• 제목/요약/키워드: edge contact

검색결과 283건 처리시간 0.025초

0.18${\mu}{\textrm}{m}$이하 metal layer 사진공정에서의 overlay 보정 (Overlay correction in sub-0.18${\mu}{\textrm}{m}$ metal layer photolithography process)

  • 이미영;이홍주
    • 한국산학기술학회:학술대회논문집
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    • 한국산학기술학회 2002년도 춘계학술발표논문집
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    • pp.106-108
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    • 2002
  • 반도체 physical layout design rule이 작아짐에 따라 Proximity effect와 overlay가 Pattern 구현에 크게 영향을 미치고 있다. Metal layer와 contact의 부족한 overlay margin으로 overlay 불량이 발생하고, 감소한 space margin으로 인해 bridge와 같은 문제가 나타난다. 따라서, resolution을 향상시키고, 최소한의 overlay margin을 확보함으로써 미세 pattern의 구현을 가능하게 한다. 이를 위해 OPC와 attPSM 같은 분해능향상기술이 사용된다. 그러나 attPSM의 사용은 원하지 않는 pattern이 생성되는 sidelobe와 같은 문제가 발생한다. 따라서 serial image simulation올 통해 추출한 rule을 rule-based correction에 적용하여 sidelobe현상을 방지한다. 그리고 overlay margin 부족으로 나타나는 문제는 metal layer와 contact overlap되는 영역의 line edge를 확장하고, rule checking을 통해 최소한의 space margin을 확보하여 해결한다 따라서 overlay error를 rule-based correction을 사용하여 효과적으로 방지한다.

Bolt 연결 구조물의 구멍주위 균열의 응력확대계수 계산 (SIF of cracks of the holes in the Bolt-joint structure)

  • 심동철;이기수
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2001년도 춘계학술대회 논문집
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    • pp.727-730
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    • 2001
  • In many structures a common method of construction is to make use of bolted or riveted joints. With this type of joint the load is transmitted through a pin from one section of the structure to another. Fatigue cracks often start from the edges of holes, due to local stress concentration. In order to predict the fatigue crack growth, the stress intensity factor K for hole-edge cracks should be available. In this paper the stress intensity factors are computed for cracks in bolt-joint region considering the contact condition.

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Non Uniform B-spline(NUB) 곡면에 의한 블랜드 곡면의 모델링 (Modeling of blend surfaces by Non Uniform B-spline surface patches)

  • 유우식;정회민
    • 대한산업공학회지
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    • 제26권2호
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    • pp.95-100
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    • 2000
  • Presented in this paper is a scheme for constructing ball rolling blends of a non-uniform B-spline surface(NUBS) patches. Ball rolling blending is a popular technique for blending between parametric surfaces. Along the "common edge" of a pair of "base surfaces" to be blended, a sequence of "ball positions" is sampled. The radius of the ball may vary along the line. At each sampling point, a ball center point and a pair of ball contact points are computed by applying a Jacobian inversion method. Using ball contact points, the constructing scheme of blend NUBS patches consists three steps; 1) determination of intermediate control vertices; 2) determination of boundary vectors; 3) determination of B-spline control vertices. The proposed blending scheme has been tested in a Omega CAM system and found to be working satisfactorily.

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LVDT 센서를 이용한 외경 측정 방안에 대한 연구 (A Study on the out-diameter measuring machine by the LVDT sensors)

  • 황정호;노지훈;박기홍
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2006년도 춘계학술대회 논문집
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    • pp.291-292
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    • 2006
  • Currently A demand of high precision workpiece is increasing in industry. At present, roundness measuring machine using Air bearing, coordinate measuring machine that are used from measurement station. but these machines will not be able to apply to In-line process. because of like these machine's price are very expensive and measurement time is long. also, the complexity of conventional roundness measurement method based on fourier transform, it makes difficult to development analysis program. This work present new architecture of a Out-diameter measuring system fur analysis of roundness of product. In this system, the influence of table motion errors is minimize by using two LVDT sensor and knife edge contact tip. We are produce a test machine and make an experimenter on Out-diameter of test bearing. The measurement result compared with roundness measuring machine.

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자동차 엔진에서 O-링의 압출거동에 관한 수치적 연구 (Numerical Simulations on the O-ring Extrusion in Automotive Engines)

  • 이일권;김청균
    • Tribology and Lubricants
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    • 제15권4호
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    • pp.297-303
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    • 1999
  • O-rings in automotive engines are important components such as a coolant pipe, engine oil circulating lines and fuel injector for sealing that makes efficient performance of the engine. Life cycle of O-rings is effected in environments of the O-ring seal, like that applied pressure, working temperature, precompressed ratio and materials. It is related in extrusion, expansion and fatigue failure of O-rings. In this paper, an pressurized, compressed elastomeric O-ring inserted into a rectangular groove is analysed numerically using the nonlinear finite element method. The calculated FEM results showed that extrusion ratio and contact stress are strongly related to the gap clearance and edge radius of the groove.

판재 스크래치 저감을 위한 제관 라인 이송 핑거 접촉부의 설계 개선 (Design Improvement of Carrier Finger on Sheet Metal Forming Line for the Prevention of Scratch)

  • 이민;김태완
    • Tribology and Lubricants
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    • 제28권5호
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    • pp.240-245
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    • 2012
  • In this study, we developed a new carrier finger to prevent scratches in a sheet metal forming line. The developed carrier finger was designed to have a streamlined shape with a larger radius of curvature at the edges, as well as a smaller contact area. To evaluate the scratch alleviation effect, a sliding contact analysis and scratch test using the pin on a plate wear tester were conducted for both the old and new carrier fingers. The results show that, for both transverse and longitudinal movements of the strip, the newly designed carrier finger reduces both the friction and scratch depth by its streamlined shape, which decreases the pressure spike at the edge.

슬래브 두께에 따른 표준실험동의 중량충격음 특성 (Heavy-weight Floor Impact Sound Characteristics of Standard Laboratory by Slab Thickness)

  • 정영;송희수;전진용;김진수
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2004년도 추계학술대회논문집
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    • pp.103-108
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    • 2004
  • In this study, examined heavy-weight floor impact sound to structure that have slab thickness of 4 form at a standard laboratory through noise and vibration measured. The results show that the nature Natural frequency increased according to change of thickness of each slab by finite element analysis, and acceleration value decreased. Results of measurements of noise and vibration at a standard laboratory, the slab 210, 240mm structures was construed result such as finite element analysis but the slab 150, 180mm structures is construed that influence in vibration acceleration level because edge condition has condition that contact to ground. Therefore, in modelling process for analysis, is thought that need that condition analyzes examining element influencing about structure that contact to ground.

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윤곽밀링시 공구변형에 의한 절삭표면 형상의 예측 (Prediction of the Milled Surface Shapes Considering Tool Deflection Effects in Profile Milling Process)

  • 서태일;조명우
    • 한국정밀공학회지
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    • 제16권7호
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    • pp.203-209
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    • 1999
  • In this paper, we present the methods to predict the milled surface shapes in profile milling process. In the cutting process, tools are deflected due to the cutting forces varying with the imposed depth of cut and feedrate. Thus, the final shapes of the milled surface, generated by the nominal tool trajectory, are different from the required profile. In order to predict the milled surface shapes, we present two methods based on: (1) the deflected tool profile and (2) the trace of contact point between the tool and the workpiece. In the first method, we make an assumption that the milled surface corresponds to the deflected tool profile. In another method, we make we make an assumption that the milled surface is generated by the trace of the contact point between the cutting edge of the tool and workpiece. We present the surface generation process by calculating the trajectory of the contact points on the workpiece. Several simulations and experiments are performed to verify the proposed milled surface prediction methods.

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HDD 의 언로딩 성능 개선을 위한 디스크 범프의 설계 및 해석 (Design and Analysis of Disk Bump to Improve the Unloading Performance in HDD)

  • 이용은;이용현;이형준;박노철;박경수;박영필
    • 정보저장시스템학회논문집
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    • 제3권4호
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    • pp.183-190
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    • 2007
  • In most hard disk drives that apply the ramp load/unload technology, the head is unloaded at the outer edge of the disk while the disk is rotating. During the unloading process, slider-disk contacts may occur by lift-off force and rebound of the slider. The main issue of this paper is to prevent the slider-disk contact by rebound, and we apply a disk bump to the unloading process. To do so, first, the ranges of bump dimension are determined. Second, the stability of each bump is checked by dynamic simulation. Finally, unload simulations are performed for stable bump designs. As a result of these steps, the effect of the bump design and the position for the unloading performance were investigated. As a consequence, we propose the optimal bump design to improve the unloading performance. Furthermore, we can identify to remove rebound contact by applying a bump on disk during the unloading process.

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유리섬유 강화 플라스틱 절삭에서의 공구마멸특성 (Characteristics of tool wear in cutting of glass fiber reinforced platics (GFRP))

  • 이원평
    • 오토저널
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    • 제9권5호
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    • pp.49-56
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    • 1987
  • This paper is a study on the effect of the cutting speed on the tool wear in turning of the glass fiber reinforced plastics. The wear behavior of cutting tool is studied by means of turning, changing the cutting speed and feed in the wide range. Moreover, the theoretical model applicable to the cutting speed of wide range is analysed. The main results obtained are as follows: The relation between the tool wear and the cutting speed is divided into three range in case of the constant cutting distance. 1) At the low cutting speed, the tool wear is independent of the cutting speed, but dependent mainly on the contact length between tool and glass fiber(lst range). 2) At the high cutting speed, the tool wear is independent of the contact length, and dependent on the cutting speed only(2nd range). The tool wear increases in proportion to the cutting speed. 3) At the higher cutting speed than the speed in the 2nd range, the tool wear is independent both of the cutting speed and the contact length(3rd range). 4) In the 3rd range, tool flank wear is constant and is observed that only the wear of cutting edge increases.

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