• 한국정밀공학회지
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• 제20권12호
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• pp.105-114
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• 2003

In this study, a dicing machine with vision system was built and an algorithm for automatic alignment was developed for dual camera system. The system had a macro and a micro inspection tool. The algorithm was formulated from geometric relations. When a wafer was put on the cutting stage within certain range, it was inspected by vision system and compared with a standard pattern. The difference between the patterns was analyzed and evaluated. Then, the stage was moved by x, y, $\theta$ axes to compensate these differences. The amount of compensation was calculated from the result of the vision inspection through the automatic alignment algorithm. The stage was moved to the compensated position and was inspected by vision for checking its result again. Accuracy and validity of the algorithm was discussed from these data.

• 한국광학회지
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• 제15권4호
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• pp.391-396
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• 2004

인공위성용 지구관측 카메라나 우주관측 망원경에는 크기와 무게의 제약 때문에 Cassegrain 방식의 망원경이 많이 쓰인다. 이와 같은 우주광학계의 성공적인 임무수행을 위해서는 망원경부의 정밀한 광학정렬이 매우 중요하다. 본 논문에서는 정렬 정밀도에 따른 Cassegrain 방식 망원경부의 광학정렬 방법 중, 간섭무늬를 이용한 방법, 파면오차를 이용한 방법, 역최적화 광학정렬 방법 등을 모사를 통해 제시하고, 현재 개발 중인 구경 300 mm급 소형 위성용 카메라에 적용한 광학정렬 실험 결과를 정리한다.

• 한국기계가공학회지
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• 제21권3호
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• pp.100-109
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• 2022

In this study, calibration technology that increases the alignment accuracy in large flexible flat panels was studied. For precise of calibration, a systematization of the calibration algorithm was established, and a calibration correction technique was studied to revise calibration errors. A coordinate systems of camera and UVW stage was established to get the global position of the mark, and equations for translational and rotational calibration were systematically derived based on geometrical analysis. Correction process for the calibration data was carried, and alignment experiments were performed sequentially in cases of the presence or absence of calibration-correction. Alignment results of both calibration correction and non-calibration correction showed accuracy performance less than 1㎛. On the other hand, the standard deviation in calibration-correction is smaller than non-calibration correction. Therefore, calibration correction showed improvement of the alignment repeatability.

• 반도체디스플레이기술학회지
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• 제6권1호
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• pp.43-48
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• 2007

For exposure systems, very accurate alignment between the mask and the substrate is indispensable. In this paper, an automatic alignment system using machine vision for exposure systems is described. Machine vision algorithms are described in detail including extraction of an alignment mark's center position and camera calibration. Methods for extracting parameters for alignment are also presented with some compensation techniques to reduce alignment time. Our alignment system was implemented with a vision system and motion control stages. The performance of the alignment system has been extensively tested with satisfactory results. The performance evaluation shows alignment accuracy of lum within total alignment time of about $2{\sim}3$ seconds including stage moving time.

• 한국측량학회:학술대회논문집
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• 한국측량학회 2006년도 춘계학술발표회 논문집
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• pp.265-269
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• 2006

In this study, horizontal alignment of railroad obtained by digital photogrammetry method. The two-dimensional horizontal alignment was reappeared by camera calibration and digital image data. This method's result showed more satisfactory value than existing survey method in horizontal alignment of railroad. Hereafter, this method would be a appropriate method lot the decision of railroad facility' position in small rural area and construction of DB for the design of alignment.

• 항공우주기술
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• 제10권2호
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• pp.101-104
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• 2011

고해상도 전자광학 탑재체의 주 반사경과 제2 반사경 간 조립 정렬은 전체 카메라 시스템의 조립 단계 중 가장 중요한 단계이다. 제 2 반사경의 정렬에는 파면센서와 콜리메이터를 사용하였는데 간섭계 보다는 크기가 작고 다루기가 편하기 때문이다. 본 논문에서는 고해상도 전자광학 탑재체의 제 2 반사경에 대한 정렬 방법과 절차에 대해 소개 하고자 한다.

• 한국항공우주학회지
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• 제33권10호
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• pp.98-103
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• 2005

해상도 2.5m 급 지구관측 카메라인 MAC(Medium-sized Aperture Camera)의 비행모델이 정렬 및 조립되었다. 본 논문에서는 지상에서 측정한 MAC의 시스템 MTF 성능, MTF를 이용한 초점면부의 정렬 등에 대해 논의한다. 칼날주사방식을 이용하여 MAC의 시스템 MTF를 측정하였고, 이를 위해 회절한계 성능의 구경 450 mm 급의 카세그레인 시준기를 만들어 사용하였다. 시스템 MTF를 이용하여 CCD 검출기 초평면부의 최적의 초점에 정렬하였다.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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• pp.873-878
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• 2008

Doosan Mecatec has developed alignment system for Organic Light-Emitting Diode (OLED) display production using large size substrate. In the present article, The alignment system between the substrate and the mask, which is a core technology for producing the OLED product using the fourth-generation substrate with $730{\times}920mm^2$ or more, will be described by dividing into a substrate loader, a magnet unit, a CCD camera, etc. The substrate loader is optimized through the simulation where the central portion of the substrate droops by about 1.5mm by clamping each of a long side (920mm direction) and a short side (730mm direction) thereof by 6 point and 4 point. A magnet unit using a sheet type of rubber magnet is constituted and a CCD camera model with the specifications capable of minimizing the errors between a clear image and the same image is selected. The system to which an upward evaporation technique of small molecular organic materials will be applied has been developed so that repeatability and position accuracy becomes ${\pm}1{\mu}m$ or less using an UVW type of stage. Also, the vision accuracy of the CCD camera becomes ${\pm}1{\mu}m$ or less and the align process TACT becomes 30sec. or less so that the final alignment accuracy between the substrate and the mask becomes ${\pm}3{\mu}m$ or less. In order to meet an extra-large glass substrate, an evaporation system using an extra-large AMOLED substrate has been developing through a vertical type of an alignment system.

• 제어로봇시스템학회논문지
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• 제11권2호
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• pp.122-126
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• 2005

A technique for alignment to true north is presented based on synchronized measurements of vision image by a camera and output voltage of wind direction sensor. The true wind direction is evaluated by means of image processing techniques with least square sense, and then evaluated true value is compared with measured output voltage of the sensor. The uncertainty analysis about the component error for the proposed method in practical situation is performed. The proposed technique is applied to real meteorological tower (wind measuring tower) at the Daekwanryung test site. In addition, some uncertainty analysis of this method is presented.

• International Journal of Aerospace System Engineering
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• 제5권2호
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• pp.8-15
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• 2018

For small earth observation satellites, alignment between the optical components is important for precise observation. However, satellite cameras are structurally subject to misalignment in the launch environment where vibration excitations and impacts apply, and in space environments where zero gravity, vacuum, radiant heat and degassing occur. All of these variables can cause misalignment among the optical components. The misalignment among optical components results in degradation of image quality, and a re-alignment process is needed to compensate for the misalignment. This process of re-alignment between optical components is referred to as a refocusing process. In this paper, we proposed a 3 - axis focusing mechanism to perform the refocusing process. This mechanism is attached to the back of the secondary mirror and consists of three piezoelectric inertia-friction actuators to compensate the x-axis, y-axis tilt, and de-space through three-axis motion. The fabricated focus mechanism demonstrated excellent servo performance by experimenting with PD servo control.