• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.55-56
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• 2006

This research was carried out to observe the structure and characteristics of SUBA pad for silicon wafer polishing. As the diamond size is smaller and shape is rounder, the pad cut rate becomes smaller. From the experimental results, we suggests that the diamond grade should be over 680 when the diamond mesh is between #100 and #170 for SUBA pad.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
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• pp.786-788
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• 1998

Synthetic diamond films were deposited on pretreated silicon substrate in activated gas phase using RF plasma-assisted CVD. We investigated the influence of $O_2$ gas on facets of diamond crystal. In $H_2-CH_4-O_2$ gas mixture, the increase of oxygen concentration lead to well-faceted diamond particles and increasing crystallinity of diamond films. The deposited diamond films were analyzed by SEM, XRD, Raman spectroscopy.

• 한국세라믹학회지
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• 제32권6호
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• pp.697-702
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• 1995

The rough growth surfaces of diamond films fabricated by the hot filament CVD were polished using thermomechanical polishing method. And then, its application to the optical windows was discussed through the measurement of transmittance in the range of infrared radiation and analysis of surfaces structure. The results were compaerd with those of the films polished with conventional mechanicla polishing. The transmittance of the mechanically polished film reached 57~66% over the whole range from 500 to 4000 cm-1. But the transmittance of the film polished with thermomechanical polishing method was reduced below 35%. This decrease in transmittance was due to both the graphitization of diamond on the polished surface and the growth of $\beta$-SiC at diamond/Si interface during polishing. The residual Fe in hte thermomechanically polished surface was confirmed by SIMS analysis. This Fe played the role of the graphitization of near surface region of the diamond film.

• 대한치과보철학회지
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• 제37권5호
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• pp.651-657
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• 1999

This study was performed to investigate the retrievability of the cementation type implant abutments. The cements used in this study were Cavitec, Tembond and Zinc Phosphate Cement. The types of surface conditioning were no treatment, 50 microne sandblasting, 250 microne sandblasting, fine diamond finishing point and coarse diamond point. The retention of cast crown was measured with Instron Universal Testing Machine(Instron Engineering Co., U.S.A.). The results were as fellows: 1. The Maximium retention was obtained by the group of Z.P.C. cementation and Coarse diamond point surface conditioning. 2. Z.P.C. shows maximum retention, and reduced in orders Tembond, Cavitec, No cement. 3. The value of retention of surface condition was highest in coarse diamond point, lowest in no tretment. 4. The similar results were obtained between fine diamond point and 50 microne sandblasting, coarse diamond point and 250 microne sandblasting. 5. The were no direct corelation between mechanical retention and cementation retention.

• 한국기계가공학회지
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• 제19권4호
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• pp.9-15
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• 2020

Carbon fiber reinforced plastic (CFRP) is a composite material useful in the aerospace and automotive industries because of its light weight and high strength. In this study, side milling tests were carried out using AlCrN, diamond-like carbon (DLC), and diamond-coated end mills. Additionally, a comparison study according to the cobalt content was conducted. Thus, tool wear and surface quality were examined and the influences of using coating and a certain material type were analyzed. The surface roughness of the machined surface was measured. Microscope observations revealed that the CFRP fiber at the machined surface was not damaged even at a cutting distance of 3,000 mm. Therefore, this study showed that the diamond-coated end mill containing 6% cobalt is appropriate for milling CFRP.

• 한국생산제조학회지
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• 제7권2호
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• pp.100-107
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• 1998

Diamond wheels with fine grains and multi-porous structures are newely trial developed for smoothing and mirror finishing materials. Grinding wheel must have performed both to remove tool marks efficienitly and to contact elastically with curved surfaces, that are employed for ultra precision and high performance grinding of difficult-to materials such as tungsten carbide alloy using tool and die materials, Diamond grains are bonded by a melamine resin to prevent the decrease of machining efficiency due to grain sinking within the bond materials. Also, highly foamed structures are developed to increase the flexibility of the grinding wheel, and to induce self-sharpening by increasing contact pressure between the grinding wheel and workpiece surfaces. In this paper, melamine-bonded diamond wheels try to manufacture, then the forming method of grinding wheel are suggested, and the grinding characteristics of melamine-bonded diamond grinding wheel are also illustrated.

• 한국표면공학회지
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• 제28권4호
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• pp.225-235
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• 1995

To investigate the effects of pretreatment and substrate bias on the characteristics of the diamond thin films, the thin films were deposited on the p-type Si(100) wafer by MPECVD using mixtures of $H_2$, $CH_4$, and $O_2$ gases. Deposition was carried out at the substrate temperature of $900^{\circ}C$ and at the pressure of 40torr. The effect of the pretreatment on the film formation was the examined by using SiC and diamond powders as abrasive powders. Furthermore, the substrate bias effect on the formation of the diamond film was also examined. The highest nucleation density was observed for the pretreatment with 40~60$\mu\textrm{m}$ size of diamond powders and a negative bias potential(-50V). Many defects and(111) twins in the diamond films were observed.

• Tribology and Lubricants
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• 제11권5호
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• pp.20-25
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• 1995

Diamond films were prepared by a hot filament vapor deposition onto polycrystal silicon nitride substrates. Different kinds of silicon nitride containing CaO and $Fe_{2}O_{3}$ were manufactured to investigate the impurity effect of substrate on the morphology of diamond films and their wear behaviors. Nucleation rates and morphologies of diamond films deposited on various kinds of silicon nitride were compared. The highest nucleation rate was observed in a substrate containing 1% of CaO. Wear tests were performed with a silicon nitride ball on the disk geometry to investigate the tribological behavior of diamond film against silicon nitride. This study demonstrated that different morphologies of diamond film due to substrate impurities produced different wear behavior against silicon nitride.

• The Korean Journal of Ceramics
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• 제3권3호
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• pp.155-158
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• 1997

Highly oriented diamond films were deposited on a (100) silicon substrate by bias enhanced nucleation technique. Both plan-view and cross-section TEM were applied to study the nucleation and growth mechanism of diamond grains. Randomly oriented polycrystalline diamond grains with internal microtwins were observed at the nucleation stage while defect free regions were retained at the growth stage and were apparently related with the epitaxy of diamond films. From our experimental results, the nucleation and texture formation mechanism of diamond films is discussed.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part2
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• pp.1132-1133
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• 2006

Metal-bonded diamond impregnated tools are being increasingly used in the processing of stone and ceramics, road repair, petroleum exploration, etc. Although the main tool wear mechanisms have been identified, the scientific background is inadequate and fundamental research has to be carried out to better understand the tool field behaviour. This work addresses the complex issues of modelling abrasive wear of the metallic matrix under laboratory conditions. The generated data indicates that the matrix wear resistance can be assessed in a simple manner; whereas tests carried out on diamond impregnated specimens may aid prediction of the tool life in abrasive applications.