• Title/Summary/Keyword: damage condition

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A Study on the Nitride Residue and Pad Oxide Damage of Shallow Trench Isolation(STI)-Chemical Mechanical Polishing(CMP) Process (STI-CMP 공정의 질화막 잔존물 및 패드 산화막 손상에 대한 연구)

  • Lee, U-Seon;Seo, Yong-Jin;Kim, Sang-Yong;Jang, Ui-Gu
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.50 no.9
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    • pp.438-443
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    • 2001
  • In the shallow trench isolation(STI)-chemical mechanical polishing(CMP) process, the key issues are the optimized thickness control, within-wafer-non-uniformity, and the possible defects such as pad oxide damage and nitride residue. The defect like nitride residue and silicon (or pad oxide) damage after STI-CMP process were discussed to accomplish its optimum process condition. To understand its optimum process condition, overall STI related processes including reverse moat etch, trench etch, STI fill and STI-CMP were discussed. Consequently, we could conclude that law trench depth and high CMP thickness can cause nitride residue, and high trench depth and over-polishing can cause silicon damage.

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Fundamental Research of Early Frozen Damage on Concrete Depending on Various Time Periods of -20℃ Temperature Condition (외기온 -20℃의 유지시간 변화에 따른 초기동해 피해의 기초적 연구)

  • Choi, Yoon-Ho;Han, Jun-Hui;Lee, Young-Jun;Hyun, Seung-Yong;Han, Min-Cheol;Han, Cheon-Goo
    • Proceedings of the Korean Institute of Building Construction Conference
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    • 2019.05a
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    • pp.197-198
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    • 2019
  • The aim of the research is evaluating the feasibility of inspection for early age frozen damage and for expansion of concrete under the various time periods of -20℃ temperature condition. When the concrete samples were exposed for 12 hours and 24 hours, the frozen depth of the concrete were 10 and 60 mm, respectively, under the wet conditions. From the experiment results of temperature and expansion, only surface area suffered frozen damage for 12 hours exposing conditions while entire area suffered frozen damage for 24 hours exposing conditions.

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Three-dimensional structural health monitoring based on multiscale cross-sample entropy

  • Lin, Tzu Kang;Tseng, Tzu Chi;Lainez, Ana G.
    • Earthquakes and Structures
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    • v.12 no.6
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    • pp.673-687
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    • 2017
  • A three-dimensional; structural health monitoring; vertical; planar; cross-sample entropy; multiscaleA three-dimensional structural health monitoring (SHM) system based on multiscale entropy (MSE) and multiscale cross-sample entropy (MSCE) is proposed in this paper. The damage condition of a structure is rapidly screened through MSE analysis by measuring the ambient vibration signal on the roof of the structure. Subsequently, the vertical damage location is evaluated by analyzing individual signals on different floors through vertical MSCE analysis. The results are quantified using the vertical damage index (DI). Planar MSCE analysis is applied to detect the damage orientation of damaged floors by analyzing the biaxial signals in four directions on each damaged floor. The results are physically quantified using the planar DI. With progressive vertical and planar analysis methods, the damaged floors and damage locations can be accurately and efficiently diagnosed. To demonstrate the performance of the proposed system, performance evaluation was conducted on a three-dimensional seven-story steel structure. According to the results, the damage condition and elevation were reliably detected. Moreover, the damage location was efficiently quantified by the DI. Average accuracy rates of 93% (vertical) and 91% (planar) were achieved through the proposed DI method. A reference measurement of the current stage can initially launch the SHM system; therefore, structural damage can be reliably detected after major earthquakes.

Effect of Burn out Print Finishing on Cellulose Fiber Damage (섬유소계 직물의 탄화날염가공이 섬유손성에 미치는 영향)

  • 신정숙;송석규
    • Journal of the Korean Society of Clothing and Textiles
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    • v.25 no.1
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    • pp.124-131
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    • 2001
  • To find out the effect of burn out print finishing for better quality of fabric, examined processing which could make less damages on the fiber because the biggest problem is remained fibers damage after burn out print finishing. Fiber damage examined to the condition of finishing material NaHSO$_4$and H$_2$SO$_4$, 3~10min., 100~13$0^{\circ}C$, glycerin. The fiber damages evaluated the break strength and the surface condition by SEM. Among satin, pile fabric which remained fiber is silk, warp knitted fabric which remained fiber is polyester, the fibers damage level were warp knitted fabric$0^{\circ}C$, glycerin and for 6 minutes by NaHSO$_4$. When carbonized by 20%. 50% and 70% to express textile design, carbonizing rate was not effect on the fiber damage very much. There was almost no damages with glycerine, and almost no damages during 3~6minutes fixation time, 10$0^{\circ}C$ steaming heat fixation by NaHSO$_4$and H$_2$SO$_4$. Without glycerine, there were damage by hydrolysis on polyesters surface and the fiver was broken by fixation time.

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Condition assessment of stay cables through enhanced time series classification using a deep learning approach

  • Zhang, Zhiming;Yan, Jin;Li, Liangding;Pan, Hong;Dong, Chuanzhi
    • Smart Structures and Systems
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    • v.29 no.1
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    • pp.105-116
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    • 2022
  • Stay cables play an essential role in cable-stayed bridges. Severe vibrations and/or harsh environment may result in cable failures. Therefore, an efficient structural health monitoring (SHM) solution for cable damage detection is necessary. This study proposes a data-driven method for immediately detecting cable damage from measured cable forces by recognizing pattern transition from the intact condition when damage occurs. In the proposed method, pattern recognition for cable damage detection is realized by time series classification (TSC) using a deep learning (DL) model, namely, the long short term memory fully convolutional network (LSTM-FCN). First, a TSC classifier is trained and validated using the cable forces (or cable force ratios) collected from intact stay cables, setting the segmented data series as input and the cable (or cable pair) ID as class labels. Subsequently, the classifier is tested using the data collected under possible damaged conditions. Finally, the cable or cable pair corresponding to the least classification accuracy is recommended as the most probable damaged cable or cable pair. A case study using measured cable forces from an in-service cable-stayed bridge shows that the cable with damage can be correctly identified using the proposed DL-TSC method. Compared with existing cable damage detection methods in the literature, the DL-TSC method requires minor data preprocessing and feature engineering and thus enables fast and convenient early detection in real applications.

2-Step Structural Damage Analysis Based on Foundation Model for Structural Condition Assessment (시설물 상태평가를 위한 파운데이션 모델 기반 2-Step 시설물 손상 분석)

  • Hyunsoo Park;Hwiyoung Kim ;Dongki Chung
    • Korean Journal of Remote Sensing
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    • v.39 no.5_1
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    • pp.621-635
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    • 2023
  • The assessment of structural condition is a crucial process for evaluating its usability and determining the diagnostic cycle. The currently employed manpower-based methods suffer from issues related to safety, efficiency, and objectivity. To address these concerns, research based on deep learning using images is being conducted. However, acquiring structural damage data is challenging, making it difficult to construct a substantial amount of training data, thus limiting the effectiveness of deep learning-based condition assessment. In this study, we propose a foundation model-based 2-step structural damage analysis to overcome the lack of training data in image-based structural condition assessments. We subdivided the elements of structural condition assessment into instantiation and quantification. In the quantification step, we applied a foundation model for image segmentation. Our method demonstrated a 10%-point increase in mean intersection over union compared to conventional image segmentation techniques, with a notable 40%-point improvement in the case of rebar exposure. We anticipate that our proposed approach will enhance performance in domains where acquiring training data is challenging.

A Study of Chemical Mechanical Polishing on Shallow Trench Isolation to Reduce Defect (CMP 연마를 통한 STI에서 결함 감소)

  • 백명기;김상용;김창일;장의구
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.05a
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    • pp.501-504
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    • 1999
  • In the shallow trench isolation(STI) chemical mechanical polishing(CMP) process, the key issues are the optimized thickness control within- wafer-non-uniformity, and the possible defects such as nitride residue and pad oxide damage. These defects after STI CMP process were discussed to accomplish its optimum process condition. To understand its optimum process condition, overall STI related processes including reverse moat etch, trench etch, STI filling and STI CMP were discussed. It is represented that the nitride residue can be occurred in the condition of high post CMP thickness and low trench depth. In addition there are remaining oxide on the moat surface after reverse moat etch. It means that reverse moat etching process can be the main source of nitride residue. Pad oxide damage can be caused by over-polishing and high trench depth.

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Earthquake Damage Monitoring for Underground Structures Based Damage Detection Techniques

  • Kim, Jin Ho;Kim, Na Eun
    • International Journal of Railway
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    • v.7 no.4
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    • pp.94-99
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    • 2014
  • Urban railway systems are located under populated areas and are mostly constructed for underground structures which demand high standards of structural safety. However, the damage progression of underground structures is hard to evaluate and damaged underground structures may not effectively stand against successive earthquakes. This study attempts to examine initial damage-stage and to access structural damage condition of the ground structures using Earthquake Damage Monitoring (EDM) system. For actual underground structure, vulnerable damaged member of Ulchiro-3ga station is chosen by finite element analysis using applied artificial earthquake load, and then damage pattern and history of damaged members is obtained from measured acceleration data introduced unsupervised learning recognition. The result showed damage index obtained by damage scenario establishment using acceleration response of selected vulnerable members is useful. Initial damage state is detected for selected vulnerable member according to established damage scenario. Stiffness degrading ratio is increasing whereas the value of reliability interval is decreasing.

Study of damage safety assessment for a ship carrying radioactive waste

  • Lee, Dong-Kon;Choi, Jin;Park, Beom-Jin;Kang, Hee-Jin;Lim, Suk-Nam
    • International Journal of Naval Architecture and Ocean Engineering
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    • v.4 no.2
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    • pp.141-150
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    • 2012
  • Ship damage caused by maritime casualties leads to marine pollution and loss of life and property. To prevent serious damage from maritime casualties, several types of safety regulations are applied in ship design. Damage stability regulation is one of the most important safety issues. Designs of ships for long international voyages must comply with these regulations. Current regulations, however, do not consider the characteristics of the operating route of each ship and reflect only ship size and type of cargo. In this paper, a damage safety assessment was undertaken for a ship carrying radioactive waste in actual wave conditions. Damage cases for safety assessment were constructed on the basis of safety regulations and related research results. Hull form, internal arrangement, loading condition and damage condition were modeled for damage safety simulation. The safety simulation was performed and analyzed for 10 damage cases with various wave heights, frequency and angle of attack on an operating route. Based on evaluation results, a design alternative was generated, and it was also simulated. These results confirmed that damage safety analysis is highly important in the design stage in consideration of the operating route characteristics by simulation. Thus a ship designer can improve safety from damage in this manner.

A study on Damages and Characteristic caused by Rainfall in Kangwon Provincial (집중호우로 인한 강원지역 피해현황 및 특성에 관한 연구)

  • Baek, Du-Hyun;Lee, Seung-Ho;Jung, Chun-Gyo;Hwang, Young-Cheol
    • 한국방재학회:학술대회논문집
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    • 2007.02a
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    • pp.90-93
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    • 2007
  • The rainy season started in July, 2006 and the rainfall occurred much damage from July 26 to 28 for three days. Injae and Yangyang which many damage generated by rainfall was made applicable to research. Research of a study has grasped the damage aspect and present condition of Kangwondo. The cause of damage and the measure were concluded in consideration of the collapse characteristic.

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