• Proceedings of the KIEE Conference
• /
• 1994.07b
• /
• pp.1243-1245
• /
• 1994

SiN films were deposited in $Si_2H_6$(99.9%), $NH_3$(99.99%) gas mixture with carrier gas $N_2$ on Si substrate by ArF Excimer Laser CVD. SiN film deposition conditions that are substrate temperature and Laser average power were varied in order to investigate the dependence of SiN film on the condition. A post-deposition anneal was performed to examine variation of fixed charge density in the films. The deposition rate was increased as the substrate temperature and Laser power were increased during film deposition. The refractive index was increased with increasing substrate temperature, but it didn't have the dependence on Laser power. The fixed charge density was decreased when a post-deposition anneal was performed.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2003.05a
• /
• pp.30-33
• /
• 2003

YBCO coated conductor, also called the 2nd generation high temperature superconducting wire, consists of oxide multi-layer hetero-epitaxial thin films. Pulsed laser deposition (PLD) is one of many film deposition methods used to make coated conductor, and is the one known to be the best to make superconducting layer so far. As a part of the effort to make long length coated conductor, the optimum deposition condition of YBCO film on single crystal substrate (SrTiO3) was investigated using PLD. Substrate temperature, oxygen partial pressure, and laser fluence were varied to find the best combination to grow high quality YBCO film.

• Journal of the Korean Society of Clothing and Textiles
• /
• v.23 no.7
• /
• pp.1030-1039
• /
• 1999

The effect of surfactant mixture 9on detergency and soil redeposition in a dry-cleaning system was investigated employing Aerosol OT as an anionic surfactant and Span 80 as a nonionic surfactant. The effect of charge system on soil deposition was also investigated in order to determine the optimum condition at which soil redeposition is minimum,. Soil deposition instead of soil redeposition on cotton, polyester and wool fabrics was measured employing petroleum solvent and perchloroethylene as organic solvents. The results were as follows. 1. Surface tension or interfacial tension was not changed by the addition of any surfactant or surfactant mixtures. In petroleum solvent however interfacial tension between solrent and water decreased when surfactants were added and increased when surfactants were mixed,. 2. The maximum amount of water solubilization increased as the mole fraction of Aerosol OT increased and more water was solubilized in petroleum solvent than in perchloroethylene. 3. The detergency of cotton was greater and the soil deposition rate was lower in Span 80 solution than in Aerosol OT solution. The soil deposition on cotton fabric decreased when water was solubilized in Aersol OT solution 4. The detergency and soil deposition rate of polyester fabric did not change by the surfactant type of the addition of surfactant mixture and soil deposition rate increased bywater solubilization. 5. Soil deposition on wool fabric was very high when Arosol OT was employed in perchloroethylene and the soil deposition did not change greatly by water solubilization.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.14 no.3
• /
• pp.50-56
• /
• 2015

In this study, AISI M2 powder was selected primarily through various pieces of literature in order to improve the hardness and wear resistance. Among the laser metal deposition parameters, laser power was studied to improve the deposition efficiency in the laser metal deposition using a diode-pumped disk laser. An SKD61 hot work steel plate and AISI M2 powder were used as a substrate and powder for laser metal deposition, respectively. Experiments for the laser metal deposition were carried out by changing the laser power and track layer. The quality of the track surface and cross-section after applying the single-layer method was better than that obtained from applying the multi-layer method. As the laser power increased, the track thickness was increased, and the surface roughness deviation was decreased. In laser power condition of 1.6kW, the maximum hardness of the deposition track was 790Hv. This value was 40% better than the hardness of the SKD61 after heat treatment.

• Journal of the Korean institute of surface engineering
• /
• v.45 no.3
• /
• pp.106-110
• /
• 2012

Oblique angle deposition (OAD) is a physical vapor deposition where incident vapor flux arrives at non-normal angles. It has been known that tilting the substrate changes the properties of the film, which is thought to be a result of morphological change of the film. In this study, OAD has been applied to prepare single and multilayer TiN films by cathodic arc deposition. TiN films have been deposited on cold-rolled steel sheets and stainless steel sheet. The deposition angle as well as substrate temperature and substrate bias was changed to investigate their effects on the properties of TiN films. TiN films were analyzed by color difference meter, scanning electron microscopy, nanoindenter and x-ray diffraction. The color of TiN films was not much changed according to the deposition conditions. The slanted and zigzag structures were observed from the single and multilayer films. The relation between substrate tilting angle (${\alpha}$) and the growth column angle (${\beta}$) followed the equation of $tan{\alpha}=2tan{\beta}$. The indentation hardness of TiN films deposited by OAD was low compared with the ones prepared at normal angle. However, it has been found that $H^3/E^2$ ratio of 3-layer TiN films prepared at OAD condition was a little higher than the ones prepared at normal angle, which can confirm the robustness of prepared films.

• Proceedings of the Korean Magnestics Society Conference
• /
• 1998.05a
• /
• pp.40-41
• /
• 1998

• Proceedings of the Materials Research Society of Korea Conference
• /
• 1999.11a
• /
• pp.191-191
• /
• 1999

• 한국초전도학회:학술대회논문집
• /
• v.14
• /
• pp.79-79
• /
• 2004

• Proceedings of the Korean Magnestics Society Conference
• /
• 1991.11a
• /
• pp.86-87
• /
• 1991

• Proceedings of the Materials Research Society of Korea Conference
• /
• 1999.05a
• /
• pp.148-148
• /
• 1999