Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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A study on the design and fabrication of electrostatically actuatedRF MEMS switches

정전 구동형 RF MEMS 스위치의 설계 및 제작에 관한 연구

  • Park, Jae-Hyoung (Department of Electronics and Electrical Engineering, Dankook University)
  • 박재형 (단국대학교 전자전기공학부)
  • Received : 2010.06.01
  • Accepted : 2010.07.05
  • Published : 2010.07.31
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Abstract

In this paper, electrostatically actuated direct contact type RF MEMS switches have been designed and demonstrated. As driving structures of the switch, cantilever, bridge, and torsion spring beam structures are used and the actuation voltage characteristics of the switches have been compared and discussed. The designed RF switches are fabricated with the surface micromachining technology using the electroplated gold and nickel structures. The characteristics of the fabricated switches are measured and analyzed. The switch, which is fabricated using the 510 ${\mu}m$-length bridge structure with the thickness of 1.5 ${\mu}m$, is actuated with 15 V driving voltage. The insertion losses are less than 0.2 dB over the measured frequency ranges from 0 to 20 GHz and the isolations are more than 30 dB.

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References

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