• 센서학회지
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• 제24권1호
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• pp.10-14
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• 2015

This paper reports the results of a study on the optimization of the etching profile, which is an important factor in deep-reactive-ion etching (DRIE), i.e., dry etching. Dry etching is the key processing step necessary for the development of the Internet of Things (IoT) and various microelectromechanical sensors (MEMS). Large-area etching (open area > 20%) under a high-frequency (HF) condition with nonoptimized processing parameters results in damage to the etched sidewall. Therefore, in this study, optimization was performed under a low-frequency (LF) condition. The HF method, which is typically used for through-silicon via (TSV) technology, applies a high etch rate and cannot be easily adapted to processes sensitive to sidewall damage. The optimal etching profile was determined by controlling various parameters for the DRIE of a large Si wafer area (open area > 20%). The optimal processing condition was derived after establishing the correlations of etch rate, uniformity, and sidewall damage on a 6-in Si wafer to the parameters of coil power, run pressure, platen power for passivation etching, and $SF_6$ gas flow rate. The processing-parameter-dependent results of the experiments performed for optimization of the etching profile in terms of etch rate, uniformity, and sidewall damage in the case of large Si area etching can be summarized as follows. When LF is applied, the platen power, coil power, and $SF_6$ should be low, whereas the run pressure has little effect on the etching performance. Under the optimal LF condition of 380 Hz, the platen power, coil power, and $SF_6$ were set at 115W, 3500W, and 700 sccm, respectively. In addition, the aforementioned standard recipe was applied as follows: run pressure of 4 Pa, $C_4F_8$ content of 400 sccm, and a gas exchange interval of $SF_6/C_4F_8=2s/3s$.

• Geomechanics and Engineering
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• 제36권3호
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• pp.303-316
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• 2024

Seismic records are composed of mainshock and a series of aftershocks which often result in the incremental damage to underground structures and bring great challenges to the rescue of post-disaster and the repair of post-earthquake. In this paper, the repetition method was used to construct the mainshock-aftershocks sequence which was used as the input ground motion for the analysis of dynamic time history. Based on the Daikai station, the two-dimensional finite element model of soil-station was established to explore the failure process of station under different seismic precautionary intensities, and the concept of incremental damage of station was introduced to quantitatively analyze the damage condition of structure under the action of mainshock and two aftershocks. An arc rubber bearing was proposed for the shock absorption. With the arc rubber bearing, the mode of the traditional column end connection was changed from "fixed connection" to "hinged joint", and the ductility of the structure was significantly improved. The results show that the damage condition of the subway station is closely related to the magnitude of the mainshock. When the magnitude of the mainshock is low, the incremental damage to the structure caused by the subsequent aftershocks is little. When the magnitude of the mainshock is high, the subsequent aftershocks will cause serious incremental damage to the structure, and may even lead to the collapse of the station. The arc rubber bearing can reduce the damage to the station. The results can offer a reference for the seismic design of subway stations under the action of mainshock-aftershocks.

• 한국지진공학회논문집
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• 제22권3호
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• pp.121-128
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• 2018

Severe earthquakes can cause damage to society both socially and economically. An appropriate initial response can alleviate damage from severe earthquakes. In order to formulate an appropriate initial response, it is necessary to identify damage situations in societies; however, it is difficult to grasp this information immediately after an earthquake event. In this study, an earthquake damage assessment methodology for buildings is proposed for estimating damage situations immediately after severe earthquakes. A response spectrum database is constructed to provide response spectra at arbitrary locations from earthquake measurements immediately after the event. The fragility curves are used to estimate the damage of the buildings. Earthquake damage assessment is performed from the response spectrum database at the building scale to provide enhanced damage condition information. Earthquake damage assessment for Gyeongju city and Pohang city were conducted using the proposed methodology, when an earthquake occurred on September 12, 2016, and November 15, 2017. Results confirm that the proposed earthquake damage assessment effectively represented the earthquake damage situation in the city to decide on an appropriate initial response by providing detailed information at the building scale.

• Structural Engineering and Mechanics
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• 제46권1호
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• pp.75-90
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• 2013

In order to identify damage of highway bridges rapidly, a method for damage identification using dynamic response of bridge induced by moving vehicle and static test data is proposed. To locate damage of the structure, displacement energy damage index defined from the energy of the displacement response time history is adopted as the indicator. The displacement response time histories of bridge structure are obtained from simulation of vehicle-bridge coupled vibration analysis. The vehicle model is considered as a four-degree-of-freedom system, and the vibration equations of the vehicle model are deduced based on the D'Alembert principle. Finite element method is used to discretize bridge and finite element model is set up. According to the condition of displacement and force compatibility between vehicle and bridge, the vibration equations of the vehicle and bridge models are coupled. A Newmark-${\beta}$ algorithm based professional procedure VBAP is developed in MATLAB, and used to analyze the vehicle-bridge system coupled vibration. After damage is located by employing the displacement energy damage index, the damage extent is estimated through the least-square-method based model updating using static test data. At last, taking one simply supported bridge as an illustrative example, some damage scenarios are identified using the proposed damage identification methodology. The results indicate that the proposed method is efficient for damage localization and damage extent estimation.

• 대한기계학회논문집
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• 제16권10호
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• pp.1824-1832
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• 1992

본 연구에서는 충돌입자의 크기의 영향을 평가하기 위하여 동일한 운동에너지 를 갖는 직경 5mm 및 10mm의 강구를 시편에 충돌시킨 후 배항각 변화에 따른 손물역의 크기 변화를 초음파현미경(SAM)과 주사전자현미경(SEM)으로 관찰하였고, 충돌에 따른 압축강성의 변화를 고찰하기 위하여 충격전후의 압축탄성계수를 측정하였다.

• Structural Engineering and Mechanics
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• 제54권2호
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• pp.257-289
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• 2015

Shear connectors are generally used to link the slab and girders together in slab-on-girder bridge structures. Damage of shear connectors in such structures will result in shear slippage between the slab and girders, which significantly reduces the load-carrying capacity of the bridge. Because shear connectors are buried inside the structure, routine visual inspection is not able to detect conditions of shear connectors. A few methods have been proposed in the literature to detect the condition of shear connectors based on vibration measurements. This paper proposes a different dynamic condition assessment approach to identify the damage of shear connectors in slab-on-girder bridge structures based on power spectral density transmissibility (PSDT). PSDT formulates the relationship between the auto-spectral densities of two responses in the frequency domain. It can be used to identify shear connector conditions with or without reference data of the undamaged structure (or the baseline). Measured impact force and acceleration responses from hammer tests are analyzed to obtain the frequency response functions at sensor locations by experimental modal analysis. PSDT from the slab response to the girder response is derived with the obtained frequency response functions. PSDT vectors in the undamaged and damaged states can be compared to identify the damage of shear connectors. When the baseline is not available, as in most practical cases, PSDT vectors from the measured response at a reference sensor to those of the slab and girder in the damaged state can be used to detect the damage of shear connectors. Numerical and experimental studies on a concrete slab supported by two steel girders are conducted to investigate the accuracy and efficiency of the proposed approach. Identification results demonstrate that damages of shear connectors are identified accurately and efficiently with and without the baseline. The proposed method is also used to evaluate the conditions of shear connectors in a real composite bridge with in-field testing data.

• 대한의생명과학회지
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• 제7권4호
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• pp.181-190
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• 2001

This study was designed to investigate the effects of reactive oxygen species (ROS) on DNA stability in human spermatozoa. To verify human spermatozoa were incubated with xanthine-xanthine oxidase (X 100$\mu$M-XO 50 mlU ~ 400 mIU), $H_2O_2$ (125 $\mu$M ~ 1 mM), sodium nitroprusside (SNP 0.1 $\mu$M ~ 100 $\mu$M) or lymphocyte. Otherwise, spermatozoa were incubated under low $O_2$ (5%) condition. Damage of sperm DNA was analyzed by single cell electrophoresis (Comet assay) and flow cytometry after acridine orange staining. In the presence of ROS, there was increase in DNA damage. The rate of DNA single strand breakage (9.0$\pm$1.0% ~ 46.0$\pm$4.6%) and DNA fragmentation (7.51$\pm$1.0% ~ 29.5$\pm$4.6%) were similar regardless of the kinds of ROS and exposure time. DNA damage in the lower $O_2$ condition (5%) was lower than ambient $O_2$ condition (20%). Taken together, it suggested that sperm DNA might be damaged by ROS. In the presence of ROS, increase in DNA damage and chromatin instability was obvious in spite of short exposure. Although present study reconfirmed that sperm incubation in the low concentration of ROS have the benefit m the induction of capacitation and Ah, the increase in DNA damage by ROS and possible genetic problem should be considered before the human trials.

• Journal of Biosystems Engineering
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• 제42권4호
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• pp.242-250
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• 2017

Purpose: This study was conducted to determine the appropriate operating conditions through a factorial experiment for the secondary separating part of the self-propelled pepper harvester. Methods: An experimental setup that simulates the secondary separating part of the self-propelled pepper harvester was organized. Test samples were classified into three types according to the number of peppers on a stem, and 12 sets were prepared for each type. Among the operating conditions of the secondary separating part, the rotational speed of drum B (four levels), radial clearance between drums and cylindrical teeth (three levels), and speed ratio between the three drums (two levels) were set as the test factors, and tests were repeated three times for different levels of each factor. The appropriate operating conditions were determined by analyzing the separation ratio and damage ratio of the peppers collected through the secondary separating part. Results: The test factors changed the overall separation ratio and overall damage ratio in similar trends. In other words, the conditions that caused high overall separation ratios also exhibited high overall damage ratios. Owing to the high overall damage ratio in the condition with the highest overall separation ratio, the operating conditions should be selected considering both ratios. Conclusions: When the condition with more than 60% of overall separation ratio and less than 15% of overall damage ratio was considered as the appropriate operating condition, 70 rpm of the rotational speed of drum B, 5 mm of the radial clearance between drums and cylindrical teeth, and 7:3:5 for the speed ratio of the three drums A, B, and C should be applied for the secondary separating part used in this study. Supplementary studies will be required in the future to find optimal operating conditions through the actual field test under further divided test factors.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2003년도 추계학술대회논문집
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• pp.291-295
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• 2003

The occurrence of ductile fracture is the working limit of many metal forming processes. It is necessary to predict the criteria and to apply the condition in a process design. Over the years. the way for clarifying conditions have been studied and presented. However such a way needs lots of experiments and analysis. In this study, in order to determine the critical damage value of a used material Cu 4N, it was performed a tensile test and FEM analysis by using DEFORM 2D. For applying the obtained critical damage value it was also performed a upsetting test by using DEFORM 2D. The way of determining a critical damage value which is presented in this study will make possible to find easily it which is one of the working limit factor. And the way of determining a critical damage value will make possible to find in multi-pass drawing process.

• 한국건축시공학회:학술대회논문집
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• 한국건축시공학회 2018년도 춘계 학술논문 발표대회
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• pp.145-146
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• 2018

In this study, the purpose of the study is to determine the depth of damage caused by early frost damage in concrete slab structures under the conditions of external temperature during winter. In other words, we intend to analyze the depth variation of the early frost damage as the thickness of the normal strength concrete slab members changes. As a result, the thinner the component was, the deeper the early frost damage was found to be, and the resulting increase in brightness of the concrete was delayed. and It is analyzed that under this test condition, an early frost damage was created with a thickness of 50 mm for the member and a thickness of 39 mm for the member of 300 mm.