Fabrications and Properties of MFIS Structures using high Dielectric AIN Insulating Layers for Nonvolatile Ferroelectric Memory (고유전율 AIN 절연층을 사용한 비휘발성 강유전체 메모리용 MFIS 구조의 제작 및 특성)
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- Journal of the Institute of Electronics Engineers of Korea SD
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- v.38 no.11
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- pp.765-770
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- 2001