• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.2260-2262
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• 2000

In this paper, micromirror which can rotate 45 degree is designed, analyzed and fabricated. The micromirror is parallel to the substrate initially. When external magnetic field is applied, a micromirror can rotate to align its easy axis to the field. The size of micromirror array is $10{\times}10$. The mirror plate and spring is made of aluminium, and nickel is used as soft magnetic material. To obtain 45 degree angular deflection, dimension ratio between stopper length and thickness of sacrificial layer is properly selected. By using electrostatic force, individual actuation is possible.

• 한국전산유체공학회:학술대회논문집
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• 2008.03b
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• pp.666-669
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• 2008

Droplet in miniaturized microfluidic systems have received much focused attention recently. In this work, electrical charging phenomenon of a conducting water droplet on the electrode under the dc electric field is studied and using this phenomenon droplet actuation method for microreactor applications is experimentally demonstrated. To find effects of key factors, the effects of electric field, medium viscosity, and droplet size are investigated. A scaling law of charging for the conducting droplet is derived from the experimental results. Unlike the case of a perfect conductor, the estimated amount of electrical charge ($Q_{est}$) of a water droplet is proportional to the 1.59 power of the droplet radius (R) and the 1.33 power of the electric field strength (E). (For a spherical perfect conductor, Q is proportional to R2 and E.) It is thought that the differences are mainly due to incomplete charging of a water droplet resulted from the combined effect of electrochemical reaction at electrode and the relatively low conductivity of water. Using this phenomenon, we demonstrate the transport of the charged droplet and fusion of two oppositely-charged droplets. When electric field is subjected sequentially on the electrode, the charged droplet is transported on the electrode. For the visualization of fusion of charged droplets, the precipitation reaction is used. When subjected to a DC voltage, two droplets charged are moving and merging toward each other due to the Coulombic force and chemical reaction is simultaneously occurred by coalescence of droplets. It may be due to the interchange effect of charge. It is shown that the droplet can be used for microreactor where transporting, merging etc. of reagents constitute unit operation.

• Journal of Sensor Science and Technology
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• v.7 no.4
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• pp.271-278
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• 1998

A ISFET-based glucose sensor has inherent problems such as low sensitivity, drift effect and long response time. For that reason, a amperometric actuation technique was introduce to make a highly sensitivity of the ISFET glucose sensor with a Pt actuator, which electrolyzes $H_2O_2$, one of the by a by-products of the oxidation reaction of glucose. Moreover, a potential-step measurement method detecting response by only the electrolysis of $H_2O_2$ was developed for eliminating a drift problem. The operation characteristics of ISFET-based glucose sensor was improved by using the amperometric actuation and a measurement techniques. The fabricated ISFET glucose sensor is shown good operation such as characteristics(30mM PBS, about 26mV/decade) and linearity. A portable glucose meter with a highly resolution by using the fabricated ISFET-based glucose sensor with Pt actuation was developed and its characteristics investigated.

• Transactions on Electrical and Electronic Materials
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• v.17 no.4
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• pp.183-188
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• 2016

This paper presents the design and characterization of wide band ohmic microswitch with an actuation voltage as low as 20~25 V, and a restoring force of 14.1 μN. The design of the proposed switch is primarily composed of an electrostatic actuator, bridge membrane, cantilever (beam) and coplanar waveguide, suspended over the substrate. The analysis shows an insertion loss of −0.002 dB at 1GHz and remains as low as −0.35 dB, even at 100 GHz. The isolation loss of the switch is sustained at −21.09 dB at 100GHz, with a peak value of −99.58 dB at 1 GHz and up-state capacitance of 4 fF. To our knowledge, this is the first demonstration of a series contact switch, which works over a wide bandwidth (DC-100 GHz) and with such a high and sustained isolation, even at high frequencies and with an excellent figure of merit (f_c=1/2.pi.Ron.Cu= 39.7 THz).

• Transactions on Electrical and Electronic Materials
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• v.14 no.4
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• pp.172-176
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• 2013

Microelectromechanical system switches are becoming more and more popular in the electronics industry; there is a need for careful selection of the materials in the design and fabrication of switches for reliability and performance issues. The membrane used for actuation to change the state of an RF switch is made mostly using gold or aluminum. Various designs of membranes have been proposed. Due to the flexure-type structures, the design complexity increases, which makes stress analysis mandatory to validate the reliability and performance of a switch. In this paper, the effective stress and actuation voltage required for different types of fixed-fixed membranes is analyzed using finite element modeling. Effective measures are presented to reduce the stress and voltage.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.51 no.12
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• pp.601-607
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• 2002

IPMC(Ionic Polymer Metal Composite)actuators were optimized for producing improved forces by changing multiple parameters including repetition of number of plating, surface electroding and additive(PVP)-treatment on reduction. The platinum electrode is deposited on the surface of the material where platinum particle stay in a dense form that appears to introduce a significant level of surface electrode resistance. Actuation tests were performed for such IPMC actuators under a low voltage. The test results show that the lower surface-electrode resistance generates higher actuation capability in the IPMC actuators. In order to investigate relaxation behavior of bending and repeatability in dry condition, the IPMC was coated by$rubber(KRATON^{TM})$to minimize the effect of water evaporation from IPMC. This actuator can be used in air with surface coating to avoid membrane drying.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.6
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• pp.307-313
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• 2001

A micro syringe which can be attached to the end of a micro intravascular endoscope for drug injection is fabricated and its characteristic is tested. The syringe consists of a drug chamber and an actuator chamber which are separated by a silicone rubber membrane. The drug chamber is filled with liquid drug by the membrance actuation caused by the vaporization and condensation of the working liquid in the actuator chamber. The liquid drug is ejected by the electrolysis of the working liquid. The membrane deflection by each actuation method has been measured. The liquid ejection image has been captured during the electrolysis of the electrolyte. Also, the successful operation of the micro syringe under the normal blood pressure was verified.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.1
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• pp.55-59
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• 2003

With the progress of optical communication technology recently, the development of micro actuator using MEMS technology has been made for optical switching. The actuation types are various; electrostatic, electromagnetic, and electrostatic +electromagnetic etc. Among them, the electrostatic type is the most popular because of the relative ease of fabrication, integration and shielding as well as low power consumption. However, it needs a high voltage to generate a larger driving force. To overcome this problem, we proposed a new type of electrostatic actuator with an extra vertical electrode in addition to the horizontal one. The vertical electrode also lays a role of making the stable angular rotation as a stopper. From the theoretical analysis and experiment, we find the actuation voltage can be reduced up to 50 % of that of the conventional one.

• Journal of Sensor Science and Technology
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• v.20 no.1
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• pp.58-63
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• 2011

A low loss radio frequency(RF) micro electro mechanical systems(MEMS) switch driven by a low actuation voltage was designed for the development of a new RF MEMS switch. The RF MEMS switch should be encapsulated. The glass cap and fabricated RF MEMS switch were assembled by the Au/Sn eutectic bonding principle for wafer-level packaging. The through-vias on the glass substrate was made by the glass dry etching and Au electroplating process. The packaged RF MEMS switch had an actuation voltage of 12.5 V, an insertion loss below 0.25 dB, a return loss above 16.6 dB, and an isolation value above 41.4 dB at 6 GHz.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.6
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• pp.658-664
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• 2013

Bending actuators composed of cellulose with an electrically conducting polymer (CP) are fabricated and their performance is characterized in the air. Two different counter ions, perchlorate and tetrafluoroborate are used as dopant ions in the polyaniline CP processing. CP-cellulose-CP trilayer and CP-cellulose bilayer samples are fabricated with different dopant ions, and their actuation performance is evaluated in terms of tip displacement, blocked force and electrical power consumption along with the humidity level and actuation frequency. The trilayer samples substantially enhanced the tip displacement compared to the bilayer ones. The actuation performance of the trilayer actuator is three times better than that of original cellulose electro-active paper (EAPap) actuator. The displacement and blocked force of CP-EAPap actuators are dependent on the humidity and frequency.