• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.433-433
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• 2012

As the requirement in patterning geometry continuously shrinks down, the termination of etch process at the exact time became crucial for the success in nano patterning technology. By virtue of real-time optical emission spectroscopy (OES), etch end point detection (EPD) technique continuously develops; however, it also faced with difficulty in low open ratio etching, typically in self aligned contact (SAC) and one cylinder contact (OCS), because of very small amount of optical emission from by-product gas species in the bulk plasma glow discharge. In developing etching process, one may observe that coupon test is being performed. It consumes costs and time for preparing the patterned sample wafers every test in priority, so the coupon wafer test instead of the whole patterned wafer is beneficial for testing and developing etch process condition. We also can observe that etch open area is varied with the number of coupons on a dummy wafer. However, this can be a misleading in OES study. If the coupon wafer test are monitored using OES, we can conjecture the endpoint by experienced method, but considering by data, the materials for residual area by being etched open area are needed to consider. In this research, we compare and analysis the OES data for coupon wafer test results for monitoring about the conditions that the areas except the patterns on the coupon wafers for real-time process monitoring. In this research, we compared two cases, first one is etching the coupon wafers attached on the carrier wafer that is covered by the photoresist, and other case is etching the coupon wafers on the chuck. For comparing the emission intensity, we chose the four chemical species (SiF2, N2, CO, CN), and for comparing the etched profile, measured by scanning electron microscope (SEM). In addition, we adopted the Dynamic Time Warping (DTW) algorithm for analyzing the chose OES data patterns, and analysis the covariance and coefficient for statistical method. After the result, coupon wafers are over-etched for without carrier wafer groups, while with carrier wafer groups are under-etched. And the CN emission intensity has significant difference compare with OES raw data. Based on these results, it necessary to reasonable analysis of the OES data to adopt the pre-data processing and algorithms, and the result will influence the reliability for relation of coupon wafer test and whole wafer test.

• Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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• v.28 no.2
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• pp.265-271
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• 2010

This paper discusses a new software package, DEM_Comp, developed for effectively compressing large digital elevation model (DEM) data sets based on Lempel-Ziv-Welch (LZW) compression and Huffman coding. DEM_Comp was developed using the $C^{++}$ language running on a Windows-series operating system. DEM_Comp was also tested on various test sites with different territorial attributes, and the results were evaluated. Recently, a high-resolution version of the DEM has been obtained using new equipment and the related technologies of LiDAR (LIght Detection And Radar) and SAR (Synthetic Aperture Radar). DEM compression is useful because it helps reduce the disk space or transmission bandwidth. Generally, data compression is divided into two processes: i) analyzing the relationships in the data and ii) deciding on the compression and storage methods. DEM_Comp was developed using a three-step compression algorithm applying a DEM with a regular grid, Lempel-Ziv compression, and Huffman coding. When pre-processing alone was used on high- and low-relief terrain, the efficiency was approximately 83%, but after completing all three steps of the algorithm, this increased to 97%. Compared with general commercial compression software, these results show approximately 14% better performance. DEM_Comp as developed in this research features a more efficient way of distributing, storing, and managing large high-resolution DEMs.

• The Journal of The Korea Institute of Intelligent Transport Systems
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• v.15 no.2
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• pp.13-23
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• 2016

Many traffic centers are highly hesitant in employing existing Automatic Incident Detection Algorithms due to high false alarm rate, low detection rate, and enormous effort taken in maintaining algorithm parameters, together with complex algorithm structure and filtering/smoothing process. Concerns grow over the situation particularly in Freeway Incident Management Area This study proposes a new algorithm and introduces a novel concept, the Displaced Flow Index (DiFI) which is similar to a product of relative speed and relative occupancy for every execution period. The algorithm structure is very simple, also easy to understand with minimum parameters, and could use raw data without any additional pre-processing. To evaluate the performance of the DiFI algorithm, validation test on the algorithm has been conducted using detector data taken from Naebu Expressway in Seoul and following transferability tests with Gyeongbu Expressway detector data. Performance test has utilized many indices such as DR, FAR, MTTD (Mean Time To Detect), CR (Classification Rate), CI (Composite Index) and PI (Performance Index). It was found that the DR is up to 100%, the MTTD is a little over 1.0 minutes, and the FAR is as low as 2.99%. This newly designed algorithm seems promising and outperformed SAO and most popular AIDAs such as APID and DELOS, and showed the best performance in every category.

• 재활복지
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• v.18 no.4
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• pp.187-205
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• 2014

Is to identify how this affects the physically disabled to participate in the program 12 weeks Park Golf psychological well-being and happiness, the purpose of this research is subjective. How to study subjects, only 40-year-old disabled man more than 24 people total delay experimental group and 12 patients(failure cut seven, delayed dysfunction 5) and the control group and 12 patients(failure cut six, delayed dysfunction in 4, two people were involved in the joint disorder). 3 times a week(Mon, Wed, Fri), was carried out 50 minutes into 12 weeks of the experimental period, was located at River Park Golf Course A test place. We calculate the pre-and post-test data mean and standard deviation using SPSS Statistics 21.0 statistical data processing program, binary repeated measures ANOVA to analyze the effects on the psychological well-being of the disabled and subjective effects euphoria Park Golf Participation(was performed 2-way [2] RM ANOVA). First results in psychological well-being of the two groups according to Park Golf participate in group comparisons before and after the exercise involved only fun, immersive and shows were not significantly different, within each group enjoyment, competence, self-realization, all the children of the immersion showed a significant difference in the factors. Second, before and after participation in exercise, there was a significant difference between groups in subjective happiness of two groups according to Park Golf participation, the two groups were not significantly different within. Taken together the results to see more, showed that the positive effects on the psychological well-being and subjective happiness Park Golf participation is the Physically Disabled.

• Journal of the Korea Convergence Society
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• v.12 no.1
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• pp.99-104
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• 2021

In this paper, we propose health risk management using feature extraction and cluster analysis considering time flow. The proposed method proceeds in three steps. The first is the pre-processing and feature extraction step. It collects user's lifelog using a wearable device, removes incomplete data, errors, noise, and contradictory data, and processes missing values. Then, for feature extraction, important variables are selected through principal component analysis, and data similar to the relationship between the data are classified through correlation coefficient and covariance. In order to analyze the features extracted from the lifelog, dynamic clustering is performed through the K-means algorithm in consideration of the passage of time. The new data is clustered through the similarity distance measurement method based on the increment of the sum of squared errors. Next is to extract information about the cluster by considering the passage of time. Therefore, using the health decision-making system through feature clusters, risks able to managed through factors such as physical characteristics, lifestyle habits, disease status, health care event occurrence risk, and predictability. The performance evaluation compares the proposed method using Precision, Recall, and F-measure with the fuzzy and kernel-based clustering. As a result of the evaluation, the proposed method is excellently evaluated. Therefore, through the proposed method, it is possible to accurately predict and appropriately manage the user's potential health risk by using the similarity with the patient.

• Therapeutic Science for Rehabilitation
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• v.13 no.1
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• pp.75-86
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• 2024

Objective : The purpose of this study was to examine the effects of an occupational therapy program on the school readiness, focusing on adaptation skills and daily life skills, in children with developmental delays. Methods : The study involved a boy with developmental delay, aged 5 years and 8 months. The program was conducted twice a week, with a total of 8 sessions spread over 4 weeks. The Canadian Occupational Performance Measure (COPM) was employed, targeting class preparation and use of the toilet. Pre-post tests and follow-up evaluations were carried out to compare changes. Data analysis involved video recordings of the subject's performance. Results : The COPM results indicated improvements in both the performance and satisfaction levels for class preparation and toilet use. Processing skills showed seven improvements in class preparation and eight improvements in toilet use during post-testing. Activity performance observations further confirmed improvements in both class preparation and toilet use during post-test and follow-up evaluations. Conclusion : Occupational therapy improves school readiness (adaptation skill, daily living activity skill) for children with developmental delays, and has a positive effect on overall school readiness.

• The Journal of Korean Academy of Sensory Integration
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• v.18 no.3
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• pp.14-26
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• 2020

Objective : The purpose of this study was to investigate the effect of therapeutic listening on task performance, auditory behavior problems, and attention in children with sensory modulation disorder. Methods : Sixteen children aged four to seven years who were classified as children with sensory modulation disorder were randomly assigned to either the experimental group (n = 8) or the control group (n = 8). From July 1 to October 18, 2017, both groups participated in sensory integration programs, while therapeutic listening training was administered only to the experimental group. Sensory integration therapy was conducted in two sessions per week for six weeks (12 sessions); each session consisted of 40 minutes of therapy and 10 minutes of parent education. Therapeutic listening was conducted in three thirty-minute sessions per week for six weeks (18 sessions). We used the Canadian Occupation Performance Measure (COPM) to evaluate changes in the participants' occupational performance between pre- and post-intervention. We used Fisher's Auditory Problems Checklist (FAPC) to observe changes in behavioral problems related to hearing. The Child Attention Scale for Teacher (CAST) was used to evaluate changes in attention. Results : No significant differences pre- and post-intervention between the two groups were observed. The participants' auditory behavioral problems improved significantly in the experimental group, but no significant difference was found between the two groups. There was no significant difference in attention between the two groups, but there was a significant difference between the two groups in the "adaptability" and "emotion" domains (p < .05). Conclusion : The results suggest that therapeutic listening training has a positive effect on reducing problematic behaviors related to hearing and improving the occupational performance of children with sensory modulation disorder. This study provides a basis for improving the sensory processing ability of children with sensory modulation disorder by applying listening training in the clinical field and at home.

• Proceedings of the Korea Contents Association Conference
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• 2007.11a
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• pp.167-171
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• 2007

Application areas of Knowledge Discovery in Database (KDD) have been expanded into many R&D management processes including technology trends analysis, forecasting and evaluation etc. Established research field such as informetrics (or scientometrics) has recently fully utilized techniques or methods of KDD. Various systems have been developed to support works of analyzing large-scale R&D related databases such as patent DB or bibliographic DB by a few researchers or institutions. But extant systems have some problems for korean users to use. Their prices is not cheap, korean language process not available, and user's demands not reflected. To solve these problems, Korea Institute of Science and Technology Information (KISTI) developed stand-alone type information analysis system named as KnowledgeMatrix. KnowledgeMatrix system offer various functions to analyze retrieved data set from databases. Knowledge Matrix main operation unit is composed of user-defined lists and matrix generation, cluster analysis, visualization, data pre-processing. KnowledgeMatrix show better performances and offer more various functions than extant systems.

• The Journal of Society for e-Business Studies
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• v.18 no.4
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• pp.145-167
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• 2013

This paper proposes a method to compare planned processes with actual processes of bock assembly operations in shipbuilding industry. Process models can be discovered using the process mining techniques both for planned and actual log data. The comparison between planned and actual process is focused in this paper. The analysis procedure consists of five steps : 1) data pre-processing, 2) definition of analysis level, 3) clustering of assembly bocks, 4) discovery of process model per cluster, and 5) comparison between planned and actual processes per cluster. In step 5, it is proposed to compare those processes by the several perspectives such as process model, task, process instance and fitness. For each perspective, we also defined comparison factors. Especially, in the fitness perspective, cross fitness is proposed and analyzed by the quantity of fitness between the discovered process model by own data and the other data(for example, the fitness of planned model to actual data, and the fitness of actual model to planned data). The effectiveness of the proposed methods was verified in a case study using planned data of block assembly planning system (BAPS) and actual data generated from block assembly monitoring system (BAMS) of a top ranked shipbuilding company in Korea.

• Food Science of Animal Resources
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• v.35 no.1
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• pp.35-40
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• 2015

Super- and sub-critical water treatments have been of interest as novel methods for protein hydrolysis. In the present study, we studied the effect of sub-critical water (Sub-$H_2O$, $300^{\circ}C$, 80 bar) treatment as well as super-critical water (Super-$H_2O$, $400^{\circ}C$, 280 bar) treatment on the physicochemical properties of porcine skin (PS), which has abundant collagen. Porcine skin was subjected to pre-thermal treatment by immersion in water at $70^{\circ}C$, and then treated with sub- or super-critical water. Physicochemical properties of the hydrolysates, such as molecular weight distribution, free amino acid content, amino acid profile, pH, color, and water content were determined. For the molecular weight distribution analysis, 1 kDa hydrolyzed porcine skin (H-PS) was produced by Super-$H_2O$ or Sub-$H_2O$ treatment. The free amino acid content was 57.18 mM and 30.13 mM after Sub-$H_2O$ and Super-$H_2O$ treatment, respectively. Determination of amino acid profile revealed that the content of Glu (22.5%) and Pro (30%) was higher after Super-$H_2O$ treatment than after Sub-$H_2O$ treatment, whereas the content of Gly (28%) and Ala (13.1%) was higher after Sub-$H_2O$ treatment. Super-$H_2O$ or Sub-$H_2O$ treatment affected the pH of PS, which changed from 7.29 (Raw) to 9.22 (after Sub-$H_2O$ treatment) and 9.49 (after Super-$H_2O$ treatment). Taken together, these results showed that Sub-$H_2O$ treatment was slightly more effective for hydrolysis than Super-$H_2O$ was. However, both Sub-$H_2O$ and Super-$H_2O$ treatments were effective processing methods for hydrolysis of PS collagen in a short time and can be regarded as a green chemistry technology.