• Journal of Mechanical Science and Technology
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• v.20 no.3
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• pp.297-309
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• 2006

This paper deals with a novel structure for single-cell characterization which makes use of bimorph micro thermal actuators combined with electrical sensor device and integrated microfluidic channel. The goal for this device is to capture and characterize individual biocell. Quantitative and qualitative characteristics of bimorph thermal actuator were analyzed with finite element analysis methods. Furthermore, optimization for the dimension of cantilevers and integrated parallel probe systems with microfluidic channels is able to be realized through the virtual simulation for actuation and the practical fabrication of prototype of probes. The experimental value of probe deflection was in accordance with the simulated one.

• Proceedings of the KIEE Conference
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• 2002.07d
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• pp.2123-2125
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• 2002

This paper presents the use of piezoelectric ceramics for sensing and actuation purposes for vibration control. The PZT sensors and actuators are designed and fabricated. The transfer function of the beam is obtained via the Lagrangian method.

• Proceedings of the KIEE Conference
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• 2001.07a
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• pp.491-493
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• 2001

This paper describes the effect of lightning current on combination transmission line. In the paper, an lightning current which can generate 2/80[${\mu}s$]. 20[kA] - 40[kA] waveform is modeled in ATPDraw. The lightning current invaded to the overhead power transmission line propagates to the underground power cable. The simulation was performed to analyze the effect of arrester location and overvoltage occurred in power cable.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.8
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• pp.1261-1268
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• 2001

Effective material properties of active fiber composites with interdigitated electrodes are derived as a function of the fiber volume fraction. For the purpose of applying the rule of mixture, three unit cell models are introduced; each for the deformation and stress continuities in the out of plane and in-plane directions, and the continuity of the electrical displacement in the longitudinal direction. Derived effective material properties are compared with the results by the finite element method; good agreements are observed between them. As an application, the electromechanical behavior of the angle ply laminates with the active fiber layers bonded on the top and bottom surfaces are investigated; the angle of piezoelectric fiber to maximize the twisting curvature is obtained using the present model.

• Proceedings of the KIEE Conference
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• 2005.07c
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• pp.2395-2397
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• 2005

A low voltage operated piezoelectric RF MEMS in-line switch has been realized by using silicon bulk micromachining technologies for advanced mobile/wireless applications. The developed RF MEMS in-line switches were comprised of four piezoelectric cantilever actuators with an Au contact metal electrode and a suspended Au signal transmission line above the silicon substrate. The measured operation dc bias voltages were ranged from 2.5 to 4 volts by varying the thickness and the length of the piezoelectric cantilever actuators, which are well agreed with the simulation results. The measured isolation and insertion loss of the switch with series configuration were -43dB and -0.21dB (including parasitic effects of the silicon substrate) at a frequency of 2GHz and an actuation voltage of 3 volts.

• Proceedings of the KIEE Conference
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• 2003.07d
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• pp.2073-2075
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• 2003

This paper presents the active vibration control of flexible cantilever beam using piezoceramic actuators. The transfer function from the force input to the bending displacement was obtained via modal analysis results and piezoelectric constitutive equations. For the active vibration control piezoceramic actuators and sensors were used to construct a flexible smart cantilever beam. To further enhance the sensing and actuation properties of the piezoceramics, a typical interdigitated electrode pattern was fabricated. The PID controller was designed via various simulation and experiment trials. It was shown that the PID controller could suppress vibration of the beam effectively. Simulations and experiments verified good performances of the designed controller.

• Journal of Sensor Science and Technology
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• v.19 no.4
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• pp.320-327
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• 2010

In this paper, electrostatically actuated direct contact type RF MEMS switches have been designed and demonstrated. As driving structures of the switch, cantilever, bridge, and torsion spring beam structures are used and the actuation voltage characteristics of the switches have been compared and discussed. The designed RF switches are fabricated with the surface micromachining technology using the electroplated gold and nickel structures. The characteristics of the fabricated switches are measured and analyzed. The switch, which is fabricated using the 510 ${\mu}m$-length bridge structure with the thickness of 1.5 ${\mu}m$, is actuated with 15 V driving voltage. The insertion losses are less than 0.2 dB over the measured frequency ranges from 0 to 20 GHz and the isolations are more than 30 dB.

• Composites Research
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• v.24 no.6
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• pp.12-17
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• 2011

Interfacial durability and electrical properties of CNT or ITO coated PVDF nanocomposites were investigated for self-sensor and micro actuator applications. Electrical resistivity of nanocomposites for the durability on interfacial adhesion was measured using four points method via fatigue test under cyclic loading. CNT/PVDF nanocomposite exhibited lower electrical resistivity and good self-sensing performance due to inherent electrical property. Durability on the interfacial adhesion was good for both CNT and ITO/PVDF nanocomposites. With static contact angle measurement, surface energy, work of adhesion, and spreading coefficient between either CNT or ITO and PVDF were obtained to verify the correlation with interfacial adhesion durability. The optimum actuation performance of CNT or ITO coated PVDF specimen was measured by the displacement change using laser displacement sensor with changing frequency and voltage. The displacement of actuated nanocomposites decreased with increasing frequency, whereas the displacement increased with voltage increment. Due to nanostructure and inherent electrical properties, CNT/PVDF nanocomposite exhibited better performance as self-sensor and micro actuator than ITO/PVDF case.

• Transactions on Electrical and Electronic Materials
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• v.17 no.3
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• pp.129-133
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• 2016

Theoretical and graphical analysis of pull-in-voltage and figure of merit for a fixed-fixed capacitive Micro Electromechanical Systems (MEMS) switch is presented in this paper. MEMS switch consists of a thin electrode called bridge suspended over a central line and both ends of the bridge are fixed at the ground planes of a coplanar waveguide (CPW) structure. A thin layer of dielectric material is deposited between the bridge and centre conductor to avoid stiction and provide low impedance path between the electrodes. When an actuation voltage is applied between the electrodes, the metal bridge acquires pull in effect as it crosses one third of distance between them. In this study, we describe behavior of pull-in voltage and figure of merit (or capacitance ratio) of capacitive MEMS switch for five different dielectric materials. The effects of dielectric thicknesses are also considered to calculate the values of pull-in-voltage and capacitance ratio. This work shows that a reduced pull-in-voltage with increase in capacitance ratio can be achieved by using dielectric material of high dielectric constant above the central line of CPW.

• Transactions on Electrical and Electronic Materials
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• v.14 no.5
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• pp.225-230
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• 2013

This paper presents a novel shunt radio frequency microelectromechanical system switch on a quartz substrate with stiff ribs around the membrane. The buckling effects in the switch membrane and stiction problem are the primary concerns with RF MEMS switches. These effects can be reduced by the proposed design approach due to the stiffness of the ribs around the membrane. A lower mass of the beam and a reduction in the squeeze film damping is achieved due to the slots and holes in the membrane, which further aid in attaining high switching speeds. The proposed switch is optimized to operate in the k-band, which results in a high isolation of -40 dB and low insertion loss of -0.047 dB at 21 GHz, with a low actuation voltage of only 14.6 V needed for the operation the switch. The membrane does not bend with this membrane design approach. Finite element modeling is used to analyze the stress and pull-in voltage.