• Title/Summary/Keyword: bias effect

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Improvement of 170 etching uniformity in a large area plasma source (대면적 플라즈마 소스에서의 ITO 식각균일도 향상)

  • 김진우;조수범;김봉주;박세근;오범환
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11a
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    • pp.145-148
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    • 2001
  • A large area plasma source using parallel 2x2 ICP antennas showed improved etching uniformity by the E-ICP operation. ITO etching process with CH$_4$ gas chemistry is optimized with the DOE(Design of Experiment) based on Taguchi method. Various methane ratios in methane and argon mixture are compared to confirm the effect of polymerization. The analysis shows that the effect of bias power is the largeset. We obtained higher ITO etching rate and better uniformity on 350x300mm substrate at the 50Hz magnetization frequency of the E-ICP operation technique.

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The effect of plamsa treatment on superconformal copper gap-fill

  • Mun, Hak-Gi;Kim, Seon-Il;Park, Yeong-Rok;Lee, Nae-Eung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.249-249
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    • 2010
  • The effect of forming a passivation layer was investigated in superconformal Cu gap-filling of the nano-scale trench with atomic-layer deposited (ALD)-Ru glue layer. It was discovered that the nucleation and growth of Cu during metal-organic chemical vapor deposition (MOCVD) were affected by hydrogen plasma treatments. Specifically, as the plasma pretreatment time increased, Cu nucleation was suppressed proportionally. XPS and Thermal Desorption Spectroscopy indicated that hydrogen atoms passivate the Ru surface, which leads to suppression of Cu nucleation owing to prevention of adsorption of Cu precursor molecules. For gap-fill property, sub 60-nm ALD Ru trenches without the plasma pretreatment was blocked by overgrown Cu after the Cu deposition. With the plasma pretreatment, superconformal gap filling of the nano-scale trenches was achieved due to the suppression of Cu nucleation near the entrances of the trenches. Even the plasma pretreatment with bottom bias leads to the superconformal gap-filling.

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Etching characteristics of BST thin films for microwave application (초고주파 응용을 위한 BST 박막의 식각 특성)

  • Kim, Gwan-Ha;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07b
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    • pp.834-837
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    • 2004
  • BST thin films were etched with inductively coupled $CF_4(C1_2+Ar)$ Plasmas. The maximum etch rate of the BST thin films was 53.6 nm/min for a 10 % $CF_4$ to the $Cl_2/Ar$ gas mixture at RF power of 700 W, DC bias of -150 V, and chamber pressure of 2 Pa. Small addition of $CF_4$ to the $Cl_2/Ar$ mixture increased chemical effect. Consequently, the increased chemical effect caused the increase in the etch rate of the BST thin films. To clarify the etching mechanism, the surface reaction of the BST thin films was investigated by X-ray photoelectron spectroscopy.

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The Effect of Herbal Medicine for Adenomyosis patients: A Systematic Review (자궁선근증에 대한 한약의 효과 : 체계적 문헌 고찰)

  • Jung, Jae-Woong;Yoon, Young-Jin
    • The Journal of Korean Obstetrics and Gynecology
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    • v.32 no.4
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    • pp.87-101
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    • 2019
  • Objectives: The purpose of this study is to investigate the effect of herbal medicine during the Western medicine therapy in adenomyosis. Methods: The author searched 5 electronic databases and search keywords were 'Adenomyosis' and 'Herbal Medicine'. We included randomized controlled clinical trials (RCTs) using herbal medicine therapy combined Western medicine for adenomyosis patients. Results: The author selected 12 studies. The systematic review of the 12 trials indicated that herbal medicine therapy integrated Western medicine therapy was more effective than Western medicine therapy alone. Conclusions: The herbal medicine therapy combined Western medicine for adenomyosis patients seems to improve pain relief and improvement of illness from this research. However, this result should be taken cautiously by unclear risk of bias. More clinical research will be needed to standardize the results of this study through herbal medicine.

Study of Wave Load Nonlinearity Effect On Fatigue Life in Component Stochastic Fatigue Analysis

  • Han Sungkon;Park Kyung-Won;Shin Hyun-Il;Heo Joo-Ho
    • Journal of Ship and Ocean Technology
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    • v.9 no.4
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    • pp.11-22
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    • 2005
  • This paper addresses details of wave load nonlinearity effect on stress RAO and damage ratio using component stochastic fatigue analysis. Traditional spectral fatigue analysis for ship structure is based on linear theory; however, there are a number of nonlinearity sources. Especially loading nonlinearity, such as hydrodynamic pressure applying to ship side and gravity changes due to roll and pitch motion, is thought to critically violate the linearity assumption of spectral fatigue analysis, which involves stress RAO as linear parameter. The main focus is placed on how to idealize complicated characteristics of loading nonlinearity and how to implement the nonlinear bias to linear spectral fatigue analysis.

Path analysis of the suicidal ideation of Korean adults

  • Yoon, Chae-Min;An, Hye-Gyung
    • International Journal of Advanced Culture Technology
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    • v.7 no.1
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    • pp.103-111
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    • 2019
  • This study attempted to test the path model that can predict Korean adult suicidal ideation. The subjects were 459 adults aged between 19 and 64 who agreed to this study among quota sampled by the population, sex, and region of the metropolitan city. The path model of collected data was estimated using SPSS 24.0 program and AMOS 22.0. The results of the bias-corrected percentile method for verifying the significance of the mediator effect of the final model showed that suicidal attitude, depression, and stress were found to be mediating effects of health status on suicidal ideation. Suicide attitude and stress were found to mediate the effects of health status on depression. And the effect of drinking on depression was mediated by stress. This result is expected to be used as a practical basis for the development of suicide prevention and intervention programs for adults in the future.

Investigation of Trap-Assisted-Tunneling Mechanism in L-Shaped Tunneling Field-Effect-Transistor at Low Bias (L형 터널 트랜지스터의 트랩-보조-터널링 현상 조사)

  • Najam, Faraz;Yu, Yun Seop
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2019.05a
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    • pp.475-476
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    • 2019
  • L-shaped tunneling field-effect-transistor (LTFET) is considered a superior device over conventional TFETs. However, experimentally demonstrated LTFET demonstrated poor subthreshold characteristics which was attributed to trap-assisted-tunneling (TAT) caused by presence of trap states. In this paper, TAT mechanism in the experimentally demonstrated LTFET is investigated with the help of band diagram and TAT recombination rate (GTAT).

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A meta-analysis on the correlation of factors related to major satisfaction of paramedic students (응급구조(학)과 학생의 전공만족도 관련 요인에 관한 연구)

  • Min-Ju Kang;Mi-Young Choi;Jeong-Mi Ju
    • The Korean Journal of Emergency Medical Services
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    • v.27 no.1
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    • pp.31-41
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    • 2023
  • Purpose: This study was conducted to analyze variables related to paramedic students' major satisfaction comprehensively and present development plans to improve major satisfaction. Methods: Five studies were selected for analysis. The overall average effect size, effect sizes for each related variable, and publication bias were analyzed using Comprehensive Meta-Analysis (CMA) version 2.0 (Biostat, Englewood, NJ, USA). Results: Various known variables related to major satisfaction were found to have little correlation, and paramedic students' major satisfaction were highly correlated variables, such as major commitment (ES=.781), and department adaptation (ES=.722). Conclusion: Research should be continuously conducted to examine additional variables correlated with the major satisfaction of paramedic students.

The Effects of Collective Leadership on Creative Behavior: Mediating Effect of Organizational-Based Self-Esteem Moderated by Psychological Safety (집합적 리더십이 창의적 행동에 미치는 영향: 심리적 안전감에 의해 조절된 조직기반 자긍심의 매개효과를 중심으로)

  • Oh, Ho-June;Shin, Je-Goo
    • The Journal of the Korea Contents Association
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    • v.18 no.1
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    • pp.623-641
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    • 2018
  • The goal of this study is to verify the effectiveness of collective leadership. Specifically, we examine the direct effect of collective leadership on creative behavior and how this relationship is affected indirectly by organization-based self-esteem. Further, we identify the conditional indirect effect psychological safety has in moderating this mechanism. To minimize the common method bias, job rank and the affectivity in work situations were set as control variables. After excluding ten univariate outliers from 319 responses that were collected, a total of 309 samples were used for analysis. Our findings showed that collective leadership has a positive effect on the creative behavior of organization members, and that organization-based self-esteem played the role as partial mediator in the relationship between collective leadership and creative behavior. Also, the conditional indirect effect of psychological safety was found to be significant in the 'high' and 'very high' percentile levels, but not in the 'very low,' 'low,' and 'middle' levels. Together, the findings imply that when leaders at organizations promote members' organization-based self-esteem and creative behavior through collective leadership, it can be more effective when members feel high psychological safety in the organization.

The Effects of Whole Body Vibration Exercise on Balance and Gait Ability in Stroke Patients: A meta-analysis (전신진동운동이 뇌졸중 환자의 균형 및 보행 능력에 미치는 효과: 메타분석)

  • Cho, Woon-Su;Park, Se-Ju;Hyun, Ji-Woong
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.22 no.5
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    • pp.171-179
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    • 2021
  • This study was a meta-analysis of previous studies that subjected stroke patients to the whole-body vibration exercise, in an attempt to evaluate the effectiveness of such exercise in improving their balance and walking ability. The electronic databases used for literature search were the National Assembly Library, Korean Educational Academic Information (RISS), Korean Academic Information (KISS), and Nuri Media (DBPIA). We also investigated a prior study of the whole-body vibration exercise applied to stroke patients from January 2010 to August 2020. In assessing the quality of the study, the RCT (randomized controls trials) study used the risk of bias 2 (RoB2) tool developed by the Cochrane group. Meta-analysis was performed using R software for statistical computing version 4.0.3. The results of the study confirmed that the overall effect size was 0.40, and the whole-body vibration exercise used had a moderate effect on the balance and gait of stroke patients, the effect size of balance was 0.44, and the effect size of gait was 0.36, showing a positive effect. These results indicated that the whole-body vibration exercise is an effective intervention for stroke patients, and further research is needed.