Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.07b
- /
- Pages.834-837
- /
- 2004
Etching characteristics of BST thin films for microwave application
초고주파 응용을 위한 BST 박막의 식각 특성
- Kim, Gwan-Ha (Chung-Ang University) ;
-
Kim, Chang-Il
(Chung-Ang University)
- Published : 2004.07.05
Abstract
BST thin films were etched with inductively coupled