Effects of the Gas Atmosphere of ZnO Buffer Layers in the ZnO films grown on Si Substrates by RF Magnetron Sputtering (RF 스퍼터링으로 Si 기판위에 제작된 ZnO 박막에서 ZnO 버퍼층의 가스분위기 영향)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.18 no.7
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- pp.656-661
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- 2005