Characterization Method for Testing Circuit Patterns on MCM/PCB Modules with Electron Beams of a Scanning Electron Microscope (MCM/PCB 회로패턴 검사에서 SEM의 전자빔을 이용한 측정방법)
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- Journal of the Korean Institute of Telematics and Electronics D
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- v.35D no.9
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- pp.26-34
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- 1998