• Journal of Institute of Control, Robotics and Systems
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• v.4 no.2
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• pp.246-255
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• 1998

This paper presents a novel method for real-time malfunction detection of plasma etching process using EPD signal traces. First, many reference EPD signal traces are collected using monochromator and data acquisition system in normal etching processes. Critical points are defined by applying differentiation and zero-crossing method to the collected reference signal traces. Critical parameters such as intensity, slope, time, peak, overshoot, etc., determined by critical points, and frame attributes transformed signal-to symbol of reference signal traces are saved. Also, UCL(Upper Control Limit) and LCL(Lower Control Limit) are obtained by mean and standard deviation of critical parameters. Then, test EPD signal traces are collected in the actual processes, and frame attributes and critical parameters are obtained using the above mentioned method. Process malfunctions are detected in real-time by applying SPC(Statistical Process Control) method to critical parameters. the Real-time malfunction detection method presented in this paper was applied to actual processes and the results indicated that it was proved to be able to supplement disadvantages of existing quality control check inspecting or testing random-selected devices and detect process malfunctions correctly in real-time.

• Journal of the Semiconductor & Display Technology
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• v.16 no.3
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• pp.53-58
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• 2017

Recently, advance in technology have increased the importance of visual inspection in semiconductor inspection areas. In PCB visual inspection, accurate line estimation is critical to the accuracy of the entire process, since it is utilized in preprocessing steps such as calibration and alignment. We propose a line estimation method that is differently weighted for the line candidates using a histogram of gradient information, when the position of the initial approximate corner points is known. Using the obtained line equation of the outline, corner points can be calculated accurately. The proposed method is compared with the existing method in terms of the accuracy of the detected corner points. The proposed method accurately detects corner points even when the existing method fails. For high-resolution frames of 3.5mega-pixels, the proposed method is performed in 89.01ms.

• 제어로봇시스템학회:학술대회논문집
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• 1996.10b
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• pp.1360-1363
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• 1996

EPD(End Point Detection) is used to decide etching degree of layer which must be removed at wafer etching process in plasma etching process which is one of the most important process in semiconductor manufacturing. In this thesis, the method which detects malfunction of etching process in real-time will be discussed. Several EPD signal traces are collected in normal plasma etching condition and used as reference EPD signal traces. Critical points can be detected by applying differentiation and zero-crossing techniques to reference EPD signal. Mean and standard deviation of critical parameters which is memorized from reference EPD signal are calculated and these determine the lower and higher limit of control chart. And by applying statical control chart to EPD signals which are collected in real etching process malfunctions of process are detected in real-time. By means of applying this method to the real etching process we prove our method can accurately detect the malfunction of etching process and can compensate disadvantage of current industrial method.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.14 no.4
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• pp.1562-1578
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• 2020

Vector data compression algorithm can meet requirements of different levels and scales by reducing the data amount of vector graphics, so as to reduce the transmission, processing time and storage overhead of data. In view of the fact that large threshold leading to comparatively large error in Douglas-Peucker vector data compression algorithm, which has difficulty in maintaining the uncertainty of shape features and threshold selection, a segmented Douglas-Peucker algorithm based on node importance is proposed. Firstly, the algorithm uses the vertical chord ratio as the main feature to detect and extract the critical points with large contribution to the shape of the curve, so as to ensure its basic shape. Then, combined with the radial distance constraint, it selects the maximum point as the critical point, and introduces the threshold related to the scale to merge and adjust the critical points, so as to realize local feature extraction between two critical points to meet the requirements in accuracy. Finally, through a large number of different vector data sets, the improved algorithm is analyzed and evaluated from qualitative and quantitative aspects. Experimental results indicate that the improved vector data compression algorithm is better than Douglas-Peucker algorithm in shape retention, compression error, results simplification and time efficiency.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.10 no.3
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• pp.123-129
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• 1985

This paper describes the determination of threshold value in order to determine the presence of absence of weak signal with SNR of 0 dB in 100kHz bandwidth. As a detection method, it has been used a recent LOC structure fitting for detecting weak signal in stead of a conventional method like Neyman-Peason crtical criterion. The signal for detection is the OOK modulation signal used in data and morse code transmission. The non-Gaussian noise similar to Laplacian type has been chosen in transmission path. As a result of experiment, comparing probability of detection by one critical point with that by two critical points with fixing as arbitrary false alarm probability, we have found that method has been shown to be better than the conventional method.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.8 no.9
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• pp.3177-3195
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• 2014

In many moving object detection problems of an aerial video, accurate and robust stabilization is of critical importance. In this paper, a novel accurate image alignment algorithm for aerial electronic image stabilization (EIS) is described. The feature points are first selected using optimal derivative filters based Harris detector, which can improve differentiation accuracy and obtain the precise coordinates of feature points. Then we choose the Delaunay Triangulation edges to find the matching pairs between feature points in overlapping images. The most "useful" matching points that belong to the background are used to find the global transformation parameters using the projective invariant. Finally, intentional motion of the camera is accumulated for correction by Sage-Husa adaptive filtering. Experiment results illustrate that the proposed algorithm is applied to the aerial captured video sequences with various dynamic scenes for performance demonstrations.

• The Journal of Korea Robotics Society
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• v.5 no.2
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• pp.85-92
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• 2010

In this paper, we propose a digital image stabilization technique using edge detection and Lucas-Kanade optical flow in order to minimize the motion of the shaken image. The accuracy of motion estimation based on block matching technique depends on the size of search window, which results in long calculation time. Therefore it is not applicable to real-time system. In addition, since the size of vector depends on that of block, it is difficult to estimate the motion which is bigger than the block size. The proposed method extracts the trust region using edge detection, to estimate the motion of some critical points in trust region based on Lucas-Kanade optical flow algorithm. The experimental results show that the proposed method stabilizes the shaking of motion image effectively in real time.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.2335-2339
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• 2003

To prevent the critical situation due to the fault in the aircraft sensor system, the fault tolerant system with triple or quadruple redundancy can be made. However, if the faults are occurred in two or more than sensors simultaneously, the conventional fault detection process, such as cross-channel monitoring, may give the wrong fault alarm. For this case, we can detect the fault by estimating the state vector based on the system dynamics model, which is nonlinear for aircraft. In this paper, we propose the unscented Kalman filter to estimate the nonlinear state vector. This filter utilizes the so-called unscented transformation of sigma points featured the statistical characteristics of the random variable. For verification, we perform the simulations for F-16 aircraft with accelerometers, gyros, GPS and air data system.

• 한국HCI학회:학술대회논문집
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• 2009.02a
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• pp.178-185
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• 2009

A signal processing algorithm is proposed for end point detection which is used commonly in accelerometers-based pattern recognition problem. In the conventional method, end points are detected by manual manipulation with an additive button or algorithm based on statistical computation and highpass filtering to cause critical time delay and difficulty for parameters optimization. As an solution, we propose a focused Time Lagged Feedforward Network(TLFN) with respect to a differential signal of acceleration, which is widely applied for time series forecasting. The simple experiment is conducted with handwriting and the detection performance and response characteristic of the proposed algorithm is tested and analyzed.

• Korean Journal of Fisheries and Aquatic Sciences
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• v.51 no.5
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• pp.524-534
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• 2018

This study assessed the biological and physicochemical hazards involved in establishing a hazard analysis critical control point (HACCP) for canned seasoned Broughton's ribbed ark Scapharca broughtonii and examined the critical control points (CCPs) in the field. Following the basic principles of the HACCP system, the hazard-evaluation procedures were enacted during the production of canned seasoned Broughton's ribbed ark after field investigation of a seafood product company in Korea. CCPs were determined using canned seasoned Broughton's ribbed ark with the corresponding control measures. The HACCP system was applied to each step in processing the product. The results indicated that inspection of raw materials, filling, sterilization, and alien substance detection were the most important CCPs. These results can be used to prevent and control food safety problems in the production of canned seasoned Broughton's ribbed ark.