Thermal Resistance Characteristics and Fin-Layout Structure Optimization by Gate Contact Area of FinFET and GAAFET (FinFET 및 GAAFET의 게이트 접촉면적에 의한 열저항 특성과 Fin-Layout 구조 최적화)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.34 no.5
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- pp.296-300
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- 2021