• Journal of the Institute of Electronics Engineers of Korea SD
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• v.39 no.4
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• pp.26-34
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• 2002

A dynamically-allocated topographical model, so-called cell advancing model, has been developed modifying the cell model. Memory requirements are reduced by dynamically allocating completed topography and material information only at surface cells, and setting other cells as a material index. In this paper, this model is presented and verified with applications to etching process by using the analytic model and Monte Carlo model for the incident ion flux, deposition process, and process integration. In case of DRAM cell fabrication process with 5,440,500(130$\times$155$\times$270) cells takes about 22MB memory to represent the topography.

• Proceedings of the KIEE Conference
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• 1993.11a
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• pp.258-260
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• 1993

Aluminum thin films were deposited on glass substrate using DC Magnetron Sputtering. Deposition rate, specular reflectance, and resistivity were investigated as a function of the input power, pressure, substrate temperature, and deposition time. Reflectance was reduced with increasing power, also with prolonging deposition time. Topography of the surface, which influences the properties such as electromigration, was observed from scanning electron microscope (SEM) and there was a close relation between the topography and measured reflectance.

• Journal of the Korean institute of surface engineering
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• v.29 no.5
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• pp.301-313
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• 1996

The texture of vapor deposits(PVD and CVD) changes from the orientation that places the lowest energy lattice plane parallel to the substrate under the condition of low atom or ion concentration adjacent to the deposit, to the orientation that places the higher energy crystal planes parallel to the substrate as the atom or ion concentration adjacent to the deposit increases. However, in the early stage of deposition, the deposit-substrate interface energy and the surface energy constitute the most important energies of the system. Therefore, if the lattice match is established between the substrate and the deposit without generating much strain energy, the epitaxial growth takes place to reduce the interfacial energy. When the epitaxial growth does not take place, the surface energy is dominant in the early stage of deposition and the lowest energy crystal plane tends to be placed parallel to the substrate up to a critial thickness. The thickness depends on the deposition condition. If the deposition condition does not favor placing the lowest energy crystal plane parallel to the substrate, the initial texture will change to that compatible with the deposition condition as the film thickness increases, and the texture turnover thickness will be short. The microstructure and surface topography of deposits are related to their texture.

• Korean Journal of Remote Sensing
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• v.29 no.1
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• pp.57-68
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• 2013

Large-scale coastal construction projects, such as land reclamation and dykes, were constructed from the late twentieth century in Yoobu-Do region. Land reclamation combined with the dynamics of tidal currents may have accelerated local sedimentation and erosion resulting in rapid reformation of coastal topography. This study presents the results of the topography changes around Yoobu-Do by large-scale coastal constructions using time-series waterline extraction technique of Landsat TM/ETM+ data acquired from 1998 to 2012. Furthermore, the Freeman-Durden decomposition was applied to fully polarimetric RADARSAT-2 SAR data in order to analyze the scattering mechanisms of the deposited surface. According to the case study, the deposition areas were over 4.5 $km^2$ and distributed in the east, northeast, and west of Yoobu-Do. In the eastern deposition area, it was found that the scattering mechanism was difference from other deposition areas possibly indicating that different types of soil were deposited.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.32 no.3
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• pp.192-195
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• 2019

Single-crystal diamond obtained by chemical vapor deposition (CVD) exhibits great potential for use in next-generation power devices. Low defect density is required for the use of such power devices in high-power operations; however, plastic deformation and lattice strain increase the dislocation density during diamond growth by CVD. Therefore, characterization of the dislocations in CVD diamond is essential to ensure the growth of high-quality diamond. In this work, we analyze the characteristics of the dislocations in CVD diamond through synchrotron white beam X-ray topography. In estimate, many threading edge dislocations and five mixed dislocations were identified over the whole surface.

• Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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• 2001.05a
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• pp.154-159
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• 2001

Nakdong estuary is located at south-eastern coast of the Korea. A lot of sediment from upper river was deposited at this area. It has caused many problems such as changes in topography and tidal current. In this paper, field observation data on tidal currents and sediments were investigated as well as historical topographic changes by dredging and reclamation of the foreshore. Then, the numerical model considered the settling velocity of the suspended solids according to the particle size was applied to examine the characteristic of deposition. The results are as follows : 1. Changes of characteristics of deposition were caused by topographic changes of Nakdong estuary 2. Characteristics of deposition were influenced by river plume and tidal currents. 3. Numerical model which considers settling velocity reappeared distribution of deposition by particle-size. 4. Used model is only resonable for discussion in the quality, so, it is strongly suggested that the new model development is needed including the quatitative deposition processes.

• Proceedings of the Korea Association of Crystal Growth Conference
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• 2000.06a
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• pp.127-142
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• 2000

The charged cluster model states that chemical vapor deposition (CVD) begins with gas phase nucleation of charged clusters followed by cluster deposition on a substrate surface to form a thin film. A two-chambered CVD system, separated by a 1-mm orifice, was used to study gold deposition by thermal evaporation in order to determine if the CCM applies in this case. At a filament temperature of 1523 and 1773 K, the presence of nano-meter sized gold clusters was found to be positive and the cluster size and size distribution increased with increasing temperature. Small clusters were found to be amorphous and they combined with clusters already deposited on a substrate surface to form larger amorphous clusters on the surface. This work revealed that gold thin films deposited on a mica surface are the result of the sticking of 4-10 nm clusters. The topography of these films was similar to those reported previously under similar conditions.

• Journal of The Geomorphological Association of Korea
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• v.20 no.1
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• pp.97-109
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• 2013

This study introduces an analysis of the quantitative characteristics of topography and topographical changes based on precise 3D topography through 6 times surveys from December 2008 to January 2010 using Terrestrial LIDAR on the Malipo beach. The Malipo sand beach is mostly located between 0m to 1.5m MSL. The area of the beach above 2.25m, the Mean High Water, is very small. It have characteristics of topographical change of erosion and deposition along the entire coast line which more apparently appear in the northern beach than the southern part of the beach. Erosion prevails from spring to autumn, while during winter both erosion and deposition largely occur. Volumes from first and last survey were almost equal.

• Ocean and Polar Research
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• v.28 no.4
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• pp.361-368
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• 2006

The Saemangeum tidal flat with an area of approxirnately $233km^2$ is one of the biggest estuarine tidal flats on the west coast of Korea. Because of its location in the estuary of Mangyeong and Dongjin Rivers, the tidal flat receives large amount of sediments. A 33-km long sea dyke, enclosing a coastal zone of $401km^2$, was constructed to reclaim tidal flat in the Saemangeum area. The dyke construction radically changes the local tidal current regime and estuarine circulation. These have an effect on sedimentary environments in the tidal flat. On the tidal flats of the study area net deposition occurred, but net erosion occurred near tidal channel in 2004. The comparison of topography and surface sediments in summer 2004 with those in summer 1988 before the dyke construction showed that elevation increased with maximum 80cm and mean grain sizes were fining at Gwanghwal tidal flats. Sedimentary facies of two cores from Gwanghwal tidal flat revealed homogeneous layers in the upper part suggesting rapid deposition after the dyke construction. The sedimentation rate in Gwanghwal tidal flat(GW 6) using $^{210}Pb$ analysis was about 5.4cm/yr which is well matched with the sedimentation pattern revealed by change in topography.

• Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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• 2003.05a
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• pp.157-162
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• 2003

Nakdong estuary is located at south-eastern coast of the Korea. A lot of sediment from upper river were deposited at this area. It has cause many problem such as changes in topography and tidal current. Changes of characteristic of deposition were cause by topographic change of nakdong estuary. Analyzing and evaluating data, we could predict the direction of movement of the sand bar and the growth toward south-eastern of Nakdong estuary. It was caused by decreasing river discharge after construction of Nakdong-kang barrage.