• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.458-458
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• 2010

The process window for the etch selectivity of silicon nitride ($Si_3N_4$) layers to extreme ultra-violet (EUV) resist and variation of line edge roughness (LER) of EUV resist were investigated durin getching of $Si_3N_4$/EUV resist structure in a dual-frequency superimposed capacitive coupled plasma (DFS-CCP) etcher by varying the process parameters, such as the $CH_2F_2$ and $N_2$ gas flow rate in $CH_2F_2/N_2$/Ar plasma. The $CH_2F_2$ and $N_2$ flow rate was found to play a critical role in determining the process window for infinite etch selectivity of $Si_3N_4$/EUV resist, due to disproportionate changes in the degree of polymerization on $Si_3N_4$ and EUV resist surfaces. The preferential chemical reaction between hydrogen and carbon in the hydrofluorocarbon ($CH_xF_y$) polymer layer and the nitrogen and oxygen on the $Si_3N_4$, presumably leading to the formation of HCN, CO, and $CO_2$ etch by-products, results in a smaller steady-state hydrofluorocarbon thickness on $Si_3N_4$ and, in turn, in continuous $Si_3N_4$ etching due to enhanced $SiF_4$ formation, while the $CH_xF_y$ layer is deposited on the EUV resist surface. Also critical dimension (and line edge roughness) tend to decrease with increasing $N_2$ flow rate due to decreased degree of polymerization.

• Journal of the Korean Geotechnical Society
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• v.19 no.5
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• pp.199-210
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• 2003

The development of strain localization within shear zones is frequently observed during soil deformation. In fact, the phenomenon appears to be more often the norm rather than the exception. Conceptually, any soil condition that renders negative work increment is prone to localization. In this study, a broad range of soil and loading conditions are investigated to test this criterion, including: dilative soil subjected to drained shear (standard case), contractive soil sheared under undrained conditions, cavitation in dilative soil in undrained shear, inhomogeneous soils, particle alignment in contractive soils made of platy particles, soils that experience particle crushing, and the shear of low-moisture and/or lightly cemented loose soils. Unique specimens and test procedures are designed to separately test each of these soil conditions in the laboratory According to experimental test results, soil specimens with post-peak strain softening behavior are prone to progressive failure, localization of deformations, and shear banding. The state of stress, the soil density, inherent mechanical and geometrical properties of soil particles, low water content, and heterogeneity can contribute to triggering strain localization. Considering all possible cases of localization, the best method to obtain the critical state line in the laboratory is to use contractive homogeneous specimens subjected to drained shear.

• The Journal of Engineering Geology
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• v.18 no.2
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• pp.177-183
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• 2008

In the study, we carried out a 3-D analysis to assess the influence of groundwater level changes on the slope stability, conducting a series of back-numerical analysis to delineate the critical line of the shear strength of the failure surface of a landslide, and a laboratory test to determine the geo-mechanical properties of soil samples. The analysis result shows that the shear strength determined by the laboratory test was distributed below the critical line of shear strength estimated by back-analysis. Differences between driving and resisting force were also analyzed in groundwater conditions of dry and saturation. It appeared that the stress gets greater towards the slope center of the landslide, and the debris mass moves downwards. According to the analysis, the factor of safety becomes 1 with the rise of foundwater level up to -0.85 m from the slope surface, while the slope tends to stay stable during dry seasons.

• Earthquakes and Structures
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• v.19 no.6
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• pp.445-457
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• 2020

An ultra-high voltage (UHV) transmission system has the advantages of low circuitry loss, high bulk capacity and long-distance transmission capabilities over conventional transmission systems, but it is easier for this system to cross fault rupture zones and become damaged during earthquakes. This paper experimentally and numerically investigates the seismic responses and collapse failure of a UHV transmission tower-line system crossing a fault. A 1:25 reduced-scale model is constructed and tested by using shaking tables to evaluate the influence of the forward-directivity and fling-step effects on the responses of suspension-type towers. Furthermore, the collapse failure tests of the system under specific cross-fault scenarios are carried out. The corresponding finite element (FE) model is established in ABAQUS software and verified based on the Tian-Ma-Qu material model. The results reveal that the seismic responses of the transmission system under the cross-fault scenario are larger than those under the near-fault scenario, and the permanent ground displacements in the fling-step ground motions tend to magnify the seismic responses of the fault-crossing transmission system. The critical collapse peak ground acceleration (PGA), failure mode and weak position determined by the model experiment and numerical simulation are in relatively good agreement. The sequential failure of the members in Segments 4 and 5 leads to the collapse of the entire model, whereas other segments basically remain in the intact state.

• KCI Concrete Journal
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• v.13 no.1
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• pp.19-25
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• 2001

Based on the orthotropic hypoelasticity formulation, a constitutive material model of concrete taking account of triaxial stress state is presented. In this model, the ultimate strength surface of concrete in triaxial stress space is described by the Hsieh's four-parameter surface. On the other hand, the different ultimate strength surface of concrete in strain space is proposed in order to account for increasing ductility in high confinement pressure. Compressive ascending and descending behavior of concrete is considered. Concrete cracking behavior is considered as a smeared crack model, and after cracking, the tensile strain-softening behavior and the shear mechanism of cracked concrete are considered. The proposed constitutive model of concrete is compared with some results obtained from tests under the states of uniaxial, biaxial, and triaxial stresses. In triaxial compressive tests, the peak compressive stress from the predicted results agrees well with the experimental results, and ductility response under high confining pressure matches well the experimental result. The reinforcing bars embedded in concrete are considered as an isoparametric line element which could be easily incorporated into the isoparametric solid element of concrete, and the average stress - average strain relationship of the bar embedded in concrete is considered. From numerical examples for a reinforced concrete simple beam and a structural beam type member, the stress state of concrete in the vicinity of talc critical region is investigated.

• Proceedings of the KSME Conference
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• 2008.11b
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• pp.2744-2749
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• 2008

Numerical calculations are carried out for the natural convection induced by temperature difference between a cold outer square cylinder and a hot inner circular cylinder for Rayleigh number of $Ra=10^7$. This study investigates the effect of the inner cylinder location on the heat transfer and fluid flow. The location of inner circular cylinder ($\delta$) is changed vertically along the center-line of square enclosure. The natural convection bifurcates from unsteady to steady state according to $\delta$. Two critical positions of ${\delta}_{C,L}$ and ${\delta}_{C,U}$ as a lower bound and an upper bound are ${\delta}_{C,L}=0.05$ and ${\delta}_{C,U}=0.18$, respectively. Within the defined bounds, the thermal and flow fields are steady state. When the inner cylinder locates at ${\delta}{\geq}{\delta}_{C,U}$, the space between the upper surface of inner cylinder and the top surface of the enclosure forms a relatively shallow layer where the natural convection characterized as the pure Rayleigh-Benard convection forms alternately the upwelling and downwelling plums, as a result that a series of cells known as Benard cells is derived.

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1726-1728
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• 2003

The aging diagnosis method using partial discharge measurement detects discharge signals that critical cause of failure in insulation material operated a long time and can diagnose aging state of insulation materials with an aging analysis algorithm. The HFPD measurement method is a technique to analyze aging state of high voltage insulation materials and detect higher frequency signals than conventional PD measurement method therefore it takes less noise effect and could execute active line measurement. It is possible to analyze main discharge phenomena and obtain access to aging progress occurred in insulation materials through accumulation of HFPD signals during determined interval and expression of fractal dimension using statistical process of accumulated signals. The HFPD signals that occurred in each applied voltages are measured during 180 cycles and accumulated to the same phase of one cycle. These patterns that made by previous method are normalized with logarithm function and than inputted to neural networks. The aging diagnosis of insulation material was possible and the recognition ratio of neural network appeared very high.

• Journal of Energy Engineering
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• v.13 no.1
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• pp.60-67
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• 2004

The recent movement to deregulated and competitive electricity market reacquires new concepts against existing central dispatch in the system operation and pinning. As power systems tend to be operated more closely to their ultimate ratings, the role of SCOPF (Security Constrained Optimal Power flow) is changed and the importance for real-time security inhancement will be more increased i]1 the new and com partitive electricity market. This paper deals with the application of the SCOPF which makes possible the On-Line application. The security margin of power system truly is changed according to the conditions or configuration of power systems, therefore, the sensitivity factor reiated to the security is recalculated and the application should be updated in accordance with the state of power system. The goal of this paper is to obtain proper security through the effluent usage of the sensitivity and to apply this a1gorithm to system operation. The proposed mechanism has been tested on a sample system and the results show more secure conditions against critical contingencies.

• Smart Structures and Systems
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• v.14 no.6
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• pp.1197-1220
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• 2014

Accurate actuator tracking is critical to achieve reliable real-time hybrid simulation results for earthquake engineering research. The frequency-domain evaluation approach provides an innovative way for more quantitative post-simulation evaluation of actuator tracking errors compared with existing time domain based techniques. Utilizing the Fast Fourier Transform the approach analyzes the actuator error in terms of amplitude and phrase errors. Existing application of the approach requires using the complete length of the experimental data. To improve the computational efficiency, two techniques including data decimation and frequency decimation are analyzed to reduce the amount of data involved in the frequency-domain evaluation. The presented study aims to enhance the computational efficiency of the approach in order to utilize it for future on-line actuator tracking evaluation. Both computational simulation and laboratory experimental results are analyzed and recommendations on the two decimation factors are provided based on the findings from this study.

• Journal of Advanced Marine Engineering and Technology
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• v.22 no.6
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• pp.854-861
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• 1998

The demand of LNG as a cheap and clean energy which does not cause an environmental problem has sharply been increased in Korea. In general LNG is stored in a cargo tank specially designed as a liquid state below $-162^{\circ}C$. The main engine of a LNG carrier is generally a steam boiler because LNG is a highly flammable fluid with the possibility of explosion. The main engine of a cargo ship has to be capable of the propulsion load and various auxiliary loads for the safe navigation since it is the primary energy source. Therefore the evaluation of a main boiler's energy capacity is a key design point in the planning of LNG carrier's construction. This research is to develop the computational program for the analysis of steam boiler Heat balance for LNG carrier.