• Title/Summary/Keyword: annealing.

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Studies on Improvement of Schottky Characteristics for GaN Devices (GaN 소자의 쇼트키 특성 향상에 관한 연구)

  • 윤진섭
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.9
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    • pp.700-706
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    • 2001
  • In this paper, I have fabricated and measured the gallium nitride(GaN) based Schottky diodes, and have carried out analyses of degradation of Schottky barrier characteristics. To improve of degraded Schottky barrier characteristics, I have carried out several experiments such as N$_2$ plasma exposure, annealing in N$_2$ ambient and annealing after N$_2$ plasma exposure. In the results of these experiments, I have achieved that only annealing in N$_2$ ambient is enough to improve the Schottky barrier characteristics, are temperature of 700$\^{C}$ and time of 90 sec in N$_2$ ambient furnace. for the analysis of these experiments, I have carried out the measurement of electric characteristics and quantitative analysis of etching damage using AES(Aguger Electron Spectroscopy).

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A Study on Oxygen Precipitation in Heavily Boron Doped Silicon Wafer (고농도 붕소의 도핑된 실리콘 웨이퍼에서의 산소석출에 관한 연구)

  • 윤상현;곽계달
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.11 no.9
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    • pp.705-710
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    • 1998
  • Intrinsic gettering is usually to improve wafer quality, which is an important factor for reliable ULSI devices. In order to generate oxygen precipitation in lightly and heavily boron doped silicon wafers with or without high $^75 As^+$ ion implantation, the 2-step annealing method was adopted. After annealing, the were cleaved and etched with th Wright etchant. The morphology of cross section on samples was inspected by FESEM(field emission scanning electron microscopy). The morphology of unimplanted samples was rater rough than that of the implanted. Oxygen precipitation density observed by an optical microscope in lightly boron doped samples was about 3$\times10^6/cm^3$. However, in heavily boron doped samples, the density of oxygen precipitation was largest at $600^{\circ}C$ in 1st annealing, and decreased abruptly until $800^{\circ}C$, But it increased slightly at $1000^{\circ}C$ and was independent with the implantation.

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Enhanced Crystallization of Amorphous Si Using viscous Ni Solution and Microwave Annealing

  • Ahn, Jin-Hyung;Eom, Ji-Hye;Ahn, Byung-Tae
    • Journal of Information Display
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    • v.2 no.2
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    • pp.7-12
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    • 2001
  • A viscous Ni solution was coated over amorphous Si thin film for evenly spread of Ni metal source. The Ni s. prepared by dissolving $NiCl_2$ into IN HCI and mixing with propylene glycol. $NiCl_2$ and Ni were deposited on the amorphous film after oven dry and they enabled to obtain a uniform crystallization. The crystallization using the viscous Ni solution was a Ni-silicide mediated process, the same process used with Ni metal layer. The crystallization temperature was lowered to $480^{\circ}C$ by the synergy effect of silicide-mediated crystallization and microwave-induced crystallization. Lateral crystallization was also enhanced such that the velocity of lateral crystallization by microwave annealing became faster than by furnace annealing.

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Annealing Temperature Dependence of Exchange Bias Effect in Short Time Annealed NiFe/NiMn Bilayer Thin Film by FMR Measurement

  • Yoo, Yong-Goo;Park, Nam-Seok;Min, Seong-Gi;Yu, Seong-Cho
    • Journal of Magnetics
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    • v.10 no.4
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    • pp.133-136
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    • 2005
  • The NiMn/NiFe bilayer structure which was short time annealed in order to induce unidirectional anisotropy were studied as a function of annealing temperature. The maximum exchange bias field of NiMn/NiFe bilayer was presented at $250^{\circ}C$ after short time annealing process with no external field. The appearance of exchange bias was due to phase transformation of NiMn layer. In plane angular dependence of a resonance field distribution which measured by FMR was analysed as a combined effect of unidirectional anisotropy and uniaxial anisotropy. The resonance field and the line width from FMR measurement were also analysed with annealing temperature.

Rotation Effect of In-plane FM layer on IrMn Based GMR-SV Film

  • Khajidmaa, Purevdorj;Choi, Jong-Gu;Lee, Sang-Suk
    • Journal of Magnetics
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    • v.22 no.1
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    • pp.7-13
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    • 2017
  • The magnetoresistance (MR) properties of antiferromagnetic (AFM) IrMn based giant magnetoresistance-spin valve (GMR-SV) was investigated in view point of the artificial rotation effect of ferromagnetic (FM) layer in the plane induced by an applied field during the post annealing temperature. The MR curves measured with an azimuthal angle region of ${\phi}=0^{\circ}-360^{\circ}$ are depended on the annealing temperature and the magnetization easy axis of two free NiFe layers and two pinned NiFe layers in dual-type GMR-SV film. Especially, the annealing temperature and sample rotation angle(${\theta}$ ) maintained to the magnetic sensitivity (MS) of 1.4 %/Oe with an isotropic region angle of $110^{\circ}$ are $100^{\circ}C$ and $90^{\circ}$, respectively.

Parameters estimation of the generalized linear failure rate distribution using simulated annealing algorithm

  • Sarhan, Ammar M.;Karawia, A.A.
    • International Journal of Reliability and Applications
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    • v.13 no.2
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    • pp.91-104
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    • 2012
  • Sarhan and Kundu (2009) introduced a new distribution named as the generalized linear failure rate distribution. This distribution generalizes several well known distributions. The probability density function of the generalized linear failure rate distribution can be right skewed or unimodal and its hazard function can be increasing, decreasing or bathtub shaped. This distribution can be used quite effectively to analyze lifetime data in place of linear failure rate, generalized exponential and generalized Rayleigh distributions. In this paper, we apply the simulated annealing algorithm to obtain the maximum likelihood point estimates of the parameters of the generalized linear failure rate distribution. Simulated annealing algorithm can not only find the global optimum; it is also less likely to fail because it is a very robust algorithm. The estimators obtained using simulated annealing algorithm have been compared with the corresponding traditional maximum likelihood estimators for their risks.

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Growth of Transferable Polycrystalline Si Film on Mica Substrate (운모기판을 이용한 다결정 Si 전이막 성장 연구)

  • Park Jin Woo;Eom Ji Hye;Ahn Byung Tae;Jun Young Kwon
    • Korean Journal of Materials Research
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    • v.14 no.5
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    • pp.343-347
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    • 2004
  • We investigated the growth feasibility of polycrystalline Si film on mica substrate for the transfer of the layer to a plastic substrate. The annealing temperature was limited up to $600^{\circ}C$ because of crack development in the mica substrate. Amorphous Si film was deposited on mica substrate by PECVD and was crystallized by furnace annealing. During the annealing, bubbles were formed at the Si/mica interface. The bubble formation was avoided by the Ar-plasma treatment before amorphous Si deposition. A uniform and clean polycrystalline Si film was obtained by coating $NiCl_2$ on the amorphous Si film and annealing at $500^{\circ}C$ for 10 h. The conventional Si lithography was possible on the mica substrate and the devices fabricated on the substrate could be transferred to a plastic substrate.

A Study on the Parameters Tuning Method of the Fuzzy Power System Stabilizer Using Genetic Algorithm and Simulated Annealing (혼합형 유전 알고리즘을 이용한 퍼지 안정화 제어기의 계수동조 기법에 관한 연구)

  • Lee, Heung-Jae;Im, Chan-Ho
    • The Transactions of the Korean Institute of Electrical Engineers A
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    • v.49 no.12
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    • pp.589-594
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    • 2000
  • The fuzzy controllers have been applied to the power system stabilizer due to its excellent properties on the nonlinear systems. But the design process of fuzzy controller requires empirical and heuristic knowledge of human experts as well as many trial-and-errors in general. This process is time consuming task. This paper presents an parameters tuning method of the fuzzy power system stabilizer using the genetic algorithm and simulated annealing(SA). The proposed method searches the local minimum point using the simulated annealing algorithm. The proposed method is applied to the one-machine infinite-bus of a power system. Through the comparative simulation with conventional stabilizer and fuzzy stabilizer tuned by genetic algorithm under various operating conditions and system parameters, the robustness of fuzzy stabilizer tuned by proposed method with respect to the nonlinear power system is verified.

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Effects of Thermal Treatments on Resonance Characteristics of FBAR Devices

  • Mai, Linh;Song, Hae-Il;Tuan, Le Minh;Su, Pham Van;Yoon, Gi-Wan
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • v.9 no.1
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    • pp.376-380
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    • 2005
  • The paper presents some methods to improve characteristics of film bulk acoustic resonator (FBAR) devices. The FBAR devices were fabricated on Bragg reflectors. Thermal treatments were done by sintering and/or annealing processes. The measurement showed a considerable improvement of return loss (S$_{11}$) and quality factor (Q$_{s/p}$). These thermal techniques seem very promising for enhancing FBAR resonance performance.

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Fabrication and characteristics of PZT ferroelectric thin films by Sol-Gel processing and rapid thermal annealing (Sol-gel법과 급속 열처리에 의한 PZT 강유전 박막의 제작과 그 특성)

  • 백동수;최형욱;김준한;신현용;김규수;박창엽
    • Electrical & Electronic Materials
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    • v.7 no.5
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    • pp.369-375
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    • 1994
  • In this study, ferroelectric thin films of PZT with different Zr/Ti ratio were prepared by sol-get processing and annealed by rapid thermal annealing at >$500^{\circ}C$>$-700^{\circ}C$ for 10 sec. -1 min. Structures of the annealed films were examined by X-ray diffraction and SEM. Thin films of PZT with perovskite structure have been obtained by annealing at >$600^{\circ}C$ or above and for 20 seconds or longer. Maximum remnant polarization of 10.24.mu.C/cm$^{2}$ and minimum coercive field of 20.06 kV/cm were obtained from the 56/44 and 65/35 Zr/Ti composition films, respectively. Dielectric constant, .epsilon.$_{r}$ of 500-1300 and dielectric loss, tan .delta., of 0.01-0.035 were obtained from the films.s.

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