• Journal of the Semiconductor & Display Technology
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• v.21 no.2
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• pp.74-84
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• 2022

As the semiconductor industry develops, the difficulty of newly required process technology becomes difficult, and the importance of production yield and product reliability increases. As an effort to minimize yield loss in the manufacturing process, interests in the process defect process for facility diagnosis and defect identification are continuously increasing. This research observed the plasma condition changes in the multi oxide/nitride layer deposition (MOLD) process, which is one of the 3D-NAND manufacturing processes through optical emission spectroscopy (OES) and monitored the result of whether the change in plasma characteristics generated in repeated deposition of oxide film and nitride film could directly affect the film. Based on these results, it was confirmed that if a change over a certain period occurs, a change in the plasma characteristics was detected. The change may affect the quality of oxide film, such as the film thickness as well as the interfacial surface roughness when the oxide and nitride thin film deposited by plasma enhenced chemical vapor deposition (PECVD) method.

• Proceedings of the Korean Information Science Society Conference
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• 2007.06a
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• pp.224-225
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• 2007

• Journal of the Korea Institute of Building Construction
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• v.21 no.2
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• pp.129-139
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• 2021

Recent rise in the supply rate of new public apartment houses leads to an increasement in disputes regarding the construction quality of the apartments between the residents and the construction companies. According to the dispute cases filed for claiming the collective defect repair fees, inter-layer concrete joints turned out to be the most frequently disputed item. For this reason, this study selects the inter-layer concrete joints to further analyze the primary causes and details of each dispute case. From the results of this study, three primary causes of the disputes are found, which are 1) the absence of standard specifications for construction quality control and management after construction; 2) the absence of established standards for repair when construction defects are found; and 3) the fact that the court grants generous compensation for disputes concerning the apartment houses. In order to prevent construction defects in inter-layer concrete joints, this study provides three suggestions including 1) the current standard specifications for inter-layer concrete joints should be further specified by the Ministry of Land, Infrastructure and Transport; 2) a construction defect should be judged according to the compliance to the standard specifications; and 3) a clear and institutional protocol needs to be established for defect repair in cases that new public apartment houses have been judged to have defects.

• Journal of the Korean Society for Nondestructive Testing
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• v.32 no.2
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• pp.177-184
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• 2012

An optical defect detection method using ESPI(electronic speckle pattern interferometry) is proposed. ESPI is widely used as a non-contact measurement system which show deformation and phase map in real time. ESPI can be divided as the in-plane, out-of-plane and shearography by operation principle and target object and also divided with bulk type and optic fiber type by the optic configurations. This paper is focused on optic fiber type out-of-plane ESPI, which has the following advantages: (1) low cost; (2) reduction of the unreliable factors generated by separated optic components; (3) simplification of the optic configuration; (4) great reduction of volume; (5) flexibility, to be easily designed into different structures to adapt to inaccessible environments such as pipeline cavity and so on.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.133-138
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• 2005

Automotive pulleys play a key role in driving the cooling pump, oil pump, air-conditioner and so on by using an engine power. Researches on design processes and technologies of the pulleys can be found in many literatures. On the other hand, the areas related to manufacturing processes of the pulleys have been treated negligently. Vast data extracted from various information systems are transformed, integrated, and summarized to become a special database for helping users make a decision. The database, namely the data warehouse has been popularly used in the marketing and customer management of enterprises and recently applied to improve the design and manufacturing processes. In this study the manufacturing process of pulleys were analyzed through the intensive investigation of shop-floors and the interviews with workers and managers. The defects generated during a manufacturing process were categorized in a few types and the causes of defects examined for extracting the dominant parameters in the setup process for producing pulleys. As the first step to construct the data warehouse for the manufacturing processes of pulleys, authors proposed its architecture focused on the reduction of defect rate during the setup process.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1507-1510
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• 2005

This study was carried out as a part of the research on the development of a maskless and electroless process for fabricating metal micro/nanostructures by using a nanoindenter and an electroless deposition technique. $2-\mu{m}-deep$ indentation tests on Ni and Cu samples were performed. The elastic recovery of the Ni and Cu was 9.30% and 9.53% of the maximum penetration depth, respectively. The hardness and the elastic modulus were 1.56 GPa and 120 GPa for Ni and 1.49 GPa and 100 GPa for Cu. The effect of single-point diamond machining conditions such as the Berkovich tip orientation (0, 45, and $90^{\circ}$) and the normal load (0.1, 0.3, 0.5, 1, 3, and 5 mN), on both the deformation behavior and the morphology of cutting traces (such as width and depth) was investigated by constant-load scratch tests. The tip orientation had a significant influence on the coefficient of friction, which varied from 0.52-0.66 for Ni and from 0.46-0.61 for Cu. The crisscross-pattern sample showed that the tip orientation strongly affects the surface quality of the machined area during scratching. A selective deposition of Cu at the pit-like defect on a p-type Si(111) surface was also investigated. Preferential deposition of the Cu occurred at the surface defect sites of silicon wafers, indicating that those defect sites act as active sites for the deposition reaction. The shape of the Cu-deposited area was almost the same as that of the residual stress field.

• Journal of Institute of Control, Robotics and Systems
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• v.6 no.2
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• pp.207-216
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• 2000

This paper introduces an effective system design method to develop a customer oriented product using a design optimization process and to select a set of critical design paramenters,. The process results in the development of a successful product satisfying customer needs and reducing development risk. The proposed scheme adopted a five step QFD(Quality Function Deployment) in order to extract design parameters from customer needs and evaluated their priority using risk factors for extracted design parameters. In this process we determine critical design parameters and allocate them to subsystem designers. Subsequently design engineers develop and test the product based on these parameters. These design parameters capture the characteristics of customer needs in terms of performance cost and schedule in the process of QFD, The subsequent risk management task ensures the minimum risk approach in the presence of design parameter uncertainty. An application of this approach was demonstrated in the development of weld quality monitoring system. Dominant design parameters affect linearity characteristics of weld defect feature vectors. Therefore it simplifies the algorithm for adopting pattern classification of feature vectors and improves the accuracy of recognition rate of weld defect and the real time response of the defect detection in the performance. Additionally the development cost decreases by using DSP board for low speed because of reducing CPU's load adopting algorithm in classifying weld defects. It also reduces the cost by using the single sensor to measure weld defects. Furthermore the synergy effect derived from the critical design parameters improves the detection rate of weld defects by 15% when compared with the implementation using the non-critical design parameters. It also result in 30% saving in development cost./ The overall results are close to 95% customer level showing the effectiveness of the proposed development approach.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.9
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• pp.1078-1085
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• 2011

Prediction of a minimum crack size for growth, which is defined as a crack size that grows fast enough to keep ahead of its removal by contact wear and periodic grinding, is the most demanding work to prevent rail from fatigue failure and develop cost effective railway maintenance strategy In this study, we investigated the wheel load increment due to a rail defect during a train ran over it, and its effect on the minimum crack size for growth. For this purpose, we developed simulation software based on the Fletcher and Kapoor's "2.5D" model and measured wheel load increment during a train passed over a defect. A maximum contact pressure and contact patch size were calculated by 3D FEM and crack growth analyses were performed by varying two of dominant contact contributors; surface friction coefficient(0.1, 0.2, 0.3 and 0.4) and crack aspect ratio. The minimum crack sizes for growth were calculated from 0.29 to 1.44mm depending on the contact conditions. They were decreasing with increasing surface friction coefficient and decreasing with crack aspect ratio(a/b).

• Journal of the Korean Society for Nondestructive Testing
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• v.29 no.2
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• pp.108-113
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• 2009

MFL(magnetic flux leakage) inspection is a general method of non-destructive evaluation(NDE) of underground gas pipelines. Pipelines are magnetized by permanent magnets when MFL PIG(pipeline inspection gauge) gets through them. If defects or corrosions exist in pipelines, effective thickness is changed and thus variation of leakage flux occurs. The leakage flux signals detected by hall-sensors are analyzed to characterize defect's geometries such as length, width, depth, and so on. This paper presents several methods for estimating defect's length using MFL signals and their performances are compared for real defects carved in KOGAS pipeline simulation facility. It is found that 80% and 90% of minimum values for axial and peak values for radial signals respectively show the best performance in the point of length estimation error.

• Current Photovoltaic Research
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• v.4 no.3
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• pp.124-129
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• 2016

Recently industry has voiced a need for optimally designing the production process of low-cost, high-quality ingots by improving productivity and reducing production costs with the Czochralski process. Crystalline defect control is important for the production of high-quality ingots. Also oxygen is one of the most important impurities that influence crystalline defects in single crystals. Oxygen is dissolved into the silicon melt from the silica crucible and incorporated into the crystalline a far larger amount than other additives or impurities. Then it is eluted during the cooling process, there by causing various defect. Excessive quantities of oxygen degrade the quality of silicone. However an appropriate amount of oxygen can be beneficial. because it eliminates metallic impurities within the silicone. Therefore, when growing crystals, an attempt should be made not to eliminate oxygen, but to uniformly maintain its concentration. Thus, the control of oxygen concentration is essential for crystalline growth. At present, the control of oxygen concentration is actively being studied based on the interdependence of various factors such as crystal rotation, crucible rotation, argon flow, pressure, magnet position and magnetic strength. However for methods using a magnetic field, the initial investment and operating costs of the equipment affect the wafer pricing. Hence in this study simulations were performed with the purpose of producing low-cost, high-quality ingots through the development of a process to optimize oxygen concentration without the use of magnets and through the following. a process appropriate to the defect-free range was determined by regulating the pulling rate of the crystals.