• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.436-437
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• 2012

Double patterning technology (DPT) has been suggested as a promising candidates of the next generation lithography technology in FLASH and DRAM manufacturing in sub-40nm technology node. DPT enables to overcome the physical limitation of optical lithography, and it is expected to be continued as long as e-beam lithography takes place in manufacturing. Several different processes for DPT are currently available in practice, and they are litho-litho-etch (LLE), litho-etch-litho-etch (LELE), litho-freeze-litho-etch (LFLE), and self-aligned double patterning (SADP) [1]. The self-aligned approach is regarded as more suitable for mass production, but it requires precise control of sidewall space etch profile for the exact definition of hard mask layer. In this paper, we propose etch end point detection (EPD) in spacer etching to precisely control sidewall profile in SADP. Conventional etch EPD notify the end point after or on-set of a layer being etched is removed, but the EPD in spacer etch should land-off exactly after surface removal while the spacer is still remained. Precise control of real-time in-situ EPD may help to control the size of spacer to realize desired pattern geometry. To demonstrate the capability of spacer-etch EPD, we fabricated metal line structure on silicon dioxide layer and spacer deposition layer with silicon nitride. While blanket etch of the spacer layer takes place in inductively coupled plasma-reactive ion etching (ICP-RIE), in-situ monitoring of plasma chemistry is performed using optical emission spectroscopy (OES), and the acquired data is stored in a local computer. Through offline analysis of the acquired OES data with respect to etch gas and by-product chemistry, a representative EPD time traces signal is derived. We found that the SE-EPD is useful for precise control of spacer etching in DPT, and we are continuously developing real-time SE-EPD methodology employing cumulative sum (CUSUM) control chart [2].

• Journal of Conservation Science
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• v.36 no.5
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• pp.326-332
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• 2020

The this study's objective was to conduct species identification and tree-ring dating for the wood elements of Daewoong-jeon(main temple), Hwagye-temple, Seoul, Korea. Most of the wood elements were made from Pinus spp.(hard pine). However, one large beam was constructed from Abies spp.. For the tree-ring dating, cores were taken from the elements using a drill, and ring-width plots of individual samples were produced with the TSAP software program. The tree-ring dating results showed that, the date of the outermost ring of most elements (20 elements), including beams and pillars, were from AD 1839 to 1870. Among them, five elements had bark, and felling dates were AD 1868 and 1869. These dates confirmed the historical records that Daewoongjeon was rebuilt in AD 1870 from the records of hidden materials(Bokjangmul) in Jongdori by the survey 2012.

• Journal of Korean Society of Coastal and Ocean Engineers
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• v.7 no.2
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• pp.198-208
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• 1995

Combining Iwan-Blevin's model into the approximated form of the nonlinear model derived for the dynamic analysis of the riser system with the inclusion of internal flow, current-vortex model is developed to investigate the effect of internal flow on vortex-induced vibration due to inline current The riser system includes a steadly flow inside the pipe which is modeled as an extensible or inextensible tubular beam. Galerkin's finite element approximation are implemented to derive the matrix equation of equilibrium for the finite element system. The investigations of the effect of internal flow on vibration due to inline current are performed according to the change of various parameters such as top tension, infernal flow velocity. current velocity, and so on. It is found that the effect of internal flow on vibration due to vortex shedding can be controlled by the increase of top tension. However, careful consideration has to be given, in design point in order to avoid the resonance band occurding near vortex shedding frequency, particularly for the long riser.

• Journal of Sensor Science and Technology
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• v.26 no.4
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• pp.235-238
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• 2017

In this study, the design of a tri-axis micromachined gyroscope is proposed and the vibration characteristic of the structure is analyzed. Tri-axis vibratory gyroscopes that utilize Coriolis effect are the most commonly used micromachined inertial sensors because of their advantages, such as low cost, small packaging size, and low power consumption. The proposed design is a single structure with four proof masses, which are coupled to their adjacent ones. The coupling springs of the proof masses orthogonally transfer the driving vibrational motion. The resonant frequencies of the gyroscope are analyzed by finite element method (FEM) simulation. The suspension beam spring design of proof masses limits the resonance frequencies of four modes, viz., drive mode, pitch, roll and yaw sensing mode in the range of 110 Hz near 21 kHz, 21173 Hz, 21239 Hz, 21244 Hz, and 21280 Hz, respectively. The unwanted modes are separated from the drive and sense modes by more than 700 Hz. Thereafter the drive and the sense mode vibrations are calculated and simulated to confirm the driving feasibility and estimate the sensitivity of the gyroscope. The cross-axis sensitivities caused by driving motion are 1.5 deg/s for both x- and y-axis, and 0.2 deg/s for z-axis.

• Proceedings of the Korean Society of Laser Processing Conference
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• 2006.06a
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• pp.16-24
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• 2006

Silicon Nitride ($Si_3N_4$), which is widely used in a variety of applications, is hard-to-machine due to its high hardness. At high temperature (e.g. above $1000^{\circ}C$), however, the machinability can be greatly improved. In this work, we used a $CO_2$ laser with a high absorptivity to $Si_3N_4$ of 0.9 to locally heat the surface of a rotating $Si_3N_4$ rod on a lathe. In order to examine the effects of the laser-assisted heating on hardness, an $Si_3N_4$ md is heated to temperatures from 900 to $1800^{\circ}C$ and is rotated at speeds from 440-900 rpm in experiments. When the rod is naturally cooled to room temperature, we measured the Victors hardness (Hv): and observed the surface of HAZ using a scanning electron microscopy (SEM). Energy dispersive spectroscopy(EDS) was used for ingredient analysis. Results showed that when heated at $1600^{\circ}C$, the hardness of $Si_3N_4$ decreased from 1500 Hv to 1000 Hv. Also, in order to predict the depth of HAZ, we numerically analyzed the laser-assisted heating of $Si_3N_4$.

• Transactions of the Society of Information Storage Systems
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• v.2 no.4
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• pp.224-229
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• 2006

There has been studied flow to minimize the spot size to increase data capacity. Optical data storage devices are being developed near practical limits with wavelength and NA of 405nm and 0.85. There has been studied many types of next generation storage devices such as blu-ray multilayer system, probe based data storage and holographic data storage. Among these data storage devices, solid immersion lens(SIL) based near field recording (NFR) has been widely studied. In this system, SIL is the key component that focuses the laser beam with a very small size which enables ultra high data capacity. Therefore, optical performance evaluation system is required for SIL assembly. In this dissertation, a simple and accurate SIL assembly measurement method is proposed with wedge plate lateral shearing interferometer(LSI). Wedge plate LSI is cheaper than commercialized interferometer, robust to the vibration and the moving distance for phase shifting is large that is order of micrometer. We designed the thickness, wedge angle, material, surface quality and wavelength of wedge plate as 1mm, 0.02degree, fused silica, lamda/10(10-5) and 405nm, respectively. Also, we confirmed simulation and experimental results with quantitative analysis. This simple wedge plate LSI can be applied to different types of SIL such as solid immersion mirror(SIM), hemispherical, super-hemispherical and elliptical SIL.

• Journal of Periodontal and Implant Science
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• v.50 no.3
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• pp.146-158
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• 2020

Purpose: The aim of this study was to investigate and identify the main causes of periodontal tissue change associated with labial gingival recession by examining the anterior region of patients who underwent orthodontic treatment. Methods: In total, 45 patients who had undergone orthodontic treatment from January 2010 to December 2015 were included. Before and after the orthodontic treatment, sectioned images from 3-dimensional digital model scanning and cone-beam computed tomography images in the same region were superimposed to measure periodontal parameters. The initial labial gingival thickness (IGT) and the initial labial alveolar bone thickness (IBT) were measured at 4 mm below the cementoenamel junction (CEJ), and the change of the labial gingival margin was defined as the change of the distance from the CEJ to the gingival margin. Additionally, the jaw, tooth position, tooth inclination, tooth rotation, and history of orthognathic surgery were investigated to determine the various factors that could have affected anterior periodontal tissue changes. Results: The mean IGT and IBT were 0.77±0.29 mm and 0.77±0.32 mm, respectively. The mean gingival recession was 0.14±0.57 mm. Tooth inclination had a significant association with gingival recession, and as tooth inclination increased labially, gingival recession increased by approximately 0.2 mm per 1°. Conclusions: In conclusion, the IGT, IBT, tooth position, tooth rotation, and history of orthognathic surgery did not affect labial gingival recession. However, tooth inclination showed a significant association with labial gingival recession of the anterior teeth after orthodontic treatment.

• Computers and Concrete
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• v.26 no.1
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• pp.75-94
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• 2020

The aim of this research is to investigate free vibration of a novel five layer Timoshenko microbeam which consists of a transversely flexible porous core made of Al-foam, two graphen platelets (GPL) nanocomposite reinforced layers to enhance the mechanical behavior of the structure as well as two piezo-magneto-electric face sheets layers. This microbeam is subjected to a thermal load and resting on Pasternak's foundation. To accomplish the analysis, constitutive equations of each layer are derived by means of nonlocal strain gradient theory (NSGT) to capture size dependent effects. Then, the Hamilton's principle is employed to obtain the equations of motion for five layer Timoshenko microbeam. They are subsequently solved analytically by applying Navier's method so that discretized governing equations are determined in form of dynamic matrix giving the possibility to gain the natural frequencies of the Timoshenko microbeam. Eventually, after a validation study, the numerical results are presented to study and discuss the influences of various parameters such as nonlocal parameter, strain gradient parameter, aspect ratio, porosity, various volume fraction and distributions of graphene platelets, temperature change and elastic foundation coefficients on natural frequencies of the sandwich microbeam.

• Journal of the Earthquake Engineering Society of Korea
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• v.3 no.2
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• pp.9-18
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• 1999

The seismic over-strength factor Ω is evaluated for 4-story reinforced concrete buildings in Korea, which has low seismic intensity. For this study, the seismic load suggested in' Aseismic guideline research- phase ll' (in Korea) is used. When 3D study-models are designed, span length and bay number are varied and accidental torsional moment is considered. And the models are analyzed by push-over analysis, in which external and internal frame are connected by rigid-link. As a result of numerical experiments, Ω is increased as the bay number or span length is increased. Because, by the including of accidental torsional moment in designing process, the increased ratio of strength of external columns is larger than the increased ratio of span length or bay number. And this makes the failure mode of model closer or strong-column and weak-beam mechanism.

• Journal of Adhesion and Interface
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• v.5 no.1
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• pp.21-28
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• 2004

In this work, glass fiber/nylon 6 and woven glass fiber/nylon 6 composites have been fabricated using glass fiber reinforcements sized with 3-chloropropyltrimethoxysilane(CTMS) having a chloropropyl organo-functional group in the molecular chain end. The interfacial shear strength of glass fiber/nylon 6 composite was measured using a single fiber microbonding test and the interlaminar shear strength and the storage modulus of woven glass fabric/nylon 6 composites were measured using a short-warn shear test and a dynamic mechanical analysis, respectively, informing the effect of the concentration of CTMS on the properties. With increasing CTMS concentration, the interfacial properties of the composites were improved. The results on the interfacial shear strength, interlaminar shear strength, interlaminar failure pattern, and storage modulus with varying the CTMS concentration agree with each other.