Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

Selective surface modification for biochip with micromirror array

마이크로미러를 사용한 바이오칩의 선택적 표면 개질을 위한 광변조 실험

  • Lee, Kook-Nyung (School of electrical & computer engineering, Seoul National University) ;
  • Sin, Dong-Sik (School of chemical engineering, Seoul National University) ;
  • Lee, Yoon-Sik (School of chemical engineering, Seoul National University) ;
  • Kim, Yong-Kweon (School of electrical & computer engineering, Seoul National University)
  • 이국녕 (서울대학교 전기 컴퓨터 공학부) ;
  • 신동식 (서울대학교 응용화학부) ;
  • 이윤식 (서울대학교 응용화학부) ;
  • 김용권 (서울대학교 전기 컴퓨터 공학부)
  • Published : 2000.07.17
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Abstract

This paper reports on the design, fabrication and driving experiment of micro mirror array(MMA) for lithography process to apply to biochip fabrication Photolithography technology is applied to activate specific area on the surface of modified glass surface, DNA monomers are bound on the activated area of the glass surface. After repeat of DNA monomer synthesizing process, DNA single strand probes could be solid-synthesized on the glass substrate. Without using photomask, photolithography process is tried using micro mirror array(MMA). Photomask or mask alignment is not required in maskless photolithography process using micro mirror array.

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