• Title/Summary/Keyword: copper layer

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Study on the Effects of Corrosion Inhibitor According to the Functional Groups for Cu Chemical Mechanical Polishing in Neutral Environment (중성 영역 구리 화학적 기계적 평탄화 공정에서의 작용기에 따른 부식방지제의 영향성 연구)

  • Lee, Sang Won;Kim, Jae Jeong
    • Korean Chemical Engineering Research
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    • v.53 no.4
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    • pp.517-523
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    • 2015
  • As the aluminum (Al) metallization process was replaced with copper (Cu), the damascene process was introduced, which required the planarization step to eliminate over-deposited Cu with Chemical Mechanical Polishing (CMP) process. In this study, the verification of the corrosion inhibitors, one of the Cu CMP slurry components, was conducted to find out the tendency regarding the carboxyl and amino functional group in neutral environment. Through the results of etch rate, removal rate, and chemical ability of corrosion inhibitors based on 1H-1,2,4-triazole as the base-corrosion inhibitor, while the amine functional group presents high Cu etching ability, carboxyl functional group shows lower Cu etching ability than base-corrosion inhibitor which means that it increases passivation effect by making strong passivation layer. It implies that the corrosion inhibitor with amine functional group was proper to apply for 1st Cu CMP slurry owing to the high etch rate and with carboxyl functional group was favorable for the 2nd Cu CMP slurry due to the high Cu removal rate/dissolution rate ratio.

Self-Assembly of Vanadium Borophosphate Cluster Anions: Synthesis and Structures of (NH4)(C2H10N2)5.5[Cu(C2H8N2)2]3[V2P2BO12]6·17H2O and (NH4)(C2H10N2)3.5[Cu(C2H8N2)2]5[V2P2BO12]6·18H2O

  • Jung, Kyung-Na;Cho, Yoon-Suk;Yun, Ho-Seop;Do, Jung-Hwan
    • Bulletin of the Korean Chemical Society
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    • v.26 no.8
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    • pp.1185-1189
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    • 2005
  • Two new copper vanadium borophosphate compounds, $(NH_4)(C_2H_{10}N_2)_{5.5}[Cu(C_2H_8N_2)_2]_3[V_2P_2BO_{12}]_6{\cdot}17H_2O,\;Cu-VBPO1\;and\;(NH_4)(C_2H_{10}N_2)_{3.5}[Cu(C_2H_8N_2)_2]_5[V_2P_2BO_{12}]_6{\cdot}18H_2O$, Cu-VBPO2 have been hydrothermally synthesized and characterized by single crystal X-ray diffraction, thermogravimetric analysis, IR spectroscopy, and elemental analysis. The structure of Cu-VBPO1 contains a layer anion, {$[Cu(C_2H_8N_2)_2]_3[V_2P_2BO_{12}]_6$}$^{12-}$, whereas Cu-VBPO2 has an open framework anion, {$[Cu(C_2H_8N_2)_2]_5[V_2P_2BO_{12}]_6$}$^{8-}$. Crystal Data: $(NH_4)(C_2H_{10}N_2)_{5.5}[Cu(C_2H_8N_2)_2]_3[V_2P_2BO_{12}]_6{\cdot}17H_2O$, monoclinic, space group I2/m (no. 12), $\alpha$ = 15.809(1) $\AA$, b = 31.107(2) $\AA$, c = 12.9343(8) $\AA$, $\beta$ = 104.325(1)$^{\circ}$, Z = 2; $(NH_4)(C_2H_{10}N_2)_{3.5}[Cu(C_2H_8N_2)_2]_5[V_2P_2BO_{12}]_6{\cdot}18H_2O$, tetragonal, space group $P4_2$/mnm (no.136), $\alpha$ = 26.832(1) $\AA$, c = 18.021(1) $\AA$, Z = 4.

Problem Analysis and Improvement of an Experiment on Reactivityof Metals in ChemistryⅠ (화학Ⅰ 금속의 반응성 실험의 문제점 분석 및 개선방안)

  • Seong, Suk-kyoung;Choi, Chui-Im;Jeong, Dae-Hong
    • Journal of the Korean Chemical Society
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    • v.53 no.3
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    • pp.368-376
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    • 2009
  • In this study we investigated and tried to understand problems monitored in an experiment on reactivity of metals in chemistry I. Three problems were discussed. First, the reason that aluminium plate does not react with other metal ions such as zinc, iron and copper was studied and the way to overcome this problem was suggested. Second, the reason that the bubbles were generated when FeS$O_4$(aq) and Zn(s) react was discussed. Third, the precipitates which appeared in the reaction of FeS$O_4$(aq) and Zn(s) were identified. Through reference study and experimental investigation, we could reach the following results. First, aluminium could not react with other metal ions due to the surface oxide layer that is formed very fast and prevents aluminium from reacting with metal ions in solution. This problem could be overcome by allowing a competing reaction of acid and aluminium during the reaction of aluminium and metal ions. Second, the observed bubbles were identified to be hydrogen gas, produced by the reaction between metals and hydronium ion in the solution. Third, black precipitates that were produced on the surface of zinc plate and exhibited magnetic property were characterized to be $Fe_3O_4$(s), and brown precipitates that were produced in the solution phase were to be $Fe_2O_3$(s) by the analysis of X-ray photoelectron spectra.

Studies on the Interfacial Reaction between electroplated Eutectic Pb/Sn Flip-Chip Solder Bump and UBM(Under Bump Metallurgy) (전해 도금법을 이용한 공정 납-주석 플립 칩 솔더 범프와 UBM(Under Bump Metallurgy) 계면반응에 관한 연구)

  • Jang, Se-Yeong;Baek, Gyeong-Ok
    • Korean Journal of Materials Research
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    • v.9 no.3
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    • pp.288-294
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    • 1999
  • In the flip chip interconnection using solder bump, the Under Bump Metallurgy (UBM) is required to perform multiple functions in its conversion of an aluminum bond pad to a solderable surface. In this study, various UBM systems such as $Al 1\mu\textrm{m} / Ti 0.2\mu\textrm{m} / Cu 5\mu\textrm{m}, Al 1\mu\textrm{m} / Ti 0.2\mu\textrm{m} / Cu 1\mu\textrm{m}, al 1\mu\textrm{m}/Ni 0.2\mu\textrm{m} / Cu 1\mu\textrm{m} and Al 1\mu\textrm{m}/Pd 0.2\mu\textrm{m} / Cu 1\mu\textrm{m}$ for flip chip interconnection using the low melting point eutectic 63Sn-37Pb solder were investigated and compared to their metallurgical properties. $100\mu\textrm{m}$ size bumps were prepared for using an electroplating process. The effects of the number of reflows and aging time on the growth of intermetallic compounds(IMC) were investigated. $Cu_6Sn_5$ and $Cu_3Sn$ IMC were abserved after aging treatment in the UBM system with thick coper $(Al 1\mu\textrm{m}/Ti 0.2\mu\textrm{m}/Cu 5\mu\textrm{m})$. However only the $Cu_6Sn_5$ was detected in the UBM system with $1\mu\textrm{m}$ thick copper even after 2 reflow and 7 day aging at $150^{\circ}C$. Complete Cu consumption by Cu-Sn IMC growth gives rise to a direct contact between solder inner layer such as Ti, Ni and Pd, and hence to possibly cause reactions between two of them. In this study, however, only for the Pd case, IMC of PdSn. was observed by Cu consumption. UBM interfacial reactions with s이der affected the adhesion strength ot s이der balls after s이der reflow and annealing treatment.

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Synthesis and biological evaluation of diagnostic reagent for prostate cancer using copper-64 radioisotope

  • Ahn, Heesu;Kim, Mi Hyun;Han, Sang Jin;Woo, Sang Keun;Kim, Jung Young;Lee, Kyu Chul;Lim, Il Han;Lee, Yong Jin
    • Journal of Radiopharmaceuticals and Molecular Probes
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    • v.4 no.2
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    • pp.65-72
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    • 2018
  • Prostate specific membrane antigen (PSMA) is a cell surface membrane protein, which is overexpressed in most prostate cancer. Recently, PET imaging with $[^{68}Ga]$PSMA-HBED-CC has been widely used for the diagnosis of recurrent prostate cancer and the studies on the diagnostic potential of $^{64}Cu$-labeled PSMA ligands reported actively. In this study, we monitored with biological evaluation in vivo and PET imaging of $^{64}Cu$-labeled PSMA ligand ($[^{64}Cu]$PSMA-617). The radiolabelling efficiency and stability of $[^{64}Cu]$PSMA-617 were confirmed by radio-thin layer chromatography. The radiolabeling efficiency of $[^{64}Cu]$PSMA-617 showed over 95%, and stabilities of intact remained over 98% in both human and mouse serum for 48 h. In normal male mice, in vivo uptake of $[^{64}Cu]$PSMA-617 in several organs was measured at 2, 4, 6, 24, 48 h after injection. Rapid blood clearance was observed for $[^{64}Cu]$PSMA-617. The high uptake was observed in the lung, liver, intestines and kidneys at 2 h postinjection, but was low in the other organs (1-2 %ID/g) at 4 h. The dynamic PET/CT images of 22RV1 tumor-bearing nude mice were acquired during 60 min and additionally acquired 24 h and 48 h after injection. In dynamic PET images, $[^{64}Cu]$PSMA-617 uptake ratio in tumors versus muscle was increased as time elaplsed until 60 minutes and remained in tumors at 48 h. In these results, the PET/CT imaging using $[^{64}Cu]$PSMA-617 in prostate cancer is expected to be useful for the diagnosis and treatment of prostate cancer patients.

Effects of Ar/N2 Two-step Plasma Treatment on the Quantitative Interfacial Adhesion Energy of Low-Temperature Cu-Cu Bonding Interface (Ar/N2 2단계 플라즈마 처리에 따른 저온 Cu-Cu 직접 접합부의 정량적 계면접착에너지 평가 및 분석)

  • Choi, Seonghun;Kim, Gahui;Seo, Hankyeol;Kim, Sarah Eunkyung;Park, Young-Bae
    • Journal of the Microelectronics and Packaging Society
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    • v.28 no.2
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    • pp.29-37
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    • 2021
  • The effect of Ar/N2 two-step plasma treatment on the quantitative interfacial adhesion energy of low temperature Cu-Cu bonding interface were systematically investigated. X-ray photoelectron spectroscopy analysis showed that Ar/N2 2-step plasma treatment has less copper oxide due to the formation of an effective Cu4N passivation layer. Quantitative measurements of interfacial adhesion energy of Cu-Cu bonding interface with Ar/N2 2-step plasma treatment were performed using a double cantilever beam (DCB) and 4-point bending (4-PB) test, where the measured values were 1.63±0.24 J/m2 and 2.33±0.67 J/m2, respectively. This can be explained by the increased interfacial adhesion energy according phase angle due to the effect of the higher interface roughness of 4-PB test than that of DCB test.

Research of Diffusion Bonding of Tungsten/Copper and Their Properties under High Heat Flux

  • Li, Jun;Yang, Jianfeng
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2011.05a
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    • pp.14-14
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    • 2011
  • W (tungsten)-alloys will be the most promising plasma facing armor materials in highly loaded plasma interactive components of the next step fusion reactors due to its high melting point, high sputtering resistance and low deuterium/tritium retention. The bonding technology of tungsten to Cu alloy was one of the key issues. In this paper, W/CuCrZr diffusion bonding has been performed successfully by inserting pure metal interlay. The joint microstructure, interfacial elements migration and phase composition were analyzed by SEM, EDS, XRD, and the joint shear strength and micro-hardness were investigated. The mock-ups were fabricated successfully with diffusion bonding and the cladding technology respectively, and the high heat flux test and thermal fatigue test were carried out under actively cooling condition. When Ni foil was used for the bonding of tungsten to CuCrZr, two reaction layers, Ni4W and Ni(W) layer, appeared between the tungsten and Ni interlayer with the optimized condition. Even though Ni4W is hard and brittle, and the strength of the joint was oppositely increased (217 MPa) due primarily to extremely small thicknesses (2~3 ${\mu}m$). When Ti foil was selected as the interlayer, the Ti foil diffused quickly with Cu and was transformed into liquid phase at $1,000^{\circ}C$. Almost all of the liquid was extruded out of the interface zone under bonding pressure, and an extremely thin residual layer (1~2 ${\mu}m$) of the liquid phase was retained between the tungsten and CuCrZr, which shear strength exceeded 160 MPa. When Ni/Ti/Ni multiple interlayers were used for bonding of tungsten to CuCrZr, a large number of intermetallic compound ($Ni_4W/NiTi_2/NiTi/Ni_3T$) were formed for the interdiffusion among W, Ni and Ti. Therefore, the shear strength of the joint was low and just about 85 MPa. The residual stresses in the clad samples with flat, arc, rectangle and trapezoid interface were estimated by Finite Element Analysis. The simulation results show that the flat clad sample was subjected maximum residual stress at the edge of the interface, which could be cracked at the edge and propagated along the interface. As for the rectangle and trapezoid interface, the residual stresses of the interface were lower than that of the flat interface, and the interface of the arc clad sample have lowest residual stress and all of the residual stress with arc interface were divided into different grooved zones, so the probabilities of cracking and propagation were lower than other interfaces. The residual stresses of the mock-ups under high heat flux of 10 $MW/m^2$ were estimated by Finite Element Analysis. The tungsten of the flat interfaces was subjected to tensile stresses (positive $S_x$), and the CuCrZr was subjected to compressive stresses (negative $S_x$). If the interface have a little microcrack, the tungsten of joint was more liable to propagate than the CuCrZr due to the brittle of the tungsten. However, when the flat interface was substituted by arc interfaces, the periodical residual stresses in the joining region were either released or formed a stress field prohibiting the growth or nucleation of the interfacial cracks. Thermal fatigue tests were performed on the mock-ups of flat and arc interface under the heat flux of 10 $MW/m^2$ with the cooling water velocity of 10 m/s. After thermal cycle experiments, a large number of microcracks appeared at the tungsten substrate due to large radial tensile stress on the flat mock-up. The defects would largely affect the heat transfer capability and the structure reliability of the mock-up. As for the arc mock-up, even though some microcracks were found at the interface of the regions, all microcracks with arc interface were divided into different arc-grooved zones, so the propagation of microcracks is difficult.

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Conceptual Design of Constructed Wetlands to Treat Acid Mine Drainage from the Dalsung W-CU Mine, Korea (달성중석광산(達城重石鑛山) 산성폐수(酸性廢水) 처리(處理)를 위(爲)한 인공소택지(人工沼澤池) 개념(槪念) 설계(設計))

  • Hong, Yong-Kook;Filipek, L.;Na, Hyun-Joon
    • Economic and Environmental Geology
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    • v.29 no.1
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    • pp.65-75
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    • 1996
  • Sulfate reduction and the precipitation of metal sulfides may have great potential to improve water quality of mine effluents in wetland treatment systems. Laboratory experiments using sulfate reducing bacteria (SRB) and limestone to treat effluents from the abandoned Dalsung tungsten-copper mine show that encouraging results, that have been attributed to sulfate reduction. Fe, Al, Cd, Cu and Zn are reduced to below detection limits with $99{\sim}100%$ metal removal rates, Mn is reduced by at least 90% to below 8.0 mg/l, and the pH is raised from 5.12 to 7.60 after 53 days of experiments. In the staged design, laboratory experiments are initiated to determine what would be reasonable substrate materials for remediation of the mine effluents. A substrate mixture containing 70% oak compost and 30% mushroom compost maintains $0.03{\sim}0.04mM$ of lactate, which provides good condition for the SRB granule. A downflow SRB wetland system is proposed as follows : 1) The lower part of the treatment system consists with a 25 cm thick layer of high quality (above 95% of $CaCO_3$) of limestone; 2) The geotextile (geonet) is recommended to be spread on the limestone bed to prevent clogging the limestones with the substrates; 3) The mixture of substrates with 70% oak and 30% spent mushroom composts, and SRB granules overlain on top of the geonet with 25 cm height. The sizes of the passive treatment systems are calculated according to metal loading and permeability criteria : 1) $220m^3$ ($15{\times}15{\times}1m$) for -1 level effluents; 2) $28m^3$ ($5.3{\times}5.3{\times}1m$) for -2 level; and 3) $2700m^3$ ($52{\times}52{\times}1m$) for the -3 level. The -3 level system needs to be broken down into 5 to 15 cells.

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The Stability Appraisement on Cultural Property Material with the Replacing Fumigation Gas of Methyl Bromide (Methyl Bromide를 대체하는 훈증 가스의 문화재 재질 안정성 평가)

  • Kang, Dai-Ill
    • Journal of Conservation Science
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    • v.25 no.3
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    • pp.283-291
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    • 2009
  • Methyl Bromide that was used as fumigation gas turned out to be the substance of destroying the ozone layer. For that reason, at the Montreal Protocol in 1987 the use of methyl bromide was forbidden starting 2005 in the advanced country. Also according to the 2007 Bali Protocolly methyl bromide is expected to be forbidden and therefore the purpose of this study is to find out the effects of substitution fumigation gas (Ethylene Oxide+HFC 134a, Methyl Iodide, Cyanogen and Argon) on the metal(silver, copper and iron), wood(oregon pine), pigment(yellow, red, blue, white and black), textile(hemp, ramie, jute, silk1 and silk2 / indigo, safflower and cork) and paper. After the fumigation test, ethylene oxide+HFC 134a did not have changes in the weight and color of the material itself before and after the experiment. On exterior alteration, color change occurred partly on paper and metal. Also, in most materials color change extent was 0.5 to 1.5 on the average and showed scanty difference. The materials after the fumigation test with methyl iodide did not show weight changes after the test. However, color changes more than 1.0 was shown in most of the materials especially in dyed textile material. In blue pigment, the discoloration on the surface could be seen by naked eyes. Fumigation test with cyanogen gas did not show weight changes and discoloration is more than 1.5 before and after the test. The weight changes of test materials with the argon gas was decreased about 3 to 6%. It can be observed that discoloration on paper was generated. Color changes can be seen on jute dyed with safflower and cork for two weeks with argon gas and the extent was 6.3 and 6.0.

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Vertical Distribution and Contamination of Trace Metals in Sediments Within Hoidong Reservoir (회동저수지 호저퇴적물의 미량원소 오염 및 수직적 분산특성)

  • Lee, Pyeong-Koo;Kang, Min-Ju;Youm, Seung-Jun;Lee, Wook-Jong
    • Economic and Environmental Geology
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    • v.40 no.5
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    • pp.587-604
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    • 2007
  • In order to investigate the vertical variations and speciations of trace elements, and their correlations in Hoidong reservoir, sediment cores (21-41 cm below surface) and interstitial water samples were collected from five sampling locations. The total average concentrations of trace metals in sediment core samples were $232{\pm}30.8mg/kg$ for Zn, $119{\pm}272mg/kg$ for Cu, $58.4{\pm}4.1mg/kg$ for Pb, $15.7{\pm}3.3mg/kg$ for Ni and $1.6{\pm}0.3mg/kg$ for Cd. The total concentrations of trace metals in core sediments generally decreased toward the center of the Hoidong reservoir. The total concentrations of Mn, Pb and Zn decreased with depth for all the sample locations, while Cu and Fe concentrations increased. The trace metal concentrations of interstitial water sample were in the order of Fe>Mn>Cu>Zn, but Cd, Ni and Pb were not detected. The concentrations of Zn, Cu, Fe and Mn in the interstitial water samples showed a tendency of increasing toward the bottom of the core, suggesting a possible upward diffusion. This migration of trace metals may lead to their transfer to the sediment-water interface. These trace elements would be subsequently fixed onto amorphous Fe and Mn-oxides and carbonates in the topmost layer of sediment. Based on the $K_D$ values, the relative mobilities of the studied metals were in the order of Mn>Cu>Zn>Fe. Geochemical partitioning confirmed that surface enrichment by trace metals mainly resulted from a progressive increase of the concentrations in the fractions II and III. Copper, Fe, Mn and Zn concentrations of interstitial water were closely correlated with their exchangeable fractions of sediments.