• Title/Summary/Keyword: defect engineering

Search Result 2,235, Processing Time 0.031 seconds

A Study on the Nitride Residue and Pad Oxide Damage of Shallow Trench Isolation(STI)-Chemical Mechanical Polishing(CMP) Process (STI-CMP 공정의 질화막 잔존물 및 패드 산화막 손상에 대한 연구)

  • Lee, U-Seon;Seo, Yong-Jin;Kim, Sang-Yong;Jang, Ui-Gu
    • The Transactions of the Korean Institute of Electrical Engineers C
    • /
    • v.50 no.9
    • /
    • pp.438-443
    • /
    • 2001
  • In the shallow trench isolation(STI)-chemical mechanical polishing(CMP) process, the key issues are the optimized thickness control, within-wafer-non-uniformity, and the possible defects such as pad oxide damage and nitride residue. The defect like nitride residue and silicon (or pad oxide) damage after STI-CMP process were discussed to accomplish its optimum process condition. To understand its optimum process condition, overall STI related processes including reverse moat etch, trench etch, STI fill and STI-CMP were discussed. Consequently, we could conclude that law trench depth and high CMP thickness can cause nitride residue, and high trench depth and over-polishing can cause silicon damage.

  • PDF

A study for PDMS Application Scheme of Digital S/S with IEC61850 Base (IEC61850 기반 디지털 변전시스팀에서의 PDMS 적용 방안에 관한 연구)

  • Lee, D.C.;Kim, H.S.;Bae, U.L.;Min, B.W.
    • Proceedings of the KIEE Conference
    • /
    • 2006.05a
    • /
    • pp.78-82
    • /
    • 2006
  • The Partial Discharge Monitoring System is technology which is available to measure & analysis the partial discharge of Power equipment. This technology is in the limelight as a pre-forecast system of equipment defect but there are some problems like no protocol standard, layered network management and the limitation of physical size. This paper presents whole system structure includes engineering centers, LN(Logical Node) to apply PDMS for, base-digital substation system, ICE61850 compatible Condition Monitoring &Diagnosis (CMD), Local Unit(LU), Intelligent Electronic Device (IED) for the solution scheme of these limitations.

  • PDF

The Study on the Cyber Security Requirements of Cyber-Physical Systems for Cyber Security Frameworks (사이버-물리 시스템의 보안 프레임워크 개발을 위한 보안 요구사항 분석 연구)

  • Park, Soo-Youl;Choi, Wook-Jin;Chung, Bo-Heung;Kim, Jeong-Nyeo;Kim, Joo-Man
    • IEMEK Journal of Embedded Systems and Applications
    • /
    • v.7 no.5
    • /
    • pp.255-265
    • /
    • 2012
  • A cyber-physical system(CPS) is a collection of cyber and physical components that interact with each other to achieve a particular application. Here, the CPS is emerged the reliability and security problems. Particularly, the defect of reliability in the data/control transmission under the CPS can lead to serious damage. We discuss the reliability and security problem on CPS architecture. Then we would suggest the considerations of cyber security in industrial control systems built with CPS.

LTPS (Low Temperature Poly Si) Technology Based on SLS (Sequential Lateral Solidification) Crystallization for Advanced Mobile Display

  • Kang, Myung-Koo;Kim, Hyun-Jae;Kim, Chi-Woo;Kim, Hyung-Guel
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 2006.08a
    • /
    • pp.1756-1760
    • /
    • 2006
  • LTPS technology based on SLS Crystallization was intensively reviewed. LTPS structure produced by SLS crystallization is composed of much larger grains compared with conventional ELA crystallization structure, which can give higher TFT performances. However, TFT performance uniformity and anisotropy problem should be solved for it to be used in mass production. TFT performance uniformity was from main grain boundary position and could be solved by equal defect area structure $(EDAS^{TM})$. TFT performance anisotropy could be also solved by multi-channel (MC) structure that can make parallel component in perpendicular channel direction. The higher TFT performances from SLS technology can make superior optical and/or electrical properties and has been adopted in mass production successfully.

  • PDF

Tensile Characterization of Ceramic Matrix Composites (CMCs) with Nondestructive Evaluation (NDE) Techniques

  • Kim, Jeongguk;Lee, Joon-Hyun
    • Proceedings of the Korean Society For Composite Materials Conference
    • /
    • 2003.10a
    • /
    • pp.190-194
    • /
    • 2003
  • Two different types of nondestructive evaluation (NDE) techniques were employed to investigate the tensile behavior of ceramic matrix composites (CMCs). Two NDE methods, ultrasonic testing (UT) and infrared (IR) thermography, were used to assess defects and/or damage evolution before and during mechanical testing. Prior to tensile testing, a UTC-scan and a xenon flash method were performed to obtain initial defect information in light of UT C-scans and thermal diffusivity maps, respectively. An IR camera was used for in-situ monitoring of progressive damages. The IR camera measured temperature changes during tensile testing. This paper has presented the feasibility of using NDE techniques to interpret structural performance of CMCs.

  • PDF

Fault Detection of a Gear with Initial Pitting using the Boomed Phase Map of Continuous Wavelet Transform (연속 웨이블렛 변환의 확대된 위상 지도를 이용한 기어의 초기 퍼팅 결함 진단)

  • Lee, Sang-Gwon;Sim, Jang-Seon
    • Transactions of the Korean Society of Mechanical Engineers A
    • /
    • v.25 no.11
    • /
    • pp.1759-1766
    • /
    • 2001
  • Vibration transient generated by developing localized fault in gear can be used as indicators in gear fault detection. In this paper, we propose the zoomed phase map for a fault signal using continuous wavelet transfers to detect this vibration transient. Local fault induces the abrupt fluctuation of load exciting tooth and phase lag in the vibration signal measured on the gearbox. The relatively large fault like "tip breakage" easily can be detected by the clear fluctuation of exciting load. However, minor fault like "initial pitting"cannot be detected using the load fluctuation. To defect this kind of minor fault, the phase map for a fault signal is taken into account. The phase lag by minor fault is observed well in the zoomed phase map.

Rigid-Plastic Finite Element Analysis for Forging Process Design of a Hollow Flange

  • Bae, Sung-Woo;Kim, Yohng-Jo
    • Journal of the Korean Society of Manufacturing Process Engineers
    • /
    • v.3 no.1
    • /
    • pp.59-65
    • /
    • 2004
  • Hollow flange-shaped parts rue widely used in transportation systems. For good quality products, in general, design of preforms and die shapes for a progressive forging process is an important issue. For the design of die shapes for the forging process of a hollow flange, computer simulations Were earned out using the rigid-plastic finite element method. Forging defects like folding were seen in the vicinity of die corners at the typical shape ratios of upper and lower dies Die shape ratios at which the forging defect could occur during the extrusion-forging process of the hollow flange were investigated. The results might be efficiently used for the proper design of perform shapes, die shapes, and forging processes.

  • PDF

Full angle range pressure coefficient maps of five-hole probe and new calibration coefficients (5공프로브의 전 각도 범위 압력계수 지도와 새로운 보정계수)

  • Kim, Jin-Gwon;Gang, Sin-Hyeong
    • Transactions of the Korean Society of Mechanical Engineers B
    • /
    • v.21 no.11
    • /
    • pp.1437-1448
    • /
    • 1997
  • Pressures of a five-hole probe were measured for a full range of yaw and pitch angles and complete pressure coefficient maps were obtained. Based on these maps, various features of five-hole probe pressures were revealed and new five-hole probe calibration coefficients were devised. The new calibration coefficients show non-diverging characteristics for any flow direction and one-to-one correspondence for a wide range of flow angles. These calibration coefficients expand the valid flow angle range of five-hole probe calibration by .+-.10 degrees and complement a critical defect of five-hole probe zone-division calibration method which has not been known yet. Moreover new non-diverging calibration coefficients have advantages in nulling methods, too.

A Case Study on an Investigation of a Defect in a Valve Body for Power Plant (용접(溶接)으로 제조(製造)된 화력발전용(火力發電用) 밸브 구조물(構造物)의 결계조사(缺階調査))

  • Kim, Song-Hee
    • Journal of Industrial Technology
    • /
    • v.5
    • /
    • pp.21-26
    • /
    • 1985
  • 본(本) 연구(硏究)는 주조(鑄造) 및 용접(溶接)을 통하여 제작(製作)된 화력발전용(火力發電用) 대형(大型)밸브에 발생한 결함(缺陷)의 원인(原因)을 규명하기 위하여 사용(使用)된 몇가지 기술에 대하여 언급하였다. 초음파(超音波) 비파괴검사(非破壞檢査)로써 내재(內在)되어 있는 균열의 위치(位置) 및 길이를 예측(豫測)하였다. 균열의 근원(根源)을 다치지 않게 보존(保存)한 채로 시험편(試驗片)에 대(對)하여 기계적 절단(絶斷)을 행하였다. 또한 균열의 원인(原因)을 직접 관찰할 수 있도록 액체 질소에서 낙추법(落錘法)을 써서 파단(破斷)시켰다. 동시(同時)에 균열의 측면양상(側面樣相)과 미세조직(微細組織)과의 관계를 금속현미경 및 전자현미경(SEM)을 통하여서 관찰하였다. 결론적으로 제조시(製造時) 도입(導入)된 결함(缺陷)은 용접과정중에 만들어진 것이 아니라 주조작업중(鑄造作業中)에 용융금속(溶融金屬)의 공급부족(共給不足)으로 인(因)하여 생긴 기공(氣孔)에서 출발(出發)하였음을 알 수 있었다.

  • PDF

Development of the Practical and Adaptive Die of Piloting Stripper Type for sheet Metal(Part 2)

  • Sim, Sung-Bo;Sung, Yul-Min;Song, Yong-Seok;Park, Hae-Kyoung
    • Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
    • /
    • 2000.10a
    • /
    • pp.114-117
    • /
    • 2000
  • In order to keep the zero defect of production in press working process. The optimum design of the production part, strip process layout, die design, die making and try out etc. are necessary the analysis of effective factors. For example, theory and practice of metal shearing process and it's phenomena, die structure, machine tool working for die making, die materials and it's heat treatment, metal working in field, their know how tc. are included in those factors. In this study, we analyzed whole of data base, theoretical back ground of metal working process, and then performed the progressive die tryout with the screw press. Part 2 of this study reveals with precision progressive die design, its making and tryout.

  • PDF