• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.96-97
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• 2012

In nitride and oxide film deposition, sputtered metals react with nitrogen or oxygen gas in a vacuum chamber to form metal nitride or oxide films on a substrate. The physical properties of sputtered films (metals, oxides, and nitrides) are strongly influenced by magnetron plasma density during the deposition process. Typical target power densities on the magnetron during the deposition process are ~ (5-30) W/cm2, which gives a relatively low plasma density. The main challenge in reactive sputtering is the ability to generate a stable, arc free discharge at high plasma densities. Arcs occur due to formation of an insulating layer on the target surface caused by the re-deposition effect. One current method of generating an arc free discharge is to use the commercially available Pinnacle Plus+ Pulsed DC plasma generator manufactured by Advanced Energy Inc. This plasma generator uses a positive voltage pulse between negative pulses to attract electrons and discharge the target surface, thus preventing arc formation. However, this method can only generate low density plasma and therefore cannot allow full control of film properties. Also, after long runs ~ (1-3) hours, depends on duty cycle the stability of the reactive process is reduced due to increased probability of arc formation. Between 1995 and 1999, a new way of magnetron sputtering called HIPIMS (highly ionized pulse impulse magnetron sputtering) was developed. The main idea of this approach is to apply short ${\sim}(50-100){\mu}s$ high power pulses with a target power densities during the pulse between ~ (1-3) kW/cm2. These high power pulses generate high-density magnetron plasma that can significantly improve and control film properties. From the beginning, HIPIMS method has been applied to reactive sputtering processes for deposition of conductive and nonconductive films. However, commercially available HIPIMS plasma generators have not been able to create a stable, arc-free discharge in most reactive magnetron sputtering processes. HIPIMS plasma generators have been successfully used in reactive sputtering of nitrides for hard coating applications and for Al2O3 films. But until now there has been no HIPIMS data presented on reactive sputtering in cluster tools for semiconductors and MEMs applications. In this presentation, a new method of generating an arc free discharge for reactive HIPIMS using the new Cyprium plasma generator from Zpulser LLC will be introduced. Data (or evidence) will be presented showing that arc formation in reactive HIPIMS can be controlled without applying a positive voltage pulse between high power pulses. Arc-free reactive HIPIMS processes for sputtering AlN, TiO2, TiN and Si3N4 on the Applied Materials ENDURA 200 mm cluster tool will be presented. A direct comparison of the properties of films sputtered with the Advanced Energy Pinnacle Plus + plasma generator and the Zpulser Cyprium plasma generator will be presented.

• Korean Journal of Soil Science and Fertilizer
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• v.26 no.4
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• pp.230-235
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• 1993

This study was carried out to investigate the supplying capacity of various forms(Water soluble, exchangeable, and available) of potassium in soils of different site quality by using surface soils from the Japanese cedar(Cryptomeria japonica) forests in Cheju island. Major results can be summerized as follows. Using continuous leaching methods with 0.01N-HCl, accumulated amounts of available potassium from surface soils of site upper and site low were about 0.6me/100g and 0.4me/100g, respectively. The release ratio of available potassium in the first $1{\ell}$ leaching of 0.01N-HCl to the total available potassium leached with $6{\ell}$ of 0.01N-HCl was over 80% for both sites, and this suggester that surface soil of both sites had the weak potassium adsorptivity as the typical volcanic ash soil. The ratio of the exchangeable potassium to the water soluble potassium was 1 : 1 for both sites. The ratio of the exchangeable potassium to the available potassium was 1 : 1 for the site low but the smaller ratio value for the site upper, indicating that the potassium supplying power of the site upper was greater than that of the site low. Available potassium was highly correlated with exchangeable Ca($0.83^{**}$) and Mg($0.84^{**}$).

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.1817-1819
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• 2004

From the plasma application point of view, electron temperature and density are one of the most important parameters for plasma process. But it is only available to control plasma by adjusting external factors like gas pressure and input power. In this paper, pulse-modulated plasma is generated by modulating 13.56GHz RF power with 1, 5, 10kHz pulse. And Langmuir probe technique is used to study the distribution of electron temperature and density. When modulated pulse is off, electron temperature decreases gradually in form of exponential decay. The value t of exponential decay slope is 33.619, 13.834, 10.803 in 1kHz. 5kHz. 10kHz. This implies that this method can be used to control electron temperature and density.

• Proceedings of the KSR Conference
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• 2011.10a
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• pp.3111-3116
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• 2011

Global warming is one of the hottest issues which should be solved for future generations. Technologies which prevent the increase of environmental warming are highlighted as the global average temperature increases. Electric vehicles (EVs) are considered to be one of the powerful solutions to reduce greenhouse gas emission. To spread the EV industry, a major premise is that a charging infrastructure is available anywhere the EV operates. In this paper, we will present the demonstration of ' EV quick charging system to the rail power grid' which are cooperated by LS CNS, Seoul Metro and Korea Railway Research Institute.

• Journal of Electrical Engineering and Technology
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• v.10 no.1
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• pp.83-91
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• 2015

This paper presents preventive and emergency control measures for on line transient stability (security) enhancement. For insecure operating state, generation rescheduling based on a real power generation shift factor (RPGSF) is proposed as a preventive control measure to bring the system back to secure operating state. For emergency operating state, two emergency control strategies namely generator shedding and load shedding have been developed. The proposed emergency control strategies are based on voltage magnitudes and rotor trajectories data available through Phasor Measurement Units (PMUs) installed in the systems. The effectiveness of the proposed approach has been investigated on IEEE-39 bus test system under different contingency and fault conditions and application results are presented.

• Structural Engineering and Mechanics
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• v.53 no.4
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• pp.661-679
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• 2015

In this article, nonlinear finite element solutions of bending responses of functionally graded spherical panels are presented. The material properties of functionally graded material are graded in thickness direction according to a power-law distribution of volume fractions. A general nonlinear mathematical shallow shell model has been developed based on higher order shear deformation theory by taking the geometric nonlinearity in Green-Lagrange sense. The model is discretised using finite element steps and the governing equations are obtained through variational principle. The nonlinear responses are evaluated through a direct iterative method. The model is validated by comparing the responses with the available published literatures. The efficacy of present model has also been established by demonstrating a simulation based nonlinear model developed in ANSYS environment. The effects of power-law indices, support conditions and different geometrical parameters on bending behaviour of functionally graded shells are obtained and discussed in detail.

• Journal of Power System Engineering
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• v.13 no.6
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• pp.22-28
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• 2009

열역학 제 2법칙의 관점의 열역학적 가용에너지인 엑서지 해석법을 적용하여 가솔린, 메탄올, M90 연료를 사용한 전기점화 기관의 성능해석을 수행하였다. 열역학적 사이클 해석을 위하여 사이클을 구성하는 각 과정은 열역학적 모델로 단순화하였고, 크랭크 각도에 따른 실린더의 압력과 작동유체를 구성하는 연료, 공기 및 연소생성물의 열역학적 물성 값들을 이용하여 각 과정에서의 엑서지와 손실 일을 계산하였다. 실험데이터는 단기통 전기점화기관을 가솔린, 메탄올과 M90(메탄을 90%+부탄 10%의 혼합연료)을 연료로 WOT(Wide Open Throttle), MBT(Minimum advanced spark timing for Best Torque), 2500rpm 조건으로 운전하여 측정하였다. 계산에 이용한 자료는 실험으로 측정한 크랭크 각도에 따른 연소실의 압력, 흡입공기와 연료유량, 흡입공기 온도, 냉각수 온도와 배출가스 온도 등이다. 이를 이용하여 각 과정에서의 엑서지와 손실 일을 계산하였으며 각 과정에서의 손실 일은 연소과정에서 가장 크며 팽창과정, 배출과정, 압축과정 및 흡입과정 순으로 크게 나타났다.

• Proceedings of the KIPE Conference
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• 2001.10a
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• pp.52-55
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• 2001

This paper is to see the availability of electrical signatures as a means for evaluating the performance and monitoring mechanical anomalies of (MOVs). To estimate motor torque, two methods such as d-q frame conversion and air-gap method are suggested and estimated results are compared with measured values. The error between measured and estimated torques is within acceptable error bound with below $1\%$ under varied load. Frequency domain analysis of calculated torque has been done as well. It is shown that monitoring of peak frequency could give useful clues to detect anomalies of MOV. As results, electrical signatures at MOV motor is expected to be an available tool for estimation of motor capacity and monitoring of electrical and mechanical abnormalities.

• Journal of Advanced Research in Ocean Engineering
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• v.3 no.3
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• pp.102-111
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• 2017

This study considered the effects on the seabed of a harbor and quay wall from ship maneuvers in relation to the thruster jet flow and initial velocity. This study also included the engine capacity, RPM, and diameter and pitch of a ship's thruster for a required speed. The impact of a scour hole on the environment of a quay wall was investigated. Based on these results, a risk based analysis was conducted to evaluate different strategies and their consequences. There has been an increase in the loads on the bottom of a harbor during ship maneuvering. This increase is caused by the propeller loads of mooring and unmooring vessels. This indicates a greater number of arrivals and departures of vessels with larger drafts, larger thruster diameters, and larger available thruster power capacities. Another important cause could be an increase in the maneuverability of vessels from the use of bow thrusters. The increasing loads, which cause a higher jet flow above the bottom, can lead to undesirable scour holes.

• Journal of Broadcast Engineering
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• v.18 no.3
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• pp.491-494
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• 2013

This paper proposes a stochastic/dynamic routing protocol which aims the minimization of the summation of time average expected power expenditure with buffer stability in mobile ad-hoc 60 GHz wireless networks. By using 60 GHz RF, the wireless devices can transmit/receive 1080p HD video signals without compression. In addition, our algorithm works without centralized controller, so that the distributed operation is available. The novelty of the proposed algorithm was also verified by simulations.