• 제목/요약/키워드: amorphous silicon thin-film transistor

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Innovation of TFT Technology for Display (디스플레이용 박막 트랜지스터 기술의 이노베이션)

  • Yu, B.G.;Ko Park, S.H.;Hwang, C.S.
    • Electronics and Telecommunications Trends
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    • v.27 no.5
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    • pp.109-125
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    • 2012
  • 액정 디스플레이의 산업 규모는 놀라운 속도로 확대되고 있다. 그 원동력이 된 것이 박막 트랜지스터(Thin Film Transistor: TFT) 기술의 발전에 있다. 비정질 실리콘(Amorphous Silicon: a-Si) TFT 기술은 대형 액정 TV를 탄생시키고, 저온 폴리실리콘 TFT는 휴대전화 등의 중소형 디스플레이와 AMOLED의 핵심 기술이 되었다. 또한 다양한 TFT 기술 seeds가 계속해서 출현하여 정보 인프라와 생활 스타일에 맞춘 새로운 정보기기의 출현을 예감시키고 있다. 새로운 응용제품의 요구는 새로운 기술 개발의 견인차가 되고 있다. 최근에는 이러한 요구에 따라 산화물 TFT, 마이크로 결정실리콘(microcrystalline Si: ${\mu}c-Si$) TFT, 유기물 TFT 등의 기술도 활발하게 연구개발되고 있다. 본고에서는 지금까지의 TFT 기술 개발의 발전사를 뒤돌아보고 지금부터의 발전 방향을 박막 트래지스터 기술 이노베이션 관점으로부터 전망하였다.

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Active-Matrix Field Emission Display Based on CNT Emitter and a-Si TFT

  • Song, Yoon-Ho;Kim, Kwang-Bok;Hwang, Chi-Sun;Lee, Sun-Hee;Park, Dong-Jin;Lee, Jin-Ho;Kang, Kwang-Yong;Hur, Ji-Ho;Jang, Jin
    • 한국정보디스플레이학회:학술대회논문집
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    • 2004.08a
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    • pp.923-926
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    • 2004
  • Active-matrix field emission display (AMFED) based on carbon nanotube (CNT) emitter and amorphous silicon thin-film transistor (a-Si TFT) is reviewed. The AMFED pixels consisted of a high-voltage a-Si TFT and mesh-gated CNT emitters. The developed AMFED panel showed a high performance with a driving voltage of below 15 V. The low-cost and large-area AMFED approach with a metal mesh technology will be discussed.

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A Study on the Photon Energy Spectrums of Backlight for the Analysis of the Photoelectric Characteristics of a-Si:H TFT (비정질 실리콘 박막 트랜지스터의 광특성 분석을 위한 백라이트의 광자 에너지 스펙트럼에 대한 연구)

  • Jeong, Kyung-Seo;Kwon, Sang-Jik;Cho, Eou-Sik
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.22 no.12
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    • pp.1058-1062
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    • 2009
  • For the investigation of the mechanism of photoelectric characteristics of a hydrogenated amorphous silicon thin film transistor(a-Si:H TFT), spectral characteristics of various backlights were analyzed in terms of the photon energy at each wavelength. Photon energy spectral characteristics were obtained through the multiplication of each photon energy and spectral intensities of backlights at each wavelength and the total photon energies were obtained by the integration of the photon energy spectrums. From the comparison of the experimental photo leakage current and the calculated photon energy, it was possible to conclude that the absorption of illuminated backlight to a-Si:H layer and the generation of electrons and holes are mainly carried out at the wavelength less than 500 nm as described in previous reports.

Printed Polymer and a-Si TFT Backplanes for Flexible Displays

  • Street, R.A.;Wong, W.S.;Ready, S.E.;Chabinyc, M.L.;Arias, A.C.;Daniel, J.H.;Apte, R.B.;Salleo, A.;Lujan, R.;Ong, Beng;Wu, Yiliang
    • Journal of Information Display
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    • v.6 no.3
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    • pp.12-17
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    • 2005
  • The need for low cost, flexible, thin film transistor (TFT) display backplanes has focused attention on new processing techniques and materials. We report the development of TFT backplane technology based entirely on jet-printing, using a combination of additive and subtractive processing, to print active materials or etch masks. The technique eliminates the use of photolithography and has the potential to reduce the array manufacturing cost. The printing technique is demonstrated with both amorphous silicon and polymer semiconductor TFT arrays, and we show results of small prototype displays.

Dry Etch Process Development for TFT-LCD Fabrication Using an Atmospheric Dielectric Barrier Discharge

  • Choi, Shin-Il;Kim, Sang-Gab;Choi, Seung-Ha;Kim, Shi-Yul;Kim, Sang-Soo;Lee, Seung-Hun;Kwon, Ho-Cheol;Kim, Gon-Ho
    • 한국정보디스플레이학회:학술대회논문집
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    • 2008.10a
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    • pp.1272-1275
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    • 2008
  • We present the development of dry etch process for the liquid crystal display (LCD) fabrication using a dielectric barrier discharge (DBD) system at atmospheric pressure. In this experimental work, the dry etch characteristics and the electrical properties of thin film transistor are evaluated by using the scanning electron microscopy and electric probe, and TFT-LCD panel ($300\;mm\;{\times}\;400\;mm$) is manufactured with the application of the amorphous silicon etch step in the 4 mask and 5 mask processes.

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Characterization of instability in a-Si:H TFT LCD utilizing copper as electrodes

  • Kuan, Yung-Chia;Liang, Shuo-Wei;Chiu, Hsian-Kun;Sun, Kuo-Sheng
    • 한국정보디스플레이학회:학술대회논문집
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    • 2006.08a
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    • pp.747-751
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    • 2006
  • The hydrogenated amorphous silicon thin film transistor (a-Si:H TFT) with copper as source and drain electrode has been fabricated to obtain its transfer characteristics and stressed with positive and negative bias to investigate the instability variation comparing to conventional MoW-Al based TFT device. The results show that there is no copper diffusion into active layer of a-Si:H TFT, even during the thermal process. In addition, a 15-inch XGA a Si:H TFT LCD display utilizing Cu as gate electrodes has been developed.

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Development of High Voltage TFT by Discharge Plasma Chemical Vapor Depoisition (방전 플라즈마 CVD에 의한 전력용 고합 TFT의 개발)

  • Lee, Woo-Sun;Kang, Yong-Chul;Kim, Byung-In;Yang, Tae-Whan;Chung, Hae-In;Chung, Yong-Ho
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1993.05a
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    • pp.137-141
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    • 1993
  • We studied the fabrication and electrical characteristics of high voltage hydrogenerated amorphous silicon thin film transistor using glow discharge plasma enchanced chemical vapor deposition (GDPECVD) with $2500{\AA}\;SiO_2$, $400-1500{\AA}$ a-Si thickness, 350V output voltage, 100V input voltaege, and $9.55{\times}10^4$ average on/off ratio. We found that leakage current of high voltage TFT occured 0-70V drain voltage.

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Dynamic Pixel Models for a-Si TFT-LCD and Their Implementation in SPICE

  • Wang, In-Soo;Lee, Gi-Chang;Kim, Tae-Hyun;Lee, Won-Jun;Shin, Jang-Kyoo
    • ETRI Journal
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    • v.34 no.4
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    • pp.633-636
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    • 2012
  • A dynamic analysis of an amorphous silicon (a-Si) thin film transistor liquid crystal display (TFT-LCD) pixel is presented using new a-Si TFT and liquid crystal (LC) capacitance models for a Simulation Program with Integrated Circuit Emphasis (SPICE) simulator. This dynamic analysis will be useful when predicting the performance of LCDs. The a-Si TFT model is developed to accurately estimate a-Si TFT characteristics of a bias-dependent gate to source and gate to drain capacitance. Moreover, the LC capacitance model is developed using a simplified diode circuit model. It is possible to accurately predict TFT-LCD characteristics such as flicker phenomena when implementing the proposed simulation model.

Simulation of Characteristics of Amorphous-Silicon Thin Film Transistor for Liquid Crystal Display Using the Mixed Simulator (혼합시뮬레이터를 사용한 액정 표시기용 비정질 실리콘 박막 트랜지스터의 특성 시뮬레이션)

  • 이상훈;김경호
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.32A no.12
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    • pp.122-129
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    • 1995
  • The most important feature of a-Si TFT is dense localized states such as dangling bonds which exist in tis bandgap. Electrons trapped by localized states dominate the potential distribution in the active a-Si region ,and influence the performance of a-Si TFT. In this paper, we describe the electrical characteristics of a-Si TFT with respect to trap distribution within bandgap, electron mobility and interface states using 2-Dimensional device simulator and compare the result of simulation with measurements. Using the mixed-mode simulator, we can predict the potential variation of pixel which causes residual image problem during the turn-off of a-Si TFT driving circuit. Therefore it is possible to consider trade-off between potential variation of pixel and turn-on current of a-Si TFT for the optimized driving circuit.

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Fabrication of High Voltage a-Si:H TFT Plasma Chemical Vapor Deposition (플라즈마 CVD에 의한 고전압 비정질 실리콘 박막 트랜지스터의 제작)

  • Lee, Woo-Sun;Kang, Young-Chul;Kim, Hyung-Gon
    • The Transactions of the Korean Institute of Electrical Engineers
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    • v.43 no.2
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    • pp.312-317
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    • 1994
  • We studied the fabrication and electrical characteristics of high voltage hydrogenerated amorphous silicon thin film transistor using plasma enchanced chemical vapor deposition(PECVD). The device shows 2500${\AA}$ SiOS12T, 400-1500${\AA}$ a-Si tickness, 350V output voltage and 9.55${\times}$10S04T average on/off current ratio. We found that the leakage current of high voltage TFT occurred 0-70V drain voltage. As the leakage current depend on the a-Si thickness, the leakage current of high voltage TFT decreased by reduction of the a-Si thickness.