• KIEE International Transactions on Electrophysics and Applications
• /
• 제4C권3호
• /
• pp.111-116
• /
• 2004

The Ni/SiC Schottky diode was fabricated with the $\alpha$-SiC thin film grown by the ICP-CVD method on a (111) Si wafer. $\alpha$-SiC film has been grown on a carbonized Si layer in which the Si surface was chemically converted to a very thin SiC layer achieved using an ICP-CVD method at $700^{\circ}C$. To reduce defects between the Si and $\alpha$-SiC, the surface of the Si wafer was slightly carbonized. The film characteristics of $\alpha$-SiC were investigated by employing TEM (Transmission Electron Microscopy) and FT-IR (Fourier Transform Infrared Spectroscopy). Sputterd Ni thin film was used as the anode metal. The boundary status of the Ni/SiC contact was investigated by AES (Auger Electron Spectroscopy) as a function of the annealing temperature. It is shown that the ohmic contact could be acquired beyond a 100$0^{\circ}C$ annealing temperature. The forward voltage drop at 100A/cm was I.0V. The breakdown voltage of the Ni/$\alpha$-SiC Schottky diode was 545 V, which is five times larger than the ideal breakdown voltage of the silicon device. As well, the dependence of barrier height on temperature was observed. The barrier height from C- V characteristics was higher than those from I-V.

• 한국신재생에너지학회:학술대회논문집
• /
• 한국신재생에너지학회 2006년도 춘계학술대회
• /
• pp.228-231
• /
• 2006

This paper briefly introduces silicon based thin film solar cells: amorphous (a-Si:H), microcrystalline ${\mu}c-Si:H$ single junction and $a-Si:H/{\mu}c-Si:H$ tandem solar cells. The major difference of a-Si:H and ${\mu}c-Si:H$ cells comes from electro-optical properties of intrinsic Si-films (active layer) that absorb incident photon and generate electron-hole pairs. The a-Si:H film has energy band-gap (Eg) of 1.7-1.8eV and solar cells incorporating this wide Eg a-Si:H material as active layer commonly give high voltage and low current, when illuminated, compared to ${\mu}c-Si:H$ solar cells that employ low Eg (1.1eV) material. This Eg difference of two materials make possible tandem configuration in order to effectively use incident photon energy. The $a-Si:H/{\mu}c-Si:H$ tandem solar cells, therefore, have a great potential for low cost photovoltaic device by its various advantages such as low material cost by thin-film structure on low cost substrate instead of expensive c-Si wafer and high conversion efficiency by tandem structure. In this paper, the structure, process and operation properties of Si-based thin-film solar cells are discussed.

• 대한금속재료학회지
• /
• 제50권8호
• /
• pp.569-573
• /
• 2012

In order to understand the difference in SiC deposition between the $CH_3SiCl_3-H_2$ and $C_3H_8-SiCl_4-H_2$ systems, we calculate the phase stability among ${\beta}$-SiC, graphite and silicon. We constructed the phase-diagram of ${\beta}$-SiC over graphite and silicon via computational thermodynamic calculation considering pressure (P), temperature (T) and gas composition (C) as variables. Both P-T-C diagrams showed a very steep phase boundary between the SiC+C and SiC region perpendicular to the H/Si axis, and also showed an SiC+Si region with a H/Si value of up to 6700 in the $C_3H_8-SiCl_4-H_2$, and 5000 in the $CH_3SiCl_3-H_2$ system. This difference in phase boundaries is explained by the ratio of Cl to Si, which is 4 for the $C_3H_8-SiCl_4-H_2$ system and 3 for the $C_3H_8-SiCl_4-H_2$ system. Because the C/Si ratio is fixed at 1 in the $CH_3SiCl_3-H_2$ system while it can be variable in the $C_3H_8-SiCl_4-H_2$ system, the functionally graded material is applicable for better mechanical bonding during SiC coating on graphite substrate in the $C_3H_8-SiCl_4-H_2$ system.

• 한국세라믹학회지
• /
• 제48권5호
• /
• pp.335-341
• /
• 2011

Continuous SiC fiber-reinforced SiC-matrix composites ($SiC_f$/SiC) had been fabricated by electrophoretic infiltration combined with ultrasonication. Nano-sized ${\beta}$-SiC added with 12 wt% of $Al_2O_3-Y_2O_3$ additive and Tyranno$^{TM}$-SA3 fabric were used as a matrix phase and fiber reinforcement, respectively. After hot pressing at 5 different conditions, the density, microstructure and mechanical properties of $SiC_f$/SiC were characterized. Hot pressing at relatively severe conditions, such as $1750^{\circ}C$ for 1 and 2 h, resulted in a brittle fracture behavior due to the strong fiber-matrix interface in spite of their high flexural strength. On the other hand, toughened $SiC_f$/SiC composite could be achieved by hot pressing at milder condition because of the formation of weak interface in spite of the decreased flexural strength. These results proposed the importance of weak fiber-matrix interface in the fabrication of ductile $SiC_f$/SiC composite.

• 자원리싸이클링
• /
• 제19권4호
• /
• pp.51-57
• /
• 2010

실리콘 웨이퍼공정에서 발생하는 실리콘 슬러지로부터 리싸이클링 공정으로 Si-SiC 혼합물을 분리 회수한 다음 기계적 합성법으로 Si-SiC-CuO-C 복합물을 제조하였으며, 리튬전지 음극물질로서의 가능성을 조사하였다. 실리콘 슬러지의 주요 불순물은 절삭유, 금속불순물 및 SiC를 들 수 있다. 오일세정-자력선별-산세척으로 절삭유와 금속불순물을 제거한 다음 고에너지 밀링법으로 Si-SiC-CuO-C 복합물을 합성하였다. 복합물의 충방전 용량과 사이클 특성을 조사한 결과, 수명에 따른 용량 유지 특성이 향상된 우수한 결과를 얻을 수 있었다. 복합물을 구성하는 SiC와 CuO 관련 물질은 실리콘의 부피팽창으로 인한 기계적 파괴 현상을 억제하는 요소로 작용하는 것으로 추정되며, 반면에 Fe 등과 같은 불순물은 전극의 충방전 용량을 감소시키는 요인으로서 전극물질 합성 전에 10 ppm 이내로 제거되어야 하는 것으로 판단된다.

• 한국재료학회지
• /
• 제15권3호
• /
• pp.177-182
• /
• 2005

Large amounts of the waste SiC sludge containing small amounts of Si and organic lubricant were produced during the wire cutting process of the single silicon crystal ingots. The waste SiC sludge was purified by the washing process and the purified SiC powders were used to fabricate continuously porous $SiC-Si_3N_4$ composites using a fibrous monolithic process, in which carbon, $6wt\%\;Y_2O_3-2\;wt\%\;A1_2O_3$ and ethylene vinyl acetate were added as a pore-forming agent, sintering additives, and binder, respectively. In the burning-out process, carbon was fully removed and continuously porous $SiC-Si_3N_4$ composites were successfully fabricated. The green bodies containing SiC, Si particles and sintering additives were nitrided at $1410^{\circ}C$ in a flowing $N_2+10\%\;H_2$ gas mixture. Continuously porous composites were combined with SiC, ${\alpha}Si_3N_4,\;\beta-Si_3N_4$ and a few $\%$ of Fe phases. The pore size of the 2nd and the 3rd passed $SiC-Si_3N_4$ composites was $260\;{\mu}m$ and $35\;{\mu}m$ in diameter, respectively.

• 대한기계학회논문집A
• /
• 제34권8호
• /
• pp.1015-1021
• /
• 2010

본 연구에서는 반응소결 탄화규소(RS-SiC)의 제조공정 중에서 C/SiC 복합 비율(0.1, 0.3, 0.4, 0.5, 0.6, 0.7, 1.0)이 외부입자충격 손상 거동에 미치는 영향을 평가하였다. 충격시험은 공기총(air-gun)을 사용하였으며, 직경 2 mm 강구를 113 m/s, 122 m/s, 180 m/s의 충격속도로 RS-SiC 판재($20\times20\times3$ mm)에 충격시켜 발생된 링크랙의 직경 변화 및 콘크랙의 발생 거동을 SEM 영상으로 평가하였다. 결과적으로 RS-SiC에 발생한 링크랙의 최대직경이 충격속도가 증가함에 따라 대체로 증가하였지만, C/SiC 복합 비율에 따라서는 급격한 변화를 보였다. 이는 C/SiC 복합 비율에 따라 잔류 Si 함량 및 굽힘강도 변화의 영향으로 볼 수 있다. 특히 C/SiC 복합 비율이 0.4~0.5 범위에서 콘크랙이 발생됨에 따라 링크랙에서 콘크랙의 발생으로 변화되는 충격손상 메커니즘의 임계영역으로 판단할 수 있다. 아울러 콘크랙의 발생 임계영역을 고려할 때, RS-SiC 최적 제조 공정으로서 C/SiC 혼합 비율을 최대 0.3으로 하는 것이 효과적이다.

• Nuclear Engineering and Technology
• /
• 제45권4호
• /
• pp.565-572
• /
• 2013

The fabrication methods and requirements of the fiber, interphase, and matrix of nuclear grade $SiC_f/SiC$ composites are briefly reviewed. A CVI-processed $SiC_f/SiC$ composite with a PyC or $(PyC-SiC)_n$ interphase utilizing Hi-Nicalon Type S or Tyranno SA3 fiber is currently the best combination in terms of the irradiation performance. We also describe important material issues for the application of SiC composites to LWR fuel cladding. The kinetics of the SiC corrosion under LWR conditions needs to be clarified to confirm the possibility of a burn-up extension and the cost-benefit effect of the SiC composite cladding. In addition, the development of end-plug joining technology and fission products retention capability of the ceramic composite tube would be key challenges for the successful application of SiC composite cladding.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2009년도 추계학술대회 논문집
• /
• pp.45-45
• /
• 2009

This paper describes the formation of porous 3C-SiC by anodization. 3C-SiC thin films were deposited on p-type Si(100) substrates by APCVD using HMDS (Hexamethyildisilane: $Si_2(CH_3)_6$). UV-LED(380 nm) was used as a light source. The surface morphology was observed by SEM and the pore size was increased with increase of current density. Pore diameter of 70 ~ 90 nm was achieved at 7.1 $mA/cm^2$ current density and 90 sec anodization time. FT-IR was conducted for chemical bonding of thin film and porous 3C-SiC. The Si-H bonding was observed in porous 3C-SiC around wavenumber 2100 $cm^{-1}$. PL shows the band gap enegry of thin film (2.5 eV) and porous 3C-SiC (2.7 eV).

• 한국세라믹학회지
• /
• 제38권4호
• /
• pp.314-318
• /
• 2001

SiC-TiC composites have been fabricated by using a mechanochemical processing of a mixture of Si, Ti, and C at room temperature and subsequent hot pressing. TiC powders have been obtained by the mechanochemical processing of a mixture of Ti and C whereas SiC powders has not been obtained from a mixture of Si and C. By using the exothermic reaction between Ti and C, SiC-TiC powder could be obtained from the mixture of Si, Ti, and C using the mechanochemical processing for more than 12h. The X-ray diffraction analysis has shown that the powder subjected to the mechanochemical processing consisted of the particles having crystallite size below 10nm. Fully densified SiC-TiC composites have been obtained by hot-pressing of the powder at 1850$\^{C}$ for 3h and it has shown comparable mechanical properties to those of the SiC-TiC composites prepared from the commercially available SiC and TiC powders. Flexural strength of 560 MPa and fracture toughness of 4.8 MP$.$am$\_$1/2/ have been shown for the SiC-TiC composites with composition corresponding to 0.75:0.25:1 mole ratio of Si:Ti:C.