• 제목/요약/키워드: contact resistivity

검색결과 257건 처리시간 0.029초

Fully Cu-based Gate and Source/Drain Interconnections for Ultrahigh-Definition LCDs

  • Kugimiya, Toshihiro;Goto, Hiroshi;Hino, Aya;Nakai, Junichi;Yoneda, Yoichiro;Kusumoto, Eisuke
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.1193-1196
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    • 2009
  • Low resistivity interconnection and high-mobility channel are required to realize ultrahigh-definition LCDs such as 4k ${\times}$ 2k TVs. We evaluated fully Cu-based gate and Source/Drain interconnections, consisting of stacked pure-Cu/Cu-Mn layers for TFT-LCDs, and found the underlying Cu-Mn alloy film has superior adhesion to glass substrates and CVD-SiOx films. It was also confirmed that wet etching of the Cu/Cu-Mn films without residues and low contact resistance with both channel IGZO and pixel ITO films can be obtained. It is thus considered that the stacked Cu/Cu-Mn structure is one of candidates to replacing conventionally pure-Cu/refractory metal.

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수분열화에 의한 에폭시절연재료의 표면특성에 관한 연구 (A Study on the Surface Properties of Epoxy Insulator by Water Degradation)

  • 임경범;이백수;김종택;정무영;황명환;이덕출
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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    • pp.199-202
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    • 1998
  • In examining application of polymer as electrical insulators, it is very important to perform accelerated aging test substituted the process which polymer insulator is degraded for long-time by the process of short-time. The purpose of this paper is to examine the properties of water degradation which affect on the efficiency of epoxy insulator. To do this, the surface properties on epoxy insulating material have been investigated after long-time accelerated degradation in boiling water condition. The experimental results showed the contact angle and surface resistivity after treatment to decrease the sample of water treatment. In dielectric properties, dielectric constant was increased by the aging development with water treatments.

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입자분산이 Ni-CNT 복합도금막의 특성에 미치는 영향 (Effect of Particle Dispersion on Physical Properties of Ni-CNT Composite Coatings)

  • 천영훈;배규식
    • 반도체디스플레이기술학회지
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    • 제10권2호
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    • pp.91-95
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    • 2011
  • Ni-CNT(carbon nanotubes) composite coating is often used for the surface treatment of electronic/mechanical devices to improve the properties of the exisiting Ni electroplating. For this, the dispersion of CNT particle is a critical process. In this study, ball milling and additive called sodium dodecyl sulfate(SDS) are employed for dispersion. Electroplated Ni-CNT films were examined by SEM-EDX, AES, microhardness tester, 4-point probe and contact angle measurement to find the optimum dispersion conditions. Ni-CNT coatings formed by ball milling for 9 hrs and with addition of SDS 12 times of CNT contents showed the highest hardness, reasonable resistivity and non-stick characteristics.

Bi-2223 초전도선재의 상전도- 및 초전도-접합부 특성평가 (Characterization of resistive-and supercodncuting-joint of Bi-2223 superconductor tape)

  • 김정호;지봉기;박형상;임준형;오승진;주진호;황보훈;나완수
    • 한국전기전자재료학회논문지
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    • 제13권3호
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    • pp.247-253
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    • 2000
  • We evaluated the electric properties of Bi-2223 jointed tapes processed by both resistive-and superconducting-joint methods. For resistive-joint. filler materials of wood metal Pb/Sn. In and silver paste were used whereas for superconductive-joint lap joint method was used. In the resistive joint tape. critical transport property(CCR) n-value and contact resistance were observed to be in the range of 10-85% 1-8,9. and 0.71x10$\^$-6/-0.13x10$\^$-6/Ω, respectively. depending on their filler materials. Specifically it is believed that the electrical properties of resistive joint tape are significantly related to the resistivity of filler materials. On the other hand the CCR of superconductin joint type was varied 55 to 85% with uniaxial pressure probably due to the irregular microstructure in the transition region.

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접지봉 설치에 따른 전주 주변의 전위분포 (Potential Distribution near Concrete Pole According to the position of Ground Rod)

  • 이복희;정현욱;최종혁;조성철;백영환;이규선;안창환
    • 한국조명전기설비학회:학술대회논문집
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    • 한국조명전기설비학회 2006년도 춘계학술대회 논문집
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    • pp.342-346
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    • 2006
  • This paper describes ground surface potential rises and touch voltage. The more soil resistivity of upper layer is lower, the more ground surface potential rise is increased. Ground surface potential rise is increased as the buried depth of ground rod in lowered. Ground surface potential rises were measured in the test site and compared with results by CDEGS program. Touch voltages according to the separation distance of ground rod were measured in four directions. Touch voltages were remarkably changed by separation distance and contact position.

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Electrical, Optical, and Electrochemical Corrosion Resistance Properties of Aluminum-Doped Zinc Oxide Films Depending on the Hydrogen Content

  • Cho, Soo-Ho;Kim, Sung-Joon;Jeong, Woo-Jun;Kim, Sang-Ho
    • 한국표면공학회지
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    • 제51권2호
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    • pp.116-125
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    • 2018
  • Aluminum-doped zinc oxide (AZO) is a commonly used material for the front contact layer of chalcopyrite $CuInGaSe_2$ (CIGS) based thin film solar cells since it satisfies the requisite optical and electrical properties with low cost and abundant elemental availability. Low-resistivity and high-transmission front contacts have been developed for high-performance CIGS solar cells, and nearly meet the required performance. However, the durability of the cell especially for the corrosion resistance of AZO films has not been studied intensively. In this work, AZO films were prepared on Corning glass 7059 substrates by radio frequency magnetron sputtering depending on the hydrogen content. The electrical and optical properties and electrochemical corrosion resistance of the AZO films were evaluated as a function of the hydrogen content. With increasing hydrogen content to 6 wt%, the crystallinity, crystal size, and surface roughness of the films increased, and the resistivity decreased with increased carrier concentration, Hall mobility, oxygen vacancies, and $Zn(OH)_2$ binding on the AZO surface. At a hydrogen content of 6 wt%, the corrosion resistance was also relatively high with less columnar morphology, shallow pore channels, and lower grain boundary angles.

Morphological Structural and Electrical Properties of DC Magnetron Sputtered Mo Thin Films for Solar Cell Application

  • Fan, Rong;Jung, Sung-Hee;Chung, Chee-Won
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.389-389
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    • 2012
  • Molybdenum is one of the most important materials used as a back ohmic contact for $Cu(In,Ga)(Se,S)_2$ (CIGS) solar cells because it has good electrical properties as an inert and mechanically durable substrate during the absorber film growth. Sputter deposition is the common deposition process for Mo thin films. Molybdenum thin films were deposited on soda lime glass (SLG) substrates using direct-current planar magnetron sputtering technique. The outdiffusion of Na from the SLG through the Mo film to the CIGS based solar cell, also plays an important role in enhancing the device electrical properties and its performance. The structure, surface morphology and electrical characteristics of Mo thin films are generally dependent on deposition parameters such as DC power, pressure, distance between target and substrate, and deposition temperature. The aim of the present study is to show the resistivity of Mo layers, their crystallinity and morphologies, which are influenced by the substrate temperature. The thickness of Mo films is measured by Tencor-P1 profiler. The crystal structures are analyzed using X-ray diffraction (XRD: X'Pert MPD PRO / Philips). The resistivity of Mo thin films was measured by Hall effect measurement system (HMS-3000/0.55T). The surface morphology and grain shape of the films were examined by field emission scanning electron microscopy (FESEM: Hitachi S-4300). The chemical composition of the films was obtained by the energy dispersive X-ray spectroscopy (EDX). Finally the optimum substrate temperature as well as deposition conditions for Mo thin films will be developed.

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이중층 몰리브데늄을 후면전극으로 적용한 비진공법 CuInSe2 태양전지의 특성 (Characterization of Non-vacuum CuInSe2 Solar Cells Deposited on Bilayer Molybdenum)

  • 황지섭;윤희선;장윤희;이장미;이도권
    • Current Photovoltaic Research
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    • 제8권2호
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    • pp.45-49
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    • 2020
  • Molybdenum (Mo) thin films are widely used as back contact in copper indium diselenide (CISe) solar cells. However, despite this, there are only few published studies on the properties of Mo and characteristics of CISe solar cells formed on such Mo substrates. In this studies, we investigated the properties of sputter deposited Mo bilayer, and fabricated non-vacuum CISe solar cells using bilayer Mo substrates. The changes in surface morphology and electrical resistivity were traced by varying the gas pressure during deposition of the bottom Mo layer. In porous surface structure, it was confirmed that the electrical resistivity of Mo bilayer was increased as the amount of oxygen bonded to the Mo atoms increased. The resulting solar cell characteristics vary as the bottom Mo layer deposition pressure, and the maximum solar cell efficiency was achieved when the bottom layer was deposited at 7 mTorr with a thickness of 100 nm and the top layer deposited at 3 mTorr with a thickness of 400 nm.

Mo 기판위의 NaF 중간층을 이용한 Cu(In,Ga)Se2 광흡수층의 Na 도핑특성에 관한 연구 (Na Doping Properties of Cu(In,Ga)Se2 Absorber Layer Using NaF Interlayer on Mo Substrate)

  • 박태정;신동협;안병태;윤재호
    • 한국재료학회지
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    • 제19권8호
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    • pp.452-456
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    • 2009
  • In high-efficiency Cu(In,Ga)$Se_2$ solar cells, Na is doped into a Cu(In,Ga)$Se_2$ light-absorbing layer from sodalime-glass substrate through Mo back-contact layer, resulting in an increase of device performance. However, this supply of sodium is limited when the process temperature is too low or when a substrate does not supply Na. This limitation can be overcome by supplying Na through external doping. For Na doping, an NaF interlayer was deposited on Mo/glass substrate. A Cu(In,Ga)$Se_2$ absorber layer was deposited on the NaF interlayer by a three-stage co-evaporation process As the thickness of NaF interlayer increased, smaller grain sizes were obtained. The resistivity of the NaF-doped CIGS film was of the order of $10^3{\Omega}{\cdot}cm$ indicating that doping was not very effective. However, highest conversion efficiency of 14.2% was obtained when the NaF thickness was 25 nm, suggesting that Na doping using an NaF interlayer is one of the possible methods for external doping.

자체-센서와 미세 작동기를 위한 CNT/PVDF 및 ITO/PVDF 나노복합재료의 전기적 및 계면 내구성 비교 평가 (Interfacial Durability and Electrical Properties of CNT or ITO/PVDF Nanocomposites for Self-Sensor and Micro Actuator)

  • 구가영;왕작가;권동준;박종만
    • Composites Research
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    • 제24권6호
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    • pp.12-17
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    • 2011
  • 자체-센서와 미세 작동기 응용을 위한 CNT와 ITO로 코팅된 나노복합재료의 계면접착 내구성과 전기적 특성을 평가하였다. 나노복합재료의 접착 및 계면 내구성은 반복하중 피로시험에 따른 전기저항도를 측정하여 평가하였다. CNT와 ITO의 고유 전기적 특성으로 인하여 CNT가 코팅된 PVDF 나노복합재료는 ITO가 코팅된 경우보다 다소 낮은 전기저항도를 나타내었으나, 모두 양호한 자체-감지능을 보여주었다. CNT/PVDF와 ITO/PVDF 나노복합재료 모두 계면 내구성은 양호함을 확인하였다. 정적 접촉각 시험을 통해 CNT와 ITO 그리고 PVDF간의 표면에너지, 접착일, 그리고 퍼짐계수를 평가하여 계면 내구성과 의 상호 관련성을 확인하였다. 수용액에서 CNT와 ITO로 코팅된 PVDF 시편의 최적의 작동성은 주파수와 전압을 달리하여 레이져 변위센서를 사용한 연신율 변화로 측정하였다. 작동된 두 나노복합재료들의 연신율은 주파수가 증가함에 따라 감소하며, 반면에 전압의 증가에 따라 상승하였다. 각 나노복합재료의 나노구조 및 고유의 전기적 특성으로 인하여, CNT/PVDF가 ITO/PVDF 보다 자체-감지 및 작동기로서 더 적합하다는 것을 알 수 있었다.