• 센서학회지
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• 제14권5호
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• pp.308-312
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• 2005

We present a microfluidic chip designed for the detection of antibody by using quantum dots fluorescence and a microbead-based assay. A custom designed PDMS microfluidic chip with multi-layer channel is utilized for capturing microbeads; antibody injection into each micro-well; QD injection; and fluorescence detection. The experiment using the fabricated microfluidic chip has been performed on solutions with various concentrations of antibody and has shown correlated fluorescent intensities.

• 센서학회지
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• 제18권3호
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• pp.207-209
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• 2009

This paper describes the characteristics of poly 3C-SiC micro resonators with $3{\times}10^{17}{\sim}1{\times}10^{19}cm^{-3}$ doping concentrations. The 1.2 ${\mu}m$ thick cantilever and the 0.4 ${\mu}m$ thick doubly clamped beam resonators with different lengths were fabricated using poly 3C-SiC thin films. The characteristics of poly 3C-SiC micro resonators were evaluated by quartz and a laser vibrometer in vacuum at room temperature. The resonant frequencies of micro resonators decreased with doping concentrations owing to reduction in the Young's modulus of poly 3C-SiC thin films. It was confirmed that the resonant frequencies of poly 3C-SiC resonators are controllable by doping concentrations. Therefore, poly 3C-SiC resonators could be applied to MEMS devices and bio/chemical sensor applications.

• 센서학회지
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• 제17권6호
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• pp.425-428
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• 2008

This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The $1{\mu}m$ thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the $100{\sim}40{\mu}m$ long cantilevers, the fundamental frequency appeared at $147.2kHz{\sim}856.3kHz$. The $100{\mu}m$ and $80{\mu}m$ long cantilevers have second mode resonant frequency at 857.5.kHz and 1.14.MHz, respectively. Therefore, polycrystalline 3C-SiC resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.359-360
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• 2007

In this paper, the elastic modulus and hardness of poly 3C-SiC thin films growed by APCVD were measured using nanoindentation test. The resulting values of elastic modulus E and hardness H of the poly 3C-SiC film are 305 GPa and 26 GPa, respectively. The mechanical properties of the poly 3C-SiC film are better than bulk Si wafers. Therefore, the poly 3C-SiC thin film is suitable for abrasion resistance, high frequency, and bio MEMS applications.

• 한국기계가공학회지
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• 제17권5호
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• pp.111-116
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• 2018

Thermal fusion bonding is a method to enclose open microchannels fabricated on polymer chips for use in lab-on-a-chip (LOC) devices. Polymethyl methacrylate (PMMA) is utilized in various biomedical-microelectromechanical systems (bio-MEMS) applications, such as medical diagnostic kits, biosensors, and drug delivery systems. These applications utilize PMMAs biochemical compatibility, optical transparency, and mold characteristics. In this paper, we elucidate both the conformational entanglement of PMMA molecules at the contact interfacial regime, and the qualitative nature of the thermal fusion bonding phenomena through systematic molecular dynamics simulations.

• Bulletin of the Korean Chemical Society
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• 제32권4호
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• pp.1298-1302
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• 2011

This study describes the development of an electrochemical array immunochip for the detection of IgG. Interdigitated immunochip platforms were fabricated by sputtering gold on a glass wafer by using MEMS process and then were coated with Eudragit S100, an enteric polymer, forming an insulating layer over the working area of immunochips. The breakdown of the polymer layer was exemplified by the catalytic action of urease which, in the presence of urea, caused an alkaline pH change. This subsequently caused an increase of the double layer capacitance of the underlying electrode. Used in conjunction with a competitive immunoassay format, this allowed the ratio of initial to final electrode capacitance to be directly linked with the concentration of analyte, i.e. IgG. Responses to IgG could be detected at IgG concentration as low as $250\;ngmL^{-1}$ and showed good linearity up to IgG concentration as high as $20\;{\mu}gmL^{-1}$.

• 대한기계학회논문집A
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• 제31권10호
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• pp.986-992
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• 2007

This paper presents the fabrication and characterization of carbon films pyrolyzed with various photoresists for bioMEMS applications. To verify the usefulness of pyrolyzed carbon films as an electrode material in an electrochemical biosensor developed by the authors, interactions between avidin and biotin on the pyrolyzed carbon film were studied via electrochemical impedance spectroscopy based on electrostatic interactions between avidin and negatively-charged ferricyanide. The pyrolyzed carbon films were characterized using a surface profiler, a precision semiconductor parameter analyzer, a nanoindentor, scanning electron microscopy, and atomic force microscopy. Amine conjugated biotin was immobilized on the electrode using EDC/NHS as crosslinkers after $O_2$ plasma treatment to enhance functional groups on the carbon electrode pyrolyzed at $1000^{\circ}C$ with AZ9260. The detection of avidin binding with different concentrations in a range of 0.75 nM to $7.5\;{\mu}M$ to the pyrolyzed carbon electrode modified with biotin was carried out by measuring the electrochemical impedance change. The results show that avidin binds to the biotin on the electrode not by non-specific interaction but by specific interaction, and that EIS successfully detects this binding event. Pyrolyzed carbon films are a promising material for miniaturization, integration, and low-cost fabrication in electrochemical biosensors.

• Current Research on Agriculture and Life Sciences
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• 제32권3호
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• pp.159-163
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• 2014

본 논문에서는 저가의 MEMS 관성 센서와 지자기 센서를 이용하여 자세 정보를 제공받는 자세측정장치(ARHS)를 구현하였다. 저가형 IMU센서와 MCU를 이용하여 운동 자세각을 계산하는 DCM 알고리즘을 설계하고, 3축짐벌에 장착하여 연산결과의 정확도를 측정하였다. DCM 알고리즘을 이용 연산된 자세각의 정확도는 roll 및 pitch에 대하여 약 1.1%로 나타났으며, yaw각의 경우는 3.7%로 나타났다. Yaw 각의 경우에는 스텝핑 모터를 구동하는 실험환경에 따른 교란의 영향으로 그 오차가 상대적으로 크게 나타난 것으로 평가되었다. 짐벌 실험장치를 이용한 센서의 검증에서 더욱 정밀한 실험을 위해서는 주변 환경 요인에 대한 제어가 요구될 것으로 보이며, 실험장치의 스테핑 모터 구동 시 발생하는 진동 및 자기장의 영향과 실험 장치의 금속성 구조물의 영향으로 생각되는 센서 데이터의 오차 및 불안정 상태를 차단할 수 있는 장치의 보완이 필요할 것으로 보인다. 그리고 지자기 센서의 경우 좁은 범위의 측정에 추가하여 넓은 범위의 측정도 보완되어야 할 것으로 생각된다.

• 대한기계학회논문집A
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• 제36권5호
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• pp.475-479
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• 2012

본 논문은 고차가지구조 폴리머인 AEO3000 를 이용한 UV 광경화 성형 공정을 제안하고자 한다. 이는 기존의 바이오칩 제작에 사용되는 PDMS 보다 경도가 높아 금속 전극 형성이 용이하고 제작 공정이 빠르다는 장점을 갖는다. AEO3000 을 이용하여 본 연구에서는 4 개의 소자를 전기적 유체적으로 연결할 수 있는 전기유체 통합벤치를 제작하고 미소유체 혼합소자와 세포분리소자를 연결, 본 소재와 공정이 바이오칩에 적용될 수 있음을 검증하였다. 전기 유체적 특성 분석 결과 전기적 접촉 저항은 $0.75{\pm}0.44{\Omega}$으로 충분히 작은 값을 보였으며, 유체 접속의 압력 저하는 8.3kPa로 기존의 튜브 연결 방법 대비 39.3% 개선된 값을 보였다. 통합벤치에 접속된 소자에 활성 및 비활성 효모를 주입하여 순차적인 혼합 및 재분리를 성공적으로 구현함으로써 본 소자에 적용된 AEO3000 및 UV 광경화 공정이 생체시료의 처리에 적용될 수 있음을 실험적으로 검증하였다. 이는 바이오 의료 분야에 적용 가능한 생체 친화적 소재의 고속 생산에 응용될 수 있다.

• 대한의용생체공학회:의공학회지
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• 제28권3호
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• pp.348-354
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• 2007

Polymer actuators, which are also called as smart materials, change their shapes when electrical, chemical, thermal, or magnetic energy is applied to them and are useful in wide variety of applications such as microelectromechanical systems (MEMS), machine components, and artificial muscles. For this study, Polyaniline/carbon-nanotube polymer actuator that is one of electroactive polymer actuators was prepared. Since the nonlinear phenomena of hysteresis and a step response are essential considerations for practical use of polymer actuators, we have investigated the movement of the Polyaniline/carbon-nanotube polymer actuator and have developed an integrated model that can be used for simulating and predicting the hysteresis and a step response during actuation. The Preisach hysteresis model, one of the most popular phenomenological models of hysteresis, were used for describing the hysteretic behavior of Polyaniline/carbon-nanotube polymer actuator while the ARX method, one of system identification techniques, were used for modeling a step response. In this paper, we first expain details in preparation of the Polyaniline/carbon-nanotube polymer then present the mathematical description of our model, the extraction of the parameters, simulation results from the model, and finally a comparison with measured data.