45 degree Actuation Micromirror Array for Holographic Memory Application

홀로그램 메모리 응용을 위한 45도 구동 마이크로 미러 어레이

In this paper, micromirror which can rotate 45 degree is designed, analyzed and fabricated. The micromirror is parallel to the substrate initially. When external magnetic field is applied, a micromirror can rotate to align its easy axis to the field. The size of micromirror array is $10{\times}10$. The mirror plate and spring is made of aluminium, and nickel is used as soft magnetic material. To obtain 45 degree angular deflection, dimension ratio between stopper length and thickness of sacrificial layer is properly selected. By using electrostatic force, individual actuation is possible.