change can be statistically quantified for various damage cases. The results of the experimental study on three kinds of structural members show that cracks or loosened bolts/nuts near the PZT sensors may be effectively detected by monitoring the shifts of the resonant frequencies. The root mean square (RMS) deviations of impedance functions between before and after damages were also considered as a damage indicator. The subsequent statistical methods using the impedance signature of the PZT sensors were investigated.

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Development of a MEMS-based H2S Sensor with a High Detection Performance and Fast Response Time

  • Dong Geon Jung;Junyeop Lee;Dong Hyuk Jung;Won Oh Lee;Byeong Seo Park;Daewoong Jung
    • Journal of Sensor Science and Technology
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    • v.32 no.4
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    • pp.207-212
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    • 2023
  • H2S is a toxic and harmful gas, even at concentrations as low as hundreds of parts per million; thus, developing an H2S sensor with excellent performance in terms of high response, good selectivity, and fast response time is important. In this study, an H2S sensor with a high response and fast response time, consisting of a sensing material (SnO2), an electrode, a temperature sensor, and a micro-heater, was developed using micro-electro-mechanical system technology. The developed H2S sensor with a micro-heater (circular type) has excellent H2S detection performance at low H2S concentrations (0-10 ppm), with quick response time (<16 s) and recovery time (<65 s). Therefore, we expect that the developed H2S sensor will be considered a promising candidate for protecting workers and the general population and for responding to tightened regulations.

Development of Dispenser System with Electrohydrodynamic and Voice Coil Motor for White Light Emitting Diode (백색 LED 제조를 위한 정전기력과 보이스코일모터를 이용한 디스펜서 시스템 개발)

  • Kang, Dong-Seong;Kim, Ki-Beom;Ha, Seok-Jae;Cho, Myeong-Woo;Lee, Woo-Jung
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.16 no.10
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    • pp.6925-6931
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    • 2015
  • LED(Light Emitting Diode) is used in various filed like a display because of low power consuming, long life span, high brightness, rapid response time and environmental-friendly characteristic. General fabrication method is combination blue light LED chip with yellow fluorescent substance. Because this way is suitable for industry field in terms of convenience, economic, efficiency. In white light LED packaging process, encapsulation process that is dispensing fluorescent substance with silicon to blue light LED chip is most important. So, in this paper we develop EHD pump system using voice coil motor and electrostatic pump for dispensing fluorescent substance. For these things we conduct basic test about liquid surface profiles by voltage and process time. Through this data we decide optimal process condition and verify the optimal condition using design of experiment method. And to confirm uniformity of the condition, we conduct repeat dispensing test.

Filtering and Intrusion Detection Approach for Secured Reconfigurable Mobile Systems

  • Idriss, Rim;Loukil, Adlen;Khalgui, Mohamed;Li, Zhiwu;Al-Ahmari, Abdulrahman
    • Journal of Electrical Engineering and Technology
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    • v.12 no.5
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    • pp.2051-2066
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    • 2017
  • This paper deals with reconfigurable secured mobile systems where the reconfigurability has the potential of providing a required adaptability to change the system requirements. The reconfiguration scenario is presented as a run-time automatic operation which allows security mechanisms and the addition-removal-update of software tasks. In particular, there is a definite requirement for filtering and intrusion detection mechanisms that will use fewer resources and also that will improve the security on the secured mobile devices. Filtering methods are used to control incoming traffic and messages, whereas, detection methods are used to detect malware events. Nevertheless, when different reconfiguration scenarios are applied at run-time, new security threats will be emerged against those systems which need to support multiple security objectives: Confidentiality, integrity and availability. We propose in this paper a new approach that efficiently detects threats after reconfigurable scenarios and which is based on filtering and intrusion detection methods. The paper's contribution is applied to Android where the evaluation results demonstrate the effectiveness of the proposed middleware in order to detect the malicious events on reconfigurable secured mobile systems and the feasibility of running and executing such a system with the proposed solutions.

Commissioning result of the KSTAR in-vessel cryo-pump

  • Chang, Y.B.;Lee, H.J.;Park, Y.M.;Lee, Y.J.;Kwag, S.W.;Song, N.H.;Park, D.S.;Joo, J.J.;Moon, K.M.;Kim, N.W.;Yang, H.L.;Oh, Y.K.
    • Progress in Superconductivity and Cryogenics
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    • v.15 no.4
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    • pp.53-58
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    • 2013
  • KSTAR in-vessel cryo-pump has been installed in the vacuum vessel top and bottom side with up-down symmetry for the better plasma density control in the D-shape H-mode. The cryogenic helium lines of the in-vessel cryo-pump are located at the vertical positions from the vacuum vessel torus center 2,000 mm. The inductive electrical potential has been optimized to reduce risk of electrical breakdown during plasma disruption. In-vessel cryo-pump consists of three parts of coaxial circular shape components; cryo-panel, thermal shield and particle shield. The cryo-panel is cooled down to below 4.5 K. The cryo-panel and thermal shields were made by Inconel 625 tube for higher mechanical strength. The thermal shields and their cooling tubes were annealed in air environment to improve the thermal radiation emissivity on the surface. Surface of cryo-panel was electro-polished to minimize the thermal radiation heat load. The in-vessel cryo-pump was pre-assembled on a test bed in 180 degree segment base. The leak test was carried out after the thermal shock between room temperature to $LN_2$ one before installing them into vacuum vessel. Two segments were welded together in the vacuum vessel and final leak test was performed after the thermal shock. Commissioning of the in-vessel cryo-pump was carried out using a temporary liquid helium supply system.

Development and Characterization of Hafnium-Doped BaTiO3 Nanoparticle-Based Flexible Piezoelectric Devices (Hf 도핑된 BaTiO3 나노입자 기반의 플렉서블 압전 소자 개발 및 특성평가)

  • HakSu Jang;Hyeon Jun Park;Gwang Hyeon Kim;Gyoung-Ja Lee;Jae-Hoon Ji;Donghun Lee;Young Hwa Jung;Min-Ku Lee;Changyeon Baek;Kwi-Il Park
    • Journal of Sensor Science and Technology
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    • v.33 no.1
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    • pp.34-39
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    • 2024
  • Energy harvesting technology that converts the wasted energy resources into electrical energy is emerging as a semipermanent power source for self-powered electronics and wireless low-power sensor systems. Among the various energy conversion techniques, flexible piezoelectric energy harvesters (f-PEHs), using materials with piezoelectric effects, have attracted significant interest because they can harvest a small mechanical energy into electrical signals without constraints of time and space in various environments. In this study, we used a flexible piezoelectric composite film fabricated by dispersing BaHfxTi(1-x)O3 (x = 0, 0.01, 0.05, 0.1) piezoelectric powders inside a polymeric matrix to facilitate f-PEHs. The fabricated f-PEH with optimal Hf contents (x = 0.05) generated a maximum output voltage of 0.95 V and current signal of 130 nA with stable electrical/mechanical disabilities under periodically bending deformations. In addition, we demonstrated a cantilever-type f-PEH and investigated its potential as a sensor by characterizing the output performance under mechanical vibrations at various frequencies. This study provides the breakthrough for realizing self-powered energy harvesting and sensing systems by adopting the lead-free piezoelectric composites under vibrational environments.

A Study on Communication Safety and Evaluation Tool in Railway Communication System (열차제어시스템 통신 안정성 및 평가 도구 연구)

  • Kim, Sung-Un;Seo, Sang-Bo;Song, Seung-Mi;Jo, Chan-Hyo;Hwang, Jong-Gyu;Jo, Hyun-Jeong
    • Journal of the Korean Society for Railway
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    • v.11 no.4
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    • pp.349-356
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    • 2008
  • Put Safety-critical systems related to the railway communications are currently undergoing changes. Mechanical and electro-mechanical devices are being replaced by programmable electronics that are often controlled remotely via communication networks. Therefore designers and operators now not only have to contend with component failures and user errors, but also with the possibility that malicious entities are seeking to disrupt the services provided by theirs systems. Recognizing the safety-critical nature of the types of communications required in rail control operations, the communications infrastructure will be required to meet a number of safety requirements such as system faults, user errors and the robustness in the presence of malicious attackers who are willing to take determined action to interfere in the correct operation of a system. This paper discusses the safety strategies employed in the railway communications and proposes a security mechanism for Korean railway communication system. We present the developed communication safety evaluation tool based on the proposed security mechanism and also evaluate its protecting capability against the threats of masquerading, eavesdropping, and unauthorized message manipulation.

Dielectric and Piezoelectric Properties of (K0.5Na0.5) (Nb0.97Sb0.03)O3 Ceramics Doped with K4CuNb8O23

  • Lee, Sang-Ho;Lee, Kab-Soo;Yoo, Ju-Hyun;Jeong, Yeong-Ho;Yoon, Hyun-Sang
    • Transactions on Electrical and Electronic Materials
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    • v.12 no.2
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    • pp.72-75
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    • 2011
  • In this study, $(K_{0.5}Na_{0.5})(Nb_{0.97}Sb_{0.03})O_3+0.9$ mol% $K_{5.4}Cu_{1.3}Ta_{10}O_{29}+x$ mol% $K_4CuNb_8O_{23}$ (x = 0, 0.2, 0.6, 0.8) ceramics were prepared by a conventional mixed oxide method. Their microstructure and electric properties were investigated. The secondary phase was made by virtue of $K_4CuNb_8O_{23}$ (KCN) addition in the $(K_{0.5}Na_{0.5})(Nb_{0.97}Sb_{0.03})O_3$ system ceramics. However, the sinterability of the ceramics increased with increasing $K_4CuNb_8O_{23}$ content. At the 0.6 mol% $K_4CuNb_8O_{23}$ added composition ceramics sintered at $1,060^{\circ}C$, kp and $d_{33}$ showed the optimum values of 0.39 and 145 pC/N, respectively, suitable for piezoelectric actuator application.

비대칭 마그네트론 스퍼터링 방법으로 TiC 박막의 트라이볼로지 특성에 미치는 기판온도 영향

  • Park, Yong-Seop;Seo, Mun-Su;Hong, Byeong-Yu;Lee, Jae-Hyeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.703-703
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    • 2013
  • 다이아몬드상 탄소 박막(Diamond-like carbon, DLC) 박막은 낮은 마찰 계수, 높은 내마모성, 화학적 안정성, 적외선 영역에서의 높은 투과율 등의 장점을 바탕으로 MEMS (Micro-Electro Mechanical System) 소자와 MMAs (Moving Mechanical Assemblies)의 고체윤활코팅, 마그네틱 미디어와 하드디스크의 슬라이딩 표면 등 다양한 분야에 코팅소재로써 응용되어왔다 [1,2]. 현재 전기철도용 집전판은 마찰이 적고 전도성을 지니는 카본 소재로 구성되어 있다. 그러나 그 마모 비율이 너무 심하여 이를 개선할 수 있는 방안으로 고경도 저마찰력을 지니는 DLC 박막을 코팅 소재로써 제안하고자 한다. 그러나 기존에 DLC 박막은 절연특성이 매우 우수하기 때문에 기존에 전도성을 지니는 카본 집전판에 적용하기에는 어려움이 따른다. 따라서 DLC 박막 내에 실리콘(Si) 또는 금속(Metal)을 첨가시키거나, 금속 중간층을 포함시켜 전기적으로 전도특성을 향상시키는 방안이 제시되고 있으며, 본 연구에서는 DLC 박막과 유사하게 우수한 경도특성을 지니고, 낮은 마찰계수등을 지니는 비정질 탄소박막을 연구하여 카본 집전판에 코팅하고자하며, 특히 비정질 탄소박막에 금속 Ti를 도핑하여 집전판과의 접착력과 전기적 전도 특성을 향상시키고자 한다. Ti가 도핑된 탄소박막(TiC) 박막은 비대칭 마그네트론 스퍼터링(unbalanced magnetron sputtering; UBMS) 시스템을 이용하여 제작하였으며, 스퍼터링 조건 중 기판에 인가되어지는 기판온도에 따라 변화되어지는 TiC 박막의 트라이볼로지(Tribology) 특성을 고찰하고자 하였다. 증착시 기판온도의 증가는 TiC 박막의 경도, 마찰계수 특성등 트라이볼로지 특성을 향상시켰으며, 전기적 전도 특성을 향상시켰다. 이러한 결과는 스퍼터링 방법에 의해 증착되어진 TiC 박막내에 존재하는 sp2 결합과 관계가 있음을 확인할 수 있으며, 트라이 볼로지 특성은 TiC 박막내에 sp2 탄소결합의 비율 증가와 관련되어졌다. 특히 sp2 탄소결합은 TiC 박막 증착시 증가된 기판온도와 밀접한 관계가 있으며 기판온도의 증가에 따라 나노결정 클러스터의 크기와 수의 변화와 밀접한 관계가 있음을 확인하였다. 결국 기판온도는 TiC 박막의 트라이볼로지 특성을 향상시켰으며, 전기적 특성 또한 향상시켜 전기철도 집전판에 응용을 위한 소재로 평가할 수 있다.

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