• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.1477-1479
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• 2000

The annealing treatments on rf magnetron sputtered PZT($Pb_{1.05}(Zr_{0.52},Ti_{0.48})O_3$) thin films(4000${\AA}$) have been investigated for a structure of PZT/Pt/Ti/ITO coated glass. Crystallization properties of PZT films were strongly dependent on RTA(Rapid Thermal Annealing) annealing temperature and time. We were able to obtain a perovskite structure of PZT at 650$^{\circ}C$ and 10min. P-E curves of Pd/PZT/Pt capacitor demonstrate typical hysteresis loops. The measured values of $P_r$, $E_c$ were 15.8[${\mu}C/cm^2$], 95[kV/cm] respectively. Polarization value decrease about 10% after $10^9$ cycles.

• Bulletin of the Korean Chemical Society
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• v.33 no.7
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• pp.2305-2308
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• 2012

Perovskite structured barium titanate particles ($BaTiO_3$) platelets were synthesized by molten salt synthesis and topochemical microcrystal conversion. As the precursors of $BaTiO_3$, plate-like $BaBi_4Ti_4O_{15}$ particles were first synthesized by the reaction of $Bi_4Ti_3O_{12}$, $BaCO_3$, and $TiO_2$ at $1080^{\circ}C$ for 3 h in $BaCl_2$-KCl molten salt. After the topochemical reactions, layer-structured $BaBi_4Ti_4O_{15}$ particles transformed to the perovskite $BaTiO_3$ platelets. $BaTiO_3$ particles with thickness of approximately $0.5{\mu}m$ and a length of $10-15{\mu}m$ retained the morphology feature of the $BaBi_4Ti_4O_{15}$ precursor. For <001> $Pb(Mg_{1/3}Nb_{2/3})O_3-32.5PbTiO_3$ (PMNT)-5 wt % PbO piezoelectric ceramics textured with 5 vol % of $BaTiO_3$ templates, the Lotgering factor reached 0.82, and $d_{33}$ was 870 pC/N.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.123-123
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• 2000

선폭이 초미세화됨에 따라 게이트 전극에서의 공핍 현상 및 불순물 확산의 물제를 갖는 poly-Si 게이트를 대체할 전극 물질로 텅스텐(W)이 많이 연구되어 왔다. 반도체 소자의 배선물질로 일찍부터 사용되어온 텅스텐은 내화성 금속의 일종으로 용융점이 높고, 저항이 낮다. 그러나, 일반적으로 사용되고 있는 CVD에 의한 텅스텐의 증착은 반응가스(WF6)로부터 오는 불소(F)의 게이트 산화막내로의 확산으로 인해 MOS 소자가 크게 열화될수 있다. 본 연구에서는 W/TiN 이중 게이트 전극 구조를 갖는 MOS 캐패시터를 제작하여 전기적 특성을 살펴보았다. P-Type (100) Si위에 RTP를 이용, 85$0^{\circ}C$에서 110 의 열산화막을 성장 및 POA를 수행한 후, 반응성 스퍼터링법에 의해 상온, 6mTorr, N2/Ar=1/6 sccm, 100W 조건에서 TiN 박막을 150, 300, 500 의 3그룹으로 증착하였다. 그 위에 LPCVD 방법으로 35$0^{\circ}C$, 0.7Torr, WF6/SiH4/H2=5/5~10/500sccm 조건에서 2000~3000 의 텅스텐을 증착하였다. Photolithography 공정 및 습식 에칭을 통해 200$\mu\textrm{m}$$\times$200$\mu\textrm{m}$ 크기의 W/TiN 복층 게이트 MOSC를 제작하였다. W/TiN 복측 게이트 소자와 비교분석하기 위해 같은 조건의 산화막을 이용한 알루미늄(Al) 게이트, 텅스텐 게이트 MOSC를 제작하였다. 35$0^{\circ}C$에서 증착된 텅스텐 박막은 10~11$\Omega$/ 의 면저항을 가졌고 미소한 W(110) peak값을 나타내는 것으로 보아 비정질 상태에 가까웠다. TiN 박막의 경우 120~130$\Omega$/ 의 면저항을 가졌고 TiN (200)의 peak 값이 크게 나타난 반면, TiN(111) peak가 미소하게 나타났다. TiN 박막의 두께와 WF/SiH4의 가스비를 변화시켜가며 제작된 MOS 캐패시터를 HF 및 QS C-V, I-V 그리고 FNT를 통한 전자주입 방법을 이용하여 TiN 박막의 불소에 대한 확산 방지막 역할을 살펴 보았다. W/TiN 게이트 MOS 소자는 모두 순수 텅스텐 게이트보다 우수하였고, Al 게이트와 유사한 전기적 특성을 보여주었다. W/TiN 게이트 MOS 소자는 모두 순수 텅스텐 게이트보다 우수하였고, Al 게이트와 유사한 전기적 특성을 보여주었다. TiN 박막이 300 , 500 이고 WF6/SiH4의 가스비가 5:10인 경우 소자 특성이 우수하였으나, 5:5의 경우에는 FNT 전자주입 특성이 열화되기 시작하였다. 그리고, TiN박막의 두께가 150 으로 얇아질 경우에는 WF6/SiH4의 가스비가 5:10인 경우에서도 소자 특성이 열화되기 시작하였다. W/TiN 복층 게이트 MOS 캐패시터를 제작하여 전기적인 특성 분석결과, 순수 텅스텐 게이트 소자의 큰 저전계 누설 전류 특성을 해결할 수 있었으며, 불소확산에 영향을 주는 조건이 WF6/SiH4의 가스비에 크게 의존됨을 알 수 있었다. TiN 박막의 증착 공정이 최적화 될 경우, 0.1$\mu\textrm{m}$이하의 초미세소자용 게이트 전극으로서 텅스텐의 사용이 가능할 것으로 보여진다.

• Proceedings of the Korean Radioactive Waste Society Conference
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• 2018.11a
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• pp.379-379
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• 2018

MXenes are a new family of 2D transition metal carbide nanosheets analogous to graphene (Lv et al., 2017; Sun et al., 2018). Due to the easy availability, hydrophilic behavior, and tunable chemistry of MXenes, their use in applications for environmental pollution remediation such as heavy metal adsorption has recently been explored (Li et al., 2017). In this study, three-dimensional (3D) MXene ($Ti_3C_2T_x$) films with high adsorption capacity, good mechanical strength, and high selectivity for specific radionuclide from aquose solution were successfully fabricated by a polymeric precursor method using vacuum-assisted filtration. The highest removal efficiency on the films was 99.54%, 95.61%, and 82.79% for $Sr^{2+}$, $Co^{2+}$, and $Cs^+$, respectively, using a film dosage of 0.06 g/ L in the initial radionuclide solution (each radionuclide concentration = 1 mg/L and pH = 7.0). Especially, the adsorption process reached an equilibrium within 30 min. The expanded interlayer spacing of $Ti_3C_2T_x$ sheets in MXene films showed excellent radionuclide selectivity ($Cs^+$ and/or $Sr^{2+}/Co^{2+}$) (Simon, 2017). Besides, the MXene films was not only able to be easily retrieved from an aqueous solution by filtration after decontamination processes, but also to selectively separate desired target radionuclides in the solutions. Therefore, the newly developed MXene ($Ti_3C_2T_x$) films has a great potential for radionuclide removal from aqueous solution.

• Korean Journal of Materials Research
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• v.18 no.7
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• pp.379-383
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• 2008

We report on the light-emitting diode (LED) characteristics of core-shell CdSe/ZnS nanocrystal quantum dots (QDs) embedded in $TiO_2$thin films on a Si substrate. A simple p-n junction could be formed when nanocrystal QDs on a p-type Si substrate were embedded in ${\sim}5\;nm$ thick $TiO_2$ thin film, which is inherently an n-type semiconductor. The $TiO_2$ thin film was deposited over QDs at $200^{\circ}C$ using plasma-enhanced metallorganic chemical vapor deposition. The LED structure of $TiO_2$/QDs/Si showed typical p-n diode currentvoltage and electroluminescence characteristics. The colloidal core-shell CdSe/ZnS QDs were synthesized via pyrolysis in the range of $220-280^{\circ}C$. Pyrolysis conditions were optimized through systematic studies as functions of synthesis temperature, reaction time, and surfactant amount.

• Journal of the Korean Ceramic Society
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• v.46 no.3
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• pp.263-270
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• 2009

The effect of photoelectrocatalytic (PEC) degradation for different dyes with the CNT/$TiO_2$ electrode was studied. The prepared electrode was characterized with surface properties, structural crystallinity, elemental identification, and PEC activity. The $N_2$ adsorption data showed that the composites had decreased surface area compared with the pristine CNT. This indicated the blocking of micropores on the surface of CNT, which was further supported by observation via FESEM. XRD patterns of the composites showed that the CNT/$TiO_2$ composite contained a mixing anatase and rutile phase. EDX spectra showed the presence of C, O and Ti peaks for all samples. The decomposition efifciency of the prepared electrode was evaluated by the PEC degradation of three dyes (methylene blue (MB), rhodamine B (RH.B), methyl orange (MO)). The variations of the FT-IR spectra and pH value of dye solutions were measured during the PEC system; it was found that the CNT/$TiO_2$ electrode has better PEC degradation for MB solution than that of RH.B and MO. The proposed degradation mechanism was present.

• The korean journal of orthodontics
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• v.41 no.6
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• pp.399-410
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• 2011

Objective: The purpose of this study was to evaluate the difference in frictional resistance among metal, ceramic, self-ligation brackets and coated or non-coated Ni-Ti archwires at various bracket-archwire angulations during the sliding movement of an orthodontic archwire, using an orthodontic sliding simulation device. Methods: Four types of bracket (Micro-arch Perpect Clear2 Clippy-C and Damon3 and 5 types of orthodontic archwire (0.014", 0.016", and 0.016" ${\times}$ 0.022" inch coated Ni-Ti, and 0.016" and 0.016" ${\times}$ 0.022" inch Ni-Ti) were used. Further, the bracket- archwire angles were set at 4 different angulations: $0^{\circ}$, $3^{\circ}$, $6^{\circ}$, and $9^{\circ}$. Results: The frictions from all the experimental groups were found to be significantly increased in order of self-ligation brackets, Micro-arch and Perpect Clear2 ($p$ < 0.001). The presence of a coat had no effect on the friction of the same sized archwires at $0^{\circ}$ and $3^{\circ}$ bracket-archwire angles ($p$ < 0.001). Coated archwires had significantly higher frictions than the same sized non-coated archwires at $6^{\circ}$ and $9^{\circ}$ bracket-archwire angles ($p$ < 0.001). The frictions increased significantly as the bracket-archwire angles were increased ($p$ < 0.001). Conclusions: The use of self-ligation brackets will be beneficial in clinical situations where a low frictional force is required. Further, in cases where crowding is not severe, the use of coated archwires should not cause problems. However, more additional explanation is required considering the fact that the damage of coated archwire and exposure of the metal portion in case of binding and notching and the effects of saliva were not taken into account.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.36 no.5
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• pp.513-519
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• 2023

It was reported that a tetragonal phase can be stabilized with maintaining good piezoelectric properties when Na_0.5K_0.5NbO₃ (KNN) is modified with 0.06 mol SrTiO₃. However, such a high amount of SrTiO₃ leads not only to poor sinterability but low Curie temperature (T_C). To maintain high TC with good piezoelectric properties in KNN-based lead-free piezoelectric ceramics, this study investigates the effect of Li-doping on the dielectric and piezoelectric properties of 0.96Na_0.5K_0.5NbO₃-0.04SrTiO₃ (KNN-4ST) ceramics. As a result, the orthorhombic-tetragonal phase transition was observed at 2 mol% Li₂CO₃ modified KNN-4ST ceramics, whose T_C, d₃₃ and k_p values are 328℃, 165pC/N and 0.33, respectively.

• Progress in Superconductivity and Cryogenics
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• v.6 no.1
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• pp.12-17
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• 2004

High critical current density. $J_c$ over $1MA/cm^2$ at 77 K in a self field was successfully achieved from the YBCO film prepared on (100) $SrTiO_3$ single-crystal substrates by the TFA-MOD process. Unlike a normal TFA-MOD process, we prepared the TFA precursor solution by dissolving YBCO powder into the trifluoroacetic acid. A significant amount of the second phases, including $BaF_2$, was observed in the films fired at $700-725^{\circ}C$ for 2 h under $P(O_2)=10^{-3}$ atm and $P(H_2O)=4.2%$, most probably due to an insufficient reaction time, and hence $T_c$ was greatly degraded. However the films fired at $750-800^{\circ}C$ for 2 h were composed of strongly c-axis oriented YBCO grams without any second phases. and exhibited the $T_c$ values of 89.5 ~ 91 K with a sharp transition. With increasing the firing temperature from 750 to $800^{\circ}C$ average grain size of YBCO was increased and grain connectivity was enhanced. The highest $J_c$ value of $1.1MA/cm^2$ was obtained from the YBCO film fired at $800^{\circ}C$.

• Journal of the Korean Ceramic Society
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• v.29 no.2
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• pp.107-118
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• 1992

Alumina supports for TiO2 ultrafiltration membrane coating were prepared by presintering disk-type preforms at 140$0^{\circ}C$. These supports showed uniform microstructures which had the apparent porosity of 40%, the pore size distribution in the range of 0.1~0.5${\mu}{\textrm}{m}$, and the water flux of 1400ι/$m^2$.h at the pressure difference of 10 atm. The optimum pH and concentration of the TiO2 sol for coating were 0.8 and 1.0 wt%, respectively, and sol particles were identified as rutile forms of 20 nm size. Crack-free alumina-supported rutile TiO2 membranes could be prepared through well controlled drying and heating the gel layer coated by the sol-gel dipping. The pore size of the TiO2 membranes heat-treated at 50$0^{\circ}C$ for 2 hrs was 30~80$\AA$, and their thickness varied from 1.1 to 3.8 ${\mu}{\textrm}{m}$ in accordence with the dipping time (4~40 min). The flux of water through this composite membrane at 10 atm was found to be in the range from 800 to 1100ι/$m^2$.hr depending on the dipping time (10~40 min). The membrane thickness increased linearly with the square root of the dipping time and the slope was 0.62 ${\mu}{\textrm}{m}$/{{{{ SQRT { min} }}.