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Metal 첨가물질에 따른 비정질 IGZO 투명전극 특성 연구

  • Sin, Han-Jae;Hwang, Do-Yeon;Lee, Jeong-Hwan;Lee, Dong-Ik;Park, Seong-Eun;Park, Jae-Seong;Kim, Seong-Jin;Lee, Yeong-Ju;Seo, Chang-Taek
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.368-370
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    • 2013
  • 투명 전극은 전기전도도를 갖는 동시에 가시광선을 투과하는 소재를 말하며, 구체적으로는 빛의 파장이 400~700 nm 영역대의 가시광선을 80% 이상 투과하며 전기전도도가 비저항으로 $10^{-3}{\Omega}cm$이하이거나 면저항이 $10^3{\Omega}$/${\Box}$소재를 의미한다. 투명 전극은 전기전도도에 따라 사용되는 용도가 다양하다. LCD, PDP, OLED 와 같은 평판디스플레이 및 3D 디스플레이의 투명전극으로 사용되는 핵심재료일 뿐만 아니라 터치스크린, 투명필름, 대전방지막, 열반사막, EMI 방지막, 태양전지 분야에 광범위하게 이용되고 있다. 일반적으로, 투명전극 박막에 가장 많이 사용되고 있는 소재는 ITO (indium tin oxide)이나, 주성분인 In의 사용량 증가로 상용 ITO 타겟 가격이 급등하고 있음으며, 고가의 ITO 타겟을 대체하기 위한 저가의 투명전극 소재 개발이 절대적으로 요구되며, 신규 소재 개발을 통한 기술력 우위 선점이 필수적으로 요구되는 상황이다. 본 연구에서는 기존에 디스플레이 분야에서 널리 활용되는 고가의 ITO를 대체하기 위한 다성분 금속산화물 투명전극 스퍼터링 타겟 제조기술을 개발하기 위한 연구로서, Metal이 첨가된 In-Ga-Zn-O기반의 3성분계 투명도전성 소재를 조성설계, 고밀도 균질 타겟 제조 및 투명전극 박막을 형성하는 연구를 실시하였다. 고체산화물 산화인듐(In2O3)분말, 산화갈륨(Ga2O3) 분말그리고 산화아연(ZnO)분말과 Metal을 몰비로 칭량한 후 분말을 폴리에틸렌제 포트에 넣고 에탄올을 충분히 채운 후 지르코니아(ZrO2) 볼(ball)을 이용하여 24 h 동안 볼 밀링(ball milling) 방법으로 혼합한 뒤, $120^{\circ}C$의 플레이트위에서 마그네틱 바로 stirring하면서 건조하였다. 이 분말을 건조기에서 완전히 건조한 후 알루미나 유발을 이용해서 pulverizing한 후 sieving기를 이용하여 분말의 조립화를 하였다. 이 분말을 금형에 넣고 300 kg/$cm^2$의 압력으로 press하여 성형한 뒤 대기중에서 소결하였다 소결을 위한 승온 온도는 $10^{\circ}C$/min이었고 소결은 $1,450^{\circ}C$에서 6 h 동안 하였다. IGZO target의 조성 비율은 1:1:12 (mol%)를 사용하였으며, 첨가한 Metal은 Boron (B), Germanium (Ge), Barium (Ba)을 사용하여 타겟을 제작하였다. M-IGZO 박막은RF magnetron Sputter를 이용하여 증착하였으며, 앞선 실험에서 제작한 타겟을 사용하여 M-IGZO박막을 투명전극으로 사용하기 위한 각각의 특성을 파악하였다. 모든 박막은 상온에서 증착을 하였으며, 증착된 박막두께를 측정하기 위해 ${\alpha}$-step IQ를 사용하였고, 광학적 특성을 분석하기 위해 UV-Visible spectrophotometer 로 투과율을 측정하였다. 그리고 전기적 특성을 측정하기 위해 Hall effect measurement 및 4-probe를 사용하였으며, 결정성 분석을 위하여 XRD를 이용하여 분석하였다. 표1은 M-IGZO타겟을 사용하여 증착시간에 따른 면저항 특성을 나타내었다. Ge, B, Ba이 첨가된 IGZO 박막은 증착시간이 증가할수록 면저항이 낮아짐을 알 수 있었다. 또한, Ge이 첨가된 IGZO 박막이 다른 금속이 첨가된 IGZO 박막의 면저항보다 현저히 낮음을 알 수 있었다. Fig. 1(a), (b), (c)는 각 타겟을 동일한 조건으로 증착을 하여 광학적특성을 나타내는 그래프이다. GZO 박막의 광학적 특성을 보면 가시광 영역에서 평균 투과율은 모두 80% 이상으로 우수한 광투과 특성을 보여 투명전자소자로 사용가능하다. 특히, 자외선 영역을 모두 차단하는 UV cut 능력이 우수함을 알 수 있었다. 따라서, 금속이 첨가된 IGZO 박막을 태양전지용 투명전극으로 사용할 경우, 자외선에 의하여 수명이 단축되는 현상을 줄여줄 수 있음을 기대할 수 있으며 내구성 향상에 크게 기여할 것으로 보인다. Fig. 2는 Ge=0, 0.5, 5%인 IGZO 투명전극을 총 40회 반복하여 증착을 실시한 후 각각의 면저항을 측정한 결과이다. 실험결과에 따르면 Ge가 0%, 5%인 IGZO 투명전극은 증착을 거듭할수록 면저항이 증가하는 결과를 나타내었으며, 0.5%인 IGZO 투명전극은 점차 안정화되어가는 결과를 나타내었다. 따라서 안정화 되었을 때 평균 면저항은 26ohm/sq.로 나타났으며, 광투과율은 Fig. 3과 같이 가시광영역에서 평균 80%이상의 결과를 보였으며, 550 nm에서는 86.36%의 우수한 특성을 나타내었다. 본 연구에서는 Metal이 첨가된 In-Ga-Zn-O기반의 3성분계 투명도전성 소재 target을 제작하여 RF magnetron sputter로 박막을 형성한 후 특성을 비교하였다. M-IGZO target 중 Ge (0.5%)을 첨가한 IGZO 타겟을 사용한 투명전극이 가장 우수한 특성을 보였으며, 제작된 M-target의 In 비율이 30% 정도로 기존의 ITO (90%) 대비하여 투명전극 제작 단가를 절감할 수 있다.

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Extraction & Purification of ${\beta}$-carotene from Recombinant Escherichia coli (재조합 대장균으로부터 고순도 베타-카로틴의 추출 및 정제)

  • Jo, Ji-Song;Nguyen, Do Quynh Anh;Yun, Jun-Ki;Kim, Yu-Na;Kim, You-Geun;Kim, Sung-Bae;Seo, Yang-Gon;Lee, Byung-Hak;Kang, Moon-Kook;Kim, Chang-Joon
    • Microbiology and Biotechnology Letters
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    • v.37 no.3
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    • pp.231-237
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    • 2009
  • This paper aimed to develop a solvent extraction and purification process to recover high-purified ${\beta}$-carotene from recombinant Escherichia coli. Cells harvested from the culture broth were treated through numerous steps: dehydration, solvent extraction, crystal formation and separation. To optimize the extracting condition, experiments were carried out to investigate the effect of cell disruption, temperature, organic solvents, solvent-biomass ratio on the yield of ${\beta}$-carotene extracted from cells. The result indicated that no significant differences of extraction yield were observed from cells with or without step of cell disruption. Among different extracting solvents, the highest extraction yield of ${\beta}$-carotene, 30.3 mg-${\beta}$-carotene/g-dry cells, was obtained with isobutyl acetate at solvent-biomass ratio 25 mL/g-dry cells at $50^{\circ}C$. Notably, in case of acetone, the extraction yield was quite low when using acetone itself, but increased almost up to the highest value when combining this solvent and olive oil. The purity of ${\beta}$-carotene crystals obtained from crystallization and separation was 89%. The purity degree was further improved up to 98.5% by treating crude crystals with additional ethanol washing.

An Analysis of the Characteristics of the Civil Complaints Occurred to the Landscape Architecture Project in Apartment Complex (아파트 단지 조경사업에서 발생하는 민원 특성 분석 - 민원의 공공성과 조치용이성 분석을 중심으로 -)

  • Cho, Se-Hwan;Lee, Myeong-Hun;Jo, Hyun-Kil;Kim, In-Ho;An, Seung-Hong;Oh, Jeong-Hak
    • Journal of the Korean Institute of Landscape Architecture
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    • v.41 no.5
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    • pp.78-90
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    • 2013
  • The purpose of this study was to analyze the types and characteristics of public complaints caused by the landscape architecture projects in the case of apartment complex. Furthermore, its purpose was also to propose as the basis data for the minimization of complaints in the course of future landscape architecture projects. To analyze and categorize the apartment complex civil complaints, we collected basic and case study data from LH Corporation, SH Corporation and GICO from 2009 to 2012. We also categorized 672 landscape complaints to 73 categories and conducted a survey from residents and landscape architecture. This Survey is to use IPA can collect character(public-private), handling of civil affair(easy-hard) and analyze typical characters and difference of civil complaint awareness between landscape architecture and residents. First, we were categorized 73 civil complaints by type in 5 categories such as park, green space and street trees, pedestrian road, facilities, and others. Second, the most common landscape complaints appear in green spaces, street trees, facilities, pedestrian roads and park orders. Third, results of the analysis conducted for each item which are publicity and measures the ease. 'Facilities', 'landscape and greenery', 'pedestrian road' and others were commonly appears from residents and professional awareness of the complaints. However, complaints of park appear different awareness between landscape architecture and residents. Fourth, 35 from 73 civil complaints(47.9%) are having high publicity and easy to measure, 25 civil complaints(34.2%) has analyzed to individual and difficult to measure so about the these complaints need to check from the design step so that it is necessary to minimize the problem of additional expense by civil complaints burden and decrease the confidence of residence problem were considered.

Regulation of $LH{\beta}$ subunit mRNA by Ovarian Steroid in Ovariectomized Rats (난소제거된 흰쥐에서 난소호르몬에 의한 $LH{\beta}$ subunit의 유전자 발현조절)

  • Kim, Chang-Mee;Park, Deok-Bae;Ryu, Kyung-Za
    • The Korean Journal of Pharmacology
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    • v.29 no.2
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    • pp.225-235
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    • 1993
  • Pituitary LH release has been known to be regulated by the hypothalamic gonadotropin releasing hormone (GnRH) and the gonadal steroid hormones. In addition, neurotransmitters and neuropeptides are actively involved in the control of LH secretion. The alteration in LH release might reflect changes in biosynthesis and/or posttranslational processing of LH. However, little is known about the mechanism by which biosynthesis of LH subunits is regulated, especially at the level of transcription. In order to investigate if ovarian steroid hormones regulate the LH subunit gene expression, ${\alpha}\;and\;LH{\beta}$ steady state mRNA levels were determined in anterior pituitaries of ovariectomized rats. Serum LH concentrations and pituitary LH concentrations were increased markedly with time after ovariectomy. ${\alpha}\;and\;LH{\beta}$ subunit mRNA levels after ovariectomy were increased in a parallel manner with serum LH concentrations and pituitary LH contents, the rise in $LH{\beta}$ subunit mRNA levels being more prominent than the rise in ${\alpha}\;subunit$ mRNA. ${\alpha}\;and\;LH{\beta}$ subunit mRNA levels in ovariectomized rats were negatively regulated by the continuous treatment of ovarian steriod hormones for $1{\sim}4\;days$ and $LH{\beta}\;subunit$ mRNA seemed to be more sensitive to negative feedback of estradiol than progesterone. Treatment of estrogen antagonist, LY117018 or progesterone antagonist, RU486 significantly restroed LH subunit mRNA levels as well as LH release which were suppressed by estradiol or progesterone treatment. These results suggest that ovarian steroids negatively regulate the LH synthesis at the pretranslational level by modulating the steady state levels of ${\alpha}\;and\;LH{\beta}\;subunit$ mRNA and $LH{\beta}\;subunit$ mRNA seemed to be more sensitive to negative feedback action of estradiol than progesterone.

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A Study about modification of Gejitang that showed on sympton and prescription about Soumin (소음인(少陰人) 병증(病證) 및 처방(處方)에 나타난 계기장(桂技場)의 변용(變用)에 대한 고찰(考察))

  • Kim, Jeong-hee;Song, Jeong-mo
    • Journal of Sasang Constitutional Medicine
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    • v.11 no.1
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    • pp.201-220
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    • 1999
  • We got these results after studying about modification of Gejitang(桂枝湯) that showed on sympton and prescription about Soumin(少陰人). 1. There are totally eleven prescriptions related to Gejitang appeared on Dongyi-Soose-Bowon(東醫壽世保元). Among them, one is prescription of Danguisayoktang(當歸四逆湯) in prescription of Discussion of Cold Induced Disorder(傷寒論) and another is Gejibujatang(桂枝附子湯) in Won-Myung dynasty period(元明時代). There are nine prescriptions in LeeJae-Ma(李濟馬)'s pre-scription and we can see there are many prescriptions used prescriptions related to Gejitang for Mang Yang(亡陽). 2. Pre-scriptions related to Gejitang has seven prescriptions in Extra-disease(表病證), and two prescriptions in Intra-disease(裏病證) which are analyzed as modified prescription from Gejitang. 3. Although 藿香正氣散, 香蘇散, 芎歸香蘇散, 八物君子湯 etc. are not modified prescriptions of Gejitang, We can see that its are brought up to be on the same with alternative remedy of Gejitang in each step of symptoms. 4. Symptoms are exactly classified in Soumin, the prescription which is used in different symptoms of diseases is similar in raw materials. It's because the remedy of Acending and Descending(升降) is used under the same purpose that maintain Yangnan Qi(陽暖之氣). 5. We could realize that Panax gienseng(人蔘), Cinnamomum Cassia(肉桂) and Aconitum Carrnichali(附子) are commonly important to reinforce Yangnan Qi because the more disease got worse, the more patient lost Yangnan Qi on both Extra-disease and Intra-disease in the Soumin's disease.

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Characterization and annealing effect of tantalum oxide thin film by thermal chemical (열CVD방법으로 증착시킨 탄탈륨 산화박막의 특성평가와 열처리 효과)

  • Nam, Gap-Jin;Park, Sang-Gyu;Lee, Yeong-Baek;Hong, Jae-Hwa
    • Korean Journal of Materials Research
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    • v.5 no.1
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    • pp.42-54
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    • 1995
  • $Ta_2O_5$ thin film IS a promising material for the high dielectrics of ULSI DRAM. In this study, $Ta_2O_5$ thin film was grown on p-type( 100) Si wafer by thermal metal organic chemical vapo deposition ( MCCVD) method and the effect of operating varialbles including substrate temperature( $T_s$), bubbler temperature( $T_ \sigma$), reactor pressure( P ) was investigated in detail. $Ta_2O_5$ thin film were analyzed by SEM, XRD, XPS, FT-IR, AES, TEM and AFM. In addition, the effect of various anneal methods was examined and compared. Anneal methods were furnace annealing( FA) and rapid thermal annealing( RTA) in $N_{2}$ or $O_{2}$ ambients. Growth rate was evidently classified into two different regimes. : (1) surface reaction rate-limited reglme in the range of $T_s$=300 ~ $400 ^{\circ}C$ and (2: mass transport-limited regime in the range of $T_s$=400 ~ $450^{\circ}C$.It was found that the effective activation energies were 18.46kcal/mol and 1.9kcal/mol, respectively. As the bubbler temperature increases, the growth rate became maximum at $T_ \sigma$=$140^{\circ}C$. With increasing pressure, the growth rate became maximum at P=3torr but the refractive index which is close to the bulk value of 2.1 was obtained in the range of 0.1 ~ 1 torr. Good step coverage of 85. 71% was obtained at $T_s$=$400 ^{\circ}C$ and sticking coefficient was 0.06 by comparison with Monte Carlo simulation result. From the results of AES, FT-IR and E M , the degree of SiO, formation at the interface between Si and TazO, was larger in the order of FA-$O_{2}$ > RTA-$O_{2}$, FA-$N_{2}$ > RTA-$N_{2}$. However, the $N_{2}$ ambient annealing resulted in more severe Weficiency in the $Ta_2O_5$ thin film than the TEX>$O_{2}$ ambient.

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Statistical Optimization of Solid Growth-medium for Rapid and Large Screening of Polysaccharides High-yielding Mycelial Cells of Inonotus obliquus (단백다당체 고생산성의 Inonotus obliquus 균주의 신속 개량을 위한 고체 성장배지의 통계적 최적화)

  • Hong, Hyung-Pyo;Jeong, Yong-Seob;Chun, Gie-Taek
    • KSBB Journal
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    • v.25 no.2
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    • pp.142-154
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    • 2010
  • The protein-bound innerpolysaccharides (IPS) produced by suspended mycelial cultures of Inonotus obliquus have promising potentials as an effective antidiabetic as well as an immunostimulating agents. To enhance IPS production, intensive strain improvement process should be carried out using large amount of UV-mutated protoplasts. During the whole strain-screening process, the stage of solid growth-culture was found to be the most time-requiring step, thus preventing rapid screening of high-yielding producers. In order to reduce the cell growth period in the solid growth-stage, therefore, solid growth-medium was optimized using the statistical methods such as (i) Plackett-Burman and fractional factorial designs (FFD) for selecting positive medium components, and (ii) steepest ascent (SAM) and response surface (RSM) methods for determining optimum concentrations of the selected components. By adopting the medium composition recommended by the SAM experiment, significantly higher growth rate was obtained in the solid growth-cultures, as represented by about 41% larger diameter of the cell growth circle and higher mycelial density. Sequential optimization process performed using the RSM experiments finally recommended the medium composition as follows: glucose 25.61g/L, brown rice 12.53 g/L, soytone peptone 12.53 g/L, $MgSO_4$ 5.53 g/L, and agar 20 g/L. It should be noted that this composition was almost similar to the medium combinations determined by the SAM experiment, demonstrating that the SAM was very helpful in finding out the final optimum concentrations. Through the use of this optimized medium, the period for the solid growth-culture could be successfully reduced to about 8 days from the previous 15~20 days, thus enabling large and mass screening of high producers in a relatively short period.

A Study on Seismic Liquefaction Risk Map of Electric Power Utility Tunnel in South-East Korea (국내 동남권 지역의 전력구 지반에 대한 지진시 액상화 위험도 작성 연구)

  • Choi, Jae-soon;Park, Inn-Joon;Hwang, Kyengmin;Jang, Jungbum
    • Journal of the Korean GEO-environmental Society
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    • v.19 no.10
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    • pp.13-19
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    • 2018
  • Following the 2016 Gyeongju earthquake, the Pohang Earthquake occurred in 2017, and the south-east region in Korea is under the threat of an earthquake. Especially, in the Pohang Earthquake, the liquefaction phenomenon occurred in the sedimentation area of the coast, and preparation of countermeasures is very important. The soil liquefaction can affect the underground facilities directly as well as various structures on the ground. Therefore, it is necessary to identify the liquefaction risk of facilities and the structures against the possible earthquakes and to prepare countermeasures to minimize them. In this study, we investigated the seismic liquefaction risk about the electric power utility tunnels in the southeast area where the earthquake occurred in Korea recently. In the analysis of seismic liquefaction risk, the earthquake with return period 1000 years and liquefaction potential index are used. The liquefaction risk analysis was conducted in two stages. In the first stage, the liquefaction risk was analyzed by calculating the liquefaction potential index using the ground survey data of the location of electric power utility tunnels in the southeast region. At that time, the seismic amplification in soil layer was considered by soil amplification factor according to the soil classification. In the second stage, the liquefaction risk analysis based on the site response analyses inputted 3 earthquake records were performed for the locations determined to be dangerous from the first step analysis, and the final liquefaction potential index was recalculated. In the analysis, the site investigation data were used from the National Geotechnical Information DB Center. Finally, it can be found that the proposed two stage assessments for liquefaction risk that the macro assessment of liquefaction risk for the underground facilities including the electric power utility tunnel in Korea is carried out at the first stage, and the second risk assessment is performed again with site response analysis for the dangerous regions of the first stage assessment is reasonable and effective.

Pleural Fluid to Serum Cholinesterase Ratio for the Differential Diagnosis of Transudates and Exsudates (여출액과 삼출액의 감별진단을 위한 흉막액과 혈청에서의 Cholinesterase 비율의 진단적 의의)

  • Cho, Ho;Kim, Hyun-Il;Eum, Min-Sup;Kwon, Han-Jin;Oh, Yong-Leul;Kim, Kwang-Suk;Kim, Hui-Jung
    • Tuberculosis and Respiratory Diseases
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    • v.48 no.5
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    • pp.781-787
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    • 2000
  • Background : The established by Light et al in 1972 have been used widely for the differential diagnosis of the pleural effusions in transudates and exsudates. However, in recent years, several reports have agreed that these criteria misclassified an important number of effusions. For this reason, different parameters have been proposed for differentiating the transudates from exudates. Nevertheless, all these alternative parameters have not been better than the past criteria of Light et al. In response the usefulness of two parameters for differentiating pleural transudate from exudates were evaluated : pleural fluid cholinesterase level and pleural fluid to serum cholinesterase ratio. Methods : A total of forty-three patients with known causes of the pleural of the pleural effusion by diagnostic thoracentesis were studied. The following criteria for differentiating the pleural effusions in transudates and exsudates were analyzed : Ligt's criteria, the pleural fluid cholesterol level, the pleural fluid to serum cholesterol ratio, the pleural fluid cholinesterase level, and the pleural fluid to serum cholinesterase ratio. Results : The conditions of forty-three patients were diagnosed. Ten were classified as having transudates and thirty-three as exudates. The percentage of effusions misclassified by each parameter was as follows : Light's criteria, 9.3% ; pleural fluid cholesterol 2.3% ; pleural fluid to serum cholesterol, ratio, 2.3% ; pleural fluid cholinesterase, 4.7% ; and pleural fluid to serum chlinesterase ratio, 2.3%. Conclusions : The pleural fluid to serum cholinesterase ratio is one of the accurate criteria for differentiating pleural transudates from exudates. If fur1her studies confirm the results, the cholinesterase ratio could be used as the first step in the evaluation of pleural effusion and, if evaluated together with the other criteria, the differentiation of pleural transudate from exsudates will become more accurate.

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The Output Factor of Small Field in Multileaf Collimator of 6 MV Photon Beams (다엽제한기 소조사면의 6 MV 광자선 출력선량계수)

  • Lee, Ho Joon;Choi, Tae-Jin;Oh, Young Kee;Jeun, Kyung Soo;Lee, Yong Hee;Kim, Jin Hee;Kim, Ok Bae;Oh, Se An;Kim, Sung Kyu;Ye, Ji Woon
    • Progress in Medical Physics
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    • v.25 no.1
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    • pp.15-22
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    • 2014
  • The IMRT is proper implement to get high dose deliver to tumor as its shape and selective approach in radiation therapy. Since the IMRT is performed as modulated the radiation fluence by the MLC created the open shapes and its irradiation time, the dose of segment of radiation field effects on the cumulated portal dose. The accurate output factor of small and step shape of segment is important to improve the determination of deliver tumor dose as it is directly proportional to dose. This experiment performed with the 6 MV photon beam of Clinac Ex(Varian) from $3{\times}3cm^2$ to $0.5{\times}0.5cm^2$ small field size for collimator jaw in MLC free and/or for MLC open field in fixed collimator jaw $10{\times}10cm^2$ using the CC01 ion chamber, SFD diode, diamond detector and X-Omat film dosimetry. As results of normalized to the reference field of $10{\times}10cm^2$ of MLC, the output factor of $3{\times}3cm^2$ showed $0.899{\pm}0.0106$, $0.855{\pm}0.0106$ for $2{\times}2cm^2$, $0.764{\pm}0.0082$ for $1{\times}1cm^2$ and $0.602{\pm}0.0399$ for $0.5{\times}0.5cm^2$. The output factor of MLC open field has shown a maximum 3.8% higher than that of the collimator jaw open field.