Surface transform of $Si_3N_4$ ceramics irradiated by $CO_2$ laser beam

$CO_2$ 레이저 빔에 의한 $Si_3N_4$ 세라믹의 반응연구

  • 김선원 (한국기계연구원 정보장비연구센터) ;
  • 이제훈 (한국기계연구원 정보장비연구센터) ;
  • 서정 (한국기계연구원 정보장비연구센터) ;
  • 조해용 (충북대학교 기계공학부) ;
  • 김관우 (충북대학교 기계공학부)
  • Published : 2006.06.02

Abstract

Silicon Nitride ($Si_3N_4$), which is widely used in a variety of applications, is hard-to-machine due to its high hardness. At high temperature (e.g. above $1000^{\circ}C$), however, the machinability can be greatly improved. In this work, we used a $CO_2$ laser with a high absorptivity to $Si_3N_4$ of 0.9 to locally heat the surface of a rotating $Si_3N_4$ rod on a lathe. In order to examine the effects of the laser-assisted heating on hardness, an $Si_3N_4$ md is heated to temperatures from 900 to $1800^{\circ}C$ and is rotated at speeds from 440-900 rpm in experiments. When the rod is naturally cooled to room temperature, we measured the Victors hardness (Hv): and observed the surface of HAZ using a scanning electron microscopy (SEM). Energy dispersive spectroscopy(EDS) was used for ingredient analysis. Results showed that when heated at $1600^{\circ}C$, the hardness of $Si_3N_4$ decreased from 1500 Hv to 1000 Hv. Also, in order to predict the depth of HAZ, we numerically analyzed the laser-assisted heating of $Si_3N_4$.

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