• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.04a
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• pp.285-288
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• 1997

Generally the high dielectric films, such as PZT(Pb(Z $r^{1-x}$ $Ti_{x}$ ) $O_3$) and BST(B $a_{l-x}$S $r_{x}$ Ti $O_3$) have been formed on the Pt thin films. However it is generally known that the dry etching of Pt is difficult because of its chemical stability. So, the dry etching of Pt remains at the preliminary work. Therefore, in this study, Pt etching mechanism was investigated with Ar/C $l_2$gas plasma by using XPS(X-ray photoelectron spectroscopy) and QMS(Quadrupole mass spectrometry). Ion current density was measured with Ar/C $l_2$gas plasma by using single Langmuir probe. XPS results shoved that the atomic % of Cl element on the etched Pt sample increased with increasing Ar/(Ar+C $l_2$). And QMS results showed that the increase of Ar partial pressure in the plasma resulted in the improvement of C $l_2$dissociation and Cl redical formation and simultaniously the increase of ion bombardment effects.s.s.

• Proceedings of the KIEE Conference
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• 2006.07a
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• pp.607-608
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• 2006

In recent, it became necessary to develop the technology about electrodeless fluorescent lamp according to demand of the electrodeless fluorescent lamp system that used higher efficiency and advantage of long lifetime. Inductively coupled plasma is commonly used for electrodeless lamp due to its ease of plasma generation. An electric power efficiency of electrodeless fluorescent lamp has big relative property of gas in lamp, gas pressure, lamp formation, ingredients of magnetic substance and shape and action frequency etc. We used magnetic substance that open self-examination material of electrodeless fluorescent lamp antenna. Ferrite that is used in this experiment was Mn-Zn type. We have examined temperature and flux characteristic by frequency. Considering using frequency 2.65[MHz], Frequency was changed from 2.05(MHz) to 3.05[MHz] to recognize flux and temperature change of lamp. I used LMS(Lighting Measurement System) to measure flux and IR Camera to measure temperature of lamp.

• Proceedings of the KIEE Conference
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• 2006.07d
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• pp.2239-2240
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• 2006

In recent, it became necessary to develop the technology about electrodeless fluorescent lamp according to demand of the electrodeless fluorescent lamp system that used higher efficiency and advantage of long lifetime. Inductively coupled plasma is commonly used for electrodeless lamp due to its ease of plasma generation. An electric power efficiency of electrodeless fluorescent lamp has big relative property of gas in lamp, gas pressure, lamp formation, ingredients of magnetic substance and shape and action frequency etc. We used magnetic substance that open self-examination material of electrodeless fluorescent lamp antenna. Ferrite that is used in this experiment was Mn-Zn type. We have examined temperature and flux characteristic by frequency. Considering using frequency 2.65[MHz], Frequency was changed from 2.05[MHz] to 3.05[MHz] to recognize flux and temperature change of lamp. I used LMS(Lighting Measurement System) to measure flux and IR Camera to measure temperature of lamp.

• Bulletin of the Korean Chemical Society
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• v.32 no.8
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• pp.2607-2610
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• 2011

Monodispersed Ag/$TiO_2$ core/shell nanoparticles were synthesized in solution via colloid-seeded deposition process using Ag nanoparticles as colloid seeds and $Ti(SO_4)_2$ as Ti-source respectively. Silver nitrate was reduced to Ag nanoparticles with $N_2H_4{\cdot}H_2O$ in the presence of CTAB as stabilizing agent. The titania sols hydrolyzed by the $Ti(SO_4)_2$ solution deposited on the surface of Ag nanoparticles to form the Ag/$TiO_2$ core/shell nanoparticles. Inductively coupled plasma atomic emission spectrometry (ICP-AES) showed low amount of Ag ion leaching from the Ag/$TiO_2$ core/shell nanoparticles. The Ag/$TiO_2$ core/shell nanoparticles indicated excellent antibacterial effects against Escherichia coli and maintained long-term antibacterial property.

• Journal of the Korean Ceramic Society
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• v.47 no.2
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• pp.189-194
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• 2010

Compared with organic fluorophores, semiconductor quantum dots (QDs) have the better properties such as photostability, narrow emission spectra coupled to tunable photoluminescent emissions and exceptional resistance to both photo bleaching and chemical degradation. In this work, CdSe/ZnS QDs nanobeads were prepared by the incorporation of CdSe/ZnS QDs with mesoporous silica to use as the optical probe for detecting toxic and bio- materials with high sensitivity, CdSe/ZnS core/shell QDs were synthesized from the precursors such as CdO and zinc stearate with the lower toxicity than pyrotic precursors. The QD-nanobeads were characterized by transmission electron microscopy, FL microscopy, UV-Vis and PL spectroscopy, respectively.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.7
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• pp.551-556
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• 2001

In this work, the recovery of etching damage in the etched PZT thin film with $O_2$ annealing has been studied. The PZT thin films were etched as a function of Cl$_2$/Ar and additive CF$_4$ into Cl$_2$(80%) /Ar(20%). the etch rates of PZT thin films were 1600$\AA$/min at Cl$_2$(80%)/Ar(20%) and 1970 $\AA$/min at 30% additive Cf$_4$ into Cl$_2$(80%)/Ar(20%). In order to recover the characteristics of etched PZT thin films, the etched PZT thin films were annealed in $O_2$ atmosphere at various temperatures. From the hysteresis curves, ferroelectrical properties are improved by $O_2$ annealing process. The improvement of ferroelectric behavior is consistent with the increase of the (100) and (200) PZT phase revealed by x-ray diffraction (XRD). From x-ray photoelectron spectroscopy (XPS) analysis, intensities of Pb-O, Zr-O and Ti-O peak increase and the chemical residue peak is reduced by $O_2$ annealing. From the atomic force microscopy (AFM) images. it shows that the surface morphology of re-annealed PZT thin films after etching is improved.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.640-643
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• 2004

유도결합형 플라즈마는 낮은 가스 압력에서도 고밀도의 플라즈마를 발생시키기 때문에 무전극 램프에 많이 적용되고 있다. 그리고 무전극 램프는 장 수명을 실현하고 고품질의 빛을 발생하기 때문에 앞으로 광범위하고 다양한 장소에 사용이 예상된다. 본 논문에서는 유도결합형 플라즈마를 이용한 아르곤 가스의 방전 특성 중에서 색 좌표 특성을 살펴보았다. 즉, 외부 안테나에 의해 발생된 13.56[MHz]의 RF Power를 방전관 내부로 전달하고, 아르곤 가스 압력과 RF Power 변화에 따른 아르곤 가스의 방전 특성을 측정하였다. 또한, 유도결합형 플라즈마를 방전시키기 위한 아르곤 가스의 압력은 1[mTorr]에서 100[mTorr], RF 전력은 10[W]에서 120[W]이며 이의 색 좌표 특성과 스펙트럼을 살펴보았다. 측정 결과 RF 출력이 증가하면 색 좌표의 x, y 값이 동시에 감소하였다. 아르곤 가스 압력이 증가하면 농도의 증가로 인해 발광이 어려웠으며, 색 좌표 특성은 압력이 증가하면서 y 값은 변화가 적었으나 x 값이 100[mTorr]일 크게 증가하는 현상이 나타났다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.10
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• pp.873-877
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• 2007

In order to apply a complex multilayer chip LC filter, this study has estimated the interfacial reaction and coupling properties of dielectric materials $Pb(Fe_{1/2}Nb_{1/2})O_3$ and Ni-Zn-Cu ferrite materials through low-temperature co-sintering (LTCS). PFN powders were fabricated using double calcinated at $700^{\circ}C$ and then $850^{\circ}C$. While the perovskite phase rate was found to be 91 %, after heat treatment at $900^{\circ}C$ for 6h, the perovskite phase rate and density exhibited a value of 100 % and 7.46$g/cm^3$, respectively. The PFN/Ni-Zn-Cu ferrite, PFN/CUO (or $Pb_2Fe_2O_5$) and ferrite/CuO (or $Pb_2Fe_2O_5$) were mechanically coupled through interfacial reactions after the specimen was co-sintered at $900^{\circ}C$ for 6 h. No intermediate layer exists for the mutual coupling reaction. This result indicates the possibility of low-temperature co-sintering without any interfacial reaction layer for a multilayer chip LC filter.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.8
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• pp.645-649
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• 2009

We investigated the effects of a high density $O_2$ plasma treatment on the structural and electrical properties of Ga-, B- codoped ZnO (GZOB) films. The GZOB films were deposited on polymer substrate without substrate heating by DC magnetron sputtering. Prior to the GZOB film growth, we treated a polymer substrate with highly dense inductively coupled oxygen plasma. The optical transmittance of the GZOB film, about 80 %, was maintained regardless of the plasma pre-treatment. The resistivity of the GZOB film on PC substrate decreased from 9.08 ${\times}$ $10^{-3}$ ${\Omega}-cm$ without an $O_2$ plasma pre-treatment to 2.12 ${\times}$ $10^{-3}$ ${\Omega}-cm$ with an $O_2$ plasma pre-treatment. And PES substrate decreased from 1.14 ${\times}$ $10^{-2}$ ${\Omega}-cm$ without an $O_2$ plasma pre-treatment to 6.13 ${\times}$ $10^{-3}$ ${\Omega}-cm$ with an $O_2$ plasma pre-treatment.

• Journal of computational fluids engineering
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• v.21 no.1
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• pp.43-49
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• 2016

Thermal cracking is commonly modeled as plug flow reaction, neglecting the lateral gradients present. In this paper, 2-dimensional computational fluid dynamics including turbulence model and molecular reaction scheme are carried out. This simulation is solved by means of coupled implicit scheme for stable convergence of solution. The reactor is modeled as an isothermal tube, whose length is 1.2 m and radius is 0.01 m, respectively. At first, The radial profile of velocity and temperature at each point are predicted in its condition. Then the bulk temperature and conversion curve along the axial direction are compared with other published data to identify the reason why discussed variations of properties are important to product yield. Finally, defining a new non-dimensional number, Effect of interaction with turbulence, heat transfer and chemical reaction are discussed for design of thermal cracking furnace.