Fabrication and Characteristics of NiO-AZO Thin Films Deposited by Co-sputtering System for GaN LED Transparent Contact Electrode (코스퍼터링법을 이용한 GaN LED 투명접촉전극용 NiO-AZO 박막의 제조 및 물성평가)
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- Journal of the Korean institute of surface engineering
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- v.44 no.6
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- pp.250-254
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- 2011