• Tribology and Lubricants
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• 제32권2호
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• pp.61-66
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• 2016

Total thickness variation (TTV), BOW, and surface roughness are essential characteristics for high quality sapphire substrates. Many researchers have attempted to increase removal rate by controlling the key process parameters like pressure and velocity owing to the high cost of consumables in sapphire chemical mechanical polishing (CMP). In case of the pressure approach, increased pressure owing to higher deviation of pressure over the wafer leads to significant degradation of the TTV. In this study, the authors focused on reducing TTV under the high-pressure conditions. When the production equipment polishes multiple wafers attached on a carrier, higher loads seem to be concentrated around the leading edge of the head; this occurs because of frictional force generated by the combination of table rotation and the height of the gimbal of the polishing head. We believe the skewed pressure distribution during polishing to be the main reason of within-wafer non-uniformity (WIWNU). The insertion of a hub ring between the polishing head and substrate carrier helped reduce the pressure deviation. Adjusting the location of the hub ring enables tuning of the pressure distribution. The results indicated that the position of the hub ring strongly affected the removal profile, which confirmed that the position of the hub ring changes the pressure distribution. Furthermore, we analyzed the deformation of the head via finite element method (FEM) to verify the pressure non-uniformity over the contact area Based on experiment and FEM results, we determined the optimal position of hub ring for achieving uniform polishing of the substrate.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2001년도 제33회 춘계학술대회 개최
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• pp.374-381
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• 2001

Surface roughness plays a significant role in friction, wear, and lubrication in machine components. Most engineering surfaces have tile nogaussian height distrubution. So, in this study, elastic-plastic contact simulations are conducted for not only gaussian surfaces but also nongaussian surfaces. Nongaussian rough surface considering the kurtosis is generated numerically. The contact simulation model takes into account the plastic deformation behaviors of asperities by setting a celing on their contact pressure at material hardness value. It will be shown that the performace variables such as real contact area fraction, plastic area fraction and average gap are sensitive to the characteristics of surface geometry according to kurtosis.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 춘계학술대회논문집A
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• pp.381-386
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• 2000

The brake force of drum brakes for commercial vehicles is applied by a s-cam. First of all the influence of the s-cam load angles and elastic modulus of the pad on the contact pressure distribution between pad and drum was checked by using 3 dimensional finite element model. In the second part, temperature and thermal stress analyses were carried out by an axisymmetric model with constant heat flux and pressure-proportional heat flux. In the case of temperature analysis the heat conduction from the interface to the pad and the drum was modeled using a thin soft film element, so artificial division of the generated heat flux between pad and drum is not necessary. The analysis was performed by ABAQUS/Standard code.

• 한국전산구조공학회:학술대회논문집
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• 한국전산구조공학회 1997년도 가을 학술발표회 논문집
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• pp.87-94
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• 1997

The circular plate resting on Boussinesq's half-space model under axisymmetric loading is studied by a finite element procedure to evaluate the distribution of contact pressure between plate and elastic half-space. The displacement of half-space due to axisymmetric surface loading can be evaluated by double integration of Boussinesq's solution. On that case the analytical integration can be executed for the radial direction but the analytical integration for the circumferential direction is impossible and the numerical integration should be considered. With the radial integration we can get non-dimensional function. Then the numerical integration for the formula is executed for the circumferential direction and the results are approximated 5th order Polynomials by using the least square method. With these 5th order approximate formula, the flexibility matrix of half-space is constructed as the coefficient matrix of nodal contact pressure by the finite element procedures. Iteration procedures are attempted by using this method to determine the separated region.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2007년도 춘계학술대회
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• pp.149-156
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• 2007

Non-contact transportation of the large-sized glass plate using air-cushion is considered for sputtering system of LCD panel. The Argon gas from second gas injection holes is injected to levitate and transport the glass plate. Low maximum pressure and uniform pressure distribution on the bottom surface of the glass plate must be maintained for stable levitation and transportation of the glass plate. Therefore, the analysis of fluid flow between the glass plate and the air-pad is numerically performed for varying space between the injection holes in this study. The pressure uniformity on the bottom surface of the glass plate is evaluated for overall glass plate. The distance between the injection holes must be designed below 90 mm for obtaining the low maximum pressure and uniform pressure distribution.

• 대한인간공학회지
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• 제11권2호
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• pp.23-33
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• 1992

The distribution of the pressure between the sole of a feet and a supporting surface can reveal the information about the structure and fonction of the foot and the posural control of the whole body. In particular, the measurement of the vertical contact forces between the plantar surface of the foot and the shoe insole is of great importance to reveal the loading distributio patterns incurred from a particular shoe midsole design. In order to investigate the plantar surface pressure distribution, an insole-type sensor with a piezoelectric material is developed and tested. The present paper describes a new method to completely reduce both the shear force and pyroelectric effects that are normally caused from piezoelectric materials.

• 한국자동차공학회논문집
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• 제18권5호
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• pp.68-75
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• 2010

The one of the major problems in the development of PEMFC was regarding to the assurance of sealing on stack. The failure on the sealing creates the problems of fuel leakage, mixing, internal combustion, damage on parts and can be a direct reason for the degrading the efficiency of fuel cell. This paper studies on the analytical approach for improving the contacting pressure distribution on the gasket at the evaluation on the sealing of fuel cell stack. So, the assembly analysis on multi layered fuel cell stack was performed. The research on the simplification of finite element model was performed for three dimensional analysis at the multi layered state. The improved contact pressure distribution was obtained through the case studies on gasket for better sealing. In addition, the number of the cell was determined for the effective analysis and the structural characteristics were evaluated based on this research.

• 센서학회지
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• 제26권4호
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• pp.266-273
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• 2017

In this research a medical palpation guidance system for minimally invasive surgery (MIS) is proposed. Palpation is a useful tool for identifying a size and location of a lump during a surgery. However, conventional manual palpation is only available in open surgery, so there has been several researches about palpation assistant or guidance system for MIS. The previously developed systems are based on a pressure based or stiffness based approach. These previous approaches have some limitations in increasing complexity of the systems and lack of geometric information about the lump which is more important information for the lump removal than the stiffness information. We propose a palpation guidance system using a novel approach using contact pressure distribution. Since our approach gives the geometry information of the lump as well as the existence information, the operator can easily notice the currently identified lump region and the optimal position for the next palpation. The experiment results show that our approach can offer the geometry information of the lump correctly.

• Journal of Magnetics
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• 제22권2호
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• pp.299-305
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• 2017

Magnetic fluid, a new type of magnetic material, is a colloidal liquid constituted of nano-scale ferromagnetic particles suspended in carrier fluid. Magnetic fluid sealing is one of the most successful applications of magnetic fluid. As a new type of seal offering the advantages of no leakage, long life and high reliability, the magnetic fluid seal has been widely utilized under vacuum- and low-pressure-differential conditions. In practical applications, for improved pressure capacity, a multistage sealing structure is always used. However, in engineering applications, a uniform distribution of magnetic fluid under each tooth often cannot be achieved, which problem weakens the overall pressure capacity of the seals. In order to improve the pressure capacity of magnetic fluid seals and broaden their applications, the present study theoretically and experimentally analyzed the degree of non-uniform distribution of multistage magnetic fluid seals. A mathematical model reflecting the relationship between the pressure capacity and the distribution of magnetic fluid under a single tooth was constructed, and a formula showing the relationship between the volume of magnetic fluid and its contact width with the shaft was derived. Furthermore, the relationship of magnetic fluid volume to capacity was analyzed. Thereby, the causes of non-uniform distribution could be verified: injection of magnetic fluid; the assembly of magnetic fluid seals; the change of magnetic fluid silhouette under pressure loading; the magnetic fluid sealing mechanism of pressure transmission, and seal failure. In consideration of these causes, methods to improve the pressure capacity of magnetic fluid seals was devised (and is herein proposed).

• Journal of Biosystems Engineering
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• 제26권2호
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• pp.123-130
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• 2001

The research described in this paper was aimed toward improving the understanding of the interaction of tire inflation pressure and the soil-tire interface stresses. A three-directional stress transducer was developed to measure stress distribution on undertread for a tractor tire. The transducer can directly measure three-directional stresses (normal stress, tangental stress and lateral stress and lateral stress) simultaneously and has both strong structure and high sensitivity, which is not changed by the abrasion of the detecting plate. Measurements of soil-undertread interface stresses were made at tire center on undertread on a 12.4-R24 radial tractor tire opeated at three combinations of a dynamic load (11.8kN) and three inflation pressures (59kPa, 108kPa and 157kPa). These measurements showed that as inflation pressure increased, the soil-undertread interface stresses increased. The results of three stresses comparisons were shown that the peak normal stresses were considerably higher than the tangential peak stresses and the peak lateral stresses.