Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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X-ray grayscale lithography for sub-micron lines with cross sectional hemisphere for Bio-MEMS application

엑스선 그레이 스케일 리소그래피를 활용한 반원형 단면의 서브 마이크로 선 패턴의 바이오멤스 플랫폼 응용

  • 김강현 (포항공과대학교 기계공학과) ;
  • 김종현 (포항공과대학교 기계공학과) ;
  • 남효영 (포항공과대학교 창의 IT 융합공학과) ;
  • 김수현 (포항공과대학교 기계공학과) ;
  • 임근배 (포항공과대학교 기계공학과)
  • Received : 2021.05.11
  • Accepted : 2021.05.25
  • Published : 2021.05.31
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Abstract

As the rising attention to the medical and healthcare issue, Bio-MEMS (Micro electro mechanical systems) platform such as bio sensor, cell culture system, and microfluidics device has been studied extensively. Bio-MEMS platform mostly has high resolution structure made by biocompatible material such as polydimethylsiloxane (PDMS). In addition, three dimension structure has been applied to the bio-MEMS. Lithography can be used to fabricate complex structure by multiple process, however, non-rectangular cross section can be implemented by introducing optical apparatus to lithography technic. X-ray lithography can be used even for sub-micron scale. Here in, we demonstrated lines with round shape cross section using the tilted gold absorber which was deposited on the oblique structure as the X-ray mask. This structure was used as a mold for PDMS. Molded PDMS was applied to the cell culture platform. Moreover, molded PDMS was bonded to flat PDMS to utilize to the sub-micro channel. This work has potential to the large area bio-MEMS.

Keywords

Acknowledgement

This work was supported by the National Research Foundation of Korea (NRF), a grant funded by the Korea government (MSIT) (No. NRF-2020R1A2C2007017), and the Nano·Material Technology Development Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science and ICT (NRF-2020M3H4A1A02084830).

References

  1. B. Ziaie, "Hard and soft micromachining for BioMEMS: review of techniques and examples of applications in micro-fluidics and drug delivery" Adv. Drug Del. Rev., Vol. 56, No. 2, pp. 145-172, 2004. https://doi.org/10.1016/j.addr.2003.09.001
  2. B. J. Kim and E. Meng, "Review of polymer MEMS micromachining" J. Micromech. Microeng., Vol. 26, No. 1, pp. 013001, 2016. https://doi.org/10.1088/0960-1317/26/1/013001
  3. T. Leichle, L. Nicu, and T. Alava, "MEMS Biosensors and COVID-19: Missed Opportunity" ACS Sens., Vol. 5, No. 11, pp. 3297-3305, 2020. https://doi.org/10.1021/acssensors.0c01463
  4. F. Marvi and K. Jafari, "A Measurement Platform for Label-Free Detection of Biomolecules Based on a Novel Optical BioMEMS Sensor" IEEE Trans. Instrum. Meas., Vol. 70, pp. 1-7, 2021.
  5. F. Gao, J. Luo, Y. Song, E. He, Y. Zhang, G. Xiao, and X. Cai, "Microelectrode arrays for monitoring neural activity in neural stem cells with modulation by glutamate in vitro" Nanotechnol. Precis. Eng., Vol. 3, No. 2, pp. 69-74, 2020. https://doi.org/10.1016/j.npe.2020.03.002
  6. H. Jeon, S. Kim, and G. Lim, "Electrical force-based continuous cell lysis and sample separation techniques for development of integrated microfluidic cell analysis system: A review" Microelectron. Eng., Vol. 198, pp. 55-72, 2018. https://doi.org/10.1016/j.mee.2018.06.010
  7. C. Didier, A. Kundu, and S. Rajaraman, "Capabilities and limitations of 3D printed microserpentines and integrated 3D electrodes for stretchable and conformable biosensor applications" Microsyst. Nanoeng., Vol. 6, No. 1, pp. 15, 2020. https://doi.org/10.1038/s41378-019-0129-3
  8. J. Kim, D. C. Joy, and S. Y. Lee, "Controlling resist thickness and etch depth for fabrication of 3D structures in electron-beam grayscale lithography", Microelectron. Eng.,Vol. 84, No. 12, pp. 2859, 2007. https://doi.org/10.1016/j.mee.2007.02.015
  9. J. H. Lee, W. S. Choi, K. H. Lee, and J.-B. Yoon, "A simple and effective fabrication method for various 3D micro-structures: backside 3D diffuser lithography" J. Micromech. Microeng., Vol. 18, No. 12, pp. 125015, 2008. https://doi.org/10.1088/0960-1317/18/12/125015
  10. M. Im, H. Im, J. H. Lee, J. B. Yoon, and Y. K. Choi, "A robust superhydrophobic and superoleophobic surface with inverse-trapezoidal microstructures on a large transparent flexible substrate" Soft Matter, Vol. 6, No. 7, pp. 1401, 2010 https://doi.org/10.1039/b925970h
  11. H. Mekaru, "Performance of SU-8 Membrane Suitable for Deep X-Ray Grayscale Lithography" Micromachines, Vol. 6, No. 2, pp. 252-265, 2015. https://doi.org/10.3390/mi6020252
  12. B. H. Jo, L. M. Van Lerberghe, K. M. Motsegood, and D. J. Beebe, "Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer" J. Microelectromech. Syst., Vol. 9, No. 1, pp. 76-81, 2000. https://doi.org/10.1109/84.825780