• Journal of Sensor Science and Technology
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• v.13 no.2
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• pp.101-109
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• 2004

This paper presents a novel z-axis accelerometer with perfectly aligned vertical combs fabricated using the extended sacrificial bulk micromachining (extended SBM) process. The z-axis accelerometer is fabricated using only one (111) SOI wafer and two photo masks without wafer bonding or CMP processes as used by other research efforts that involve vertical combs. In our process, there is no misalignment in lateral gap between the upper and lower comb electrodes, because all critical dimensions including lateral gaps are defined using only one mask. The fabricated accelerometer has the structure thickness of $30{\mu}m$, the vertical offset of $12{\mu}m$, and lateral gap between electrodes of $4{\mu}m$. Torsional springs and asymmetric proof mass produce a vertical displacement when an external z-axis acceleration is applied, and capacitance change due to the vertical displacement of the comb is detected by charge-to-voltage converter. The signal-to-noise ratio of the modulated and demodulated output signal is 80 dB and 76.5 dB, respectively. The noise equivalent input acceleration resolution of the modulated and demodulated output signal is calculated to be $500{\mu}g$ and $748{\mu}g$. The scale factor and linearity of the accelerometer are measured to be 1.1 mV/g and 1.18% FSO, respectively.

• Journal of Institute of Control, Robotics and Systems
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• v.20 no.2
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• pp.149-156
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• 2014

A magnetic compass module must be calibrated accurately before use. Moreover, the calibration process must be performed taking into account any magnetic dip if the magnetic compass module has tilt angles. For this, a calibration method for a magnetic compass module is explained. Tilt error of the magnetic compass module is compensated using a biaxial accelerometer generally. The accelerometer error causes a tilt angle calculation error that gives rise to an azimuth calculation error. For error property analysis, error equations are derived and simulations are performed. In the simulation results, the accuracy of derived error equations is verified. If a biaxial magnetic compass module is used instead of a triaxial one, the magnetic dip and z-axis magnetic compass data must be estimated for tilt compensation. Lastly, estimation equations for the magnetic dip and z-axis magnetic compass data are derived, and the performance of the equations is verified based on a simulation.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.2
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• pp.33-39
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• 1998

A six-beam accelerometer with self-compensated off-axis sensitivity was fabricated onthe selectively diffused (111)-oriented n/n$^{+}$/n silicon substrates by a unique porous silicon micromachining technique, which has self-stip characteristics and highly seletive formation of porous silicon layer during anodic reaction. Also, the characteristics of the fabricated accelerometer were investigated. The sensitivity of the acceleormeter added up outputs of three bridges through a summing circuit was 0.68 mV/g and the nonlinearity was less than 2% of the full scale output. The measured first resonant frequency was 4.236 kHz. When the outputs of three bridges were compared to summing output of bridges obtained through summing circuit, the normal output for Z-axis acceleration exhibited the same value s summing outputs of three bridges without reduction of sensitivity and thus the sensitivity decrease due to additional beam was compensated. Although a maximum off-axis sensitivity in one bridge of the accelerometer showed 17% of normal sensitivity, the off axis sensitivity obtained from summing output of three bridges decreased to 1.0%. Therefore, the self-elimination of off-axis sensitivity can be simply realized by obtaining the output of the sensor through summing circuit.t.

• Journal of the Korean Academy of Clinical Electrophysiology
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• v.8 no.1
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• pp.43-50
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• 2010

Purpose : The objective of this study is to effect of an aquatic rotation control and obstacle avoidance when conducted underwater on hemiplegia patient's balance ability and vestibular function. Methods : Twelve hemiplegia patients participated and were randomly assigned to a control group(I) with standard physical therapy and an aquatic group(II) with an aquatic rotation control, obstacle avoidance and standard physical therapy as well. The aquatic group trained using a Halliwick rotation control and obstacle avoidance through 3 times per week over 6 weeks. For all subjects, vestibular function, their balance, the change of electrooculogram (EOG), the change of accelerometer axis and torsiometer according to visual sense, vestibular sense with galvanic vestibular stimulation (GVS) or not during leg close stance were measured. Results : The EOG in the vertical and horizontal (p<0.05) were both significantly lowered. The change was significantly lower in the trajectory range of motion of trunk and spine with torsiometer when leg close stand (p<0.01) and leg close stand with GVS (p<0.01). The centre of gravity accelerated, there were reduced significantly difference X and Y axis of accelerometer during the closing of the leg without vision (p<0.05). There were reduced significantly difference X and Z axis of accelerometer during the closing of the leg with GVS (p<0.05). There were reduced significantly difference X and Z axis of accelerometer during the closing of the leg and close eyes with GVS (p<0.05). Conclusion : The balance ability, vestibular system and postural control is improved.

• Journal of The Korean Association of Information Education
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• v.15 no.1
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• pp.147-154
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• 2011

In this Paper, we suggest the effective pre-correction algorithm on sensor values and the classification algorithm for gesture recognition that use values for each axis of the accelerometer to send data(a number or specific input data) to device. we know that creation of reliable preprocessed data in experimental results through the error rate of X-Axis and Y-Axis for pre-correction and post-correction. we can show high recognition rate through recognizer using the normalization and classification algorithm for the preprocessed data.

• Journal of Sensor Science and Technology
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• v.9 no.3
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• pp.196-202
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• 2000

In this paper, we proposed the new bridge combination detection method for three dimensional piezoresistive silicon accelerometer, and the accelerometer with SOI structures was fabricated by bulk micromachining technology for using higher temperature than $200^{\circ}C$. The sensitivities of fabricated accelerometer for X, Y and Z-axis acceleration were about 8mV/V G, 8mV/V G and 40mV/V G. The nonlinearity of the output voltage was 1.6%FS and cross-axis sensitivity was within 4.6%. We confirmed that the three bridges detection method is very simple and the output characteristics of this accelerometer were similar to arithmetic circuit method accelerometer. The temperature characteristics of SOI structure accelerometer showed high operating temperature and good stability. And the temperature coefficient of offset voltage and sensitivity were $1033ppm^{\circ}C^{-1}$ and $1145ppm^{\circ}C$ respectively.

• The Journal of Korean Physical Therapy
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• v.22 no.6
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• pp.59-63
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• 2010

Purpose: Driving a car is an essential component of daily life. For safe driving, each driver must perceive sensory information and respond rapidly and accurately. Brake response time (BRT) is a particularly important factor in the total stopping distance of a vehicle, and therefore is an important factor in traffic accident prevention research. The purpose of the current study was (1) to compare accelerometer. BRTs analyzed by three different methods and (2) to investigate possible correlations between accelerometer-BRTs and foot switch-BRTs, which are measured method using a foot switch. Methods: Eighteen healthy subjects participated in this study. BRT was measured with either a tri-axial accelerometer or a footswitch. BRT with a tri-axial accelerometer was analyzed using three methods: maximum acceleration time, geometrical center, and center of maximum and minimum acceleration values. Results: Both foot switch-BRTs and accelerometer-BRTs were delayed. ANOVA for accelerometer BRTs yielded significant main effects for axis and analysis, while the interaction effect between axis and analysis was not significant. Calculating the Pearson correlation between accelerometer-BRT and foot switch-BRT, we found that maximum acceleration time and center of maximum and minimum acceleration values were significantly correlated with foot switch-BRT (p<0.05). The X axis of the geometrical center was significantly correlated with foot switch-BRTs (p<0.05), but Y and Z axes were not (p>0.05). Conclusion: These findings suggest that the maximum acceleration time and the center of maximum and minimum acceleration value are significantly correlated with foot switch-BRTs.

• JSTS:Journal of Semiconductor Technology and Science
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• v.5 no.1
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• pp.58-66
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• 2005

Inertial-grade vertical-type and lateral-type differential resonant accelerometers (DRXLs) are designed, fabricated using one process and tested for navigational applications. The accelerometers consist of an out-of-plane (for z-axis) accelerometer and in-plane (for x, y-axes) accelerometers. The sensing principle of the accelerometer is based on gap-sensitive electrostatic stiffness changing effect. It says that the natural frequency of the accelerometer can be changed according to an electrostatic force on the proof mass of the accelerometer. The out-of-plane resonant accelerometer shows bias stability of $2.5{\mu}g$, sensitivity of 70 Hz/g and bandwidth of 100 Hz at resonant frequency of 12 kHz. The in-plane resonant accelerometer shows bias stability of $5.2{\mu}g$, sensitivity of 128 Hz/g and bandwidth of 110 Hz at resonant frequency of 23.4 kHz. The measured performances of two accelerometers are suitable for an application of inertial navigation.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.36D no.7
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• pp.26-33
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• 1999

In order to examine the effect of beam location n the performance of bridge type piozoresistive silicon accelerometer, three sensors having different location of beams were simulated by FEN(finite element method) and fabricated by RIE(reactive ion etching) and KOH etching method using SDB(silicon direct bonding) wafer, Results of the FEM simulation present that the 1st resonace frequency and Z axis sensitivity of each sensor are identical but the 2nd, and the 3rd resonace frequency and X, Y axis sensitivity are different. Even though the 1st resonance frequency and Z axis sensitivity measured from fabricated sensors do not perfectly coincide with each other, all 3 type sensors present 180 ~ 220N/G of Z sensitivity at 5 V supply voltage and 1.3 ~ 1.7kHz of the 1st resonance frequency and about 2% of lateral sensitivity.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.18 no.1
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• pp.709-714
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• 2017

Structures like bridges or buildings need to be checked continuously to diagnose their safety. However, it is extremely difficult for the people who access such structures to check all areas directly. To overcome this problem, there is a lot of active research into structural health monitoring (SHM) with wireless sensor nodes (WSNs). In this paper, for more accurate checking of SHM with WSNs, we experimentally compare and evaluate the performance of Xenomai, which provides real-time processing under the traditional Linux kernel. For this purpose, we patch Xenomai into the traditional Linux kernel of a commercial embedded board, Raspberry Pi, and implement a task that periodically reads vibration data of the z-axis from an accelerometer in order to analyze the natural frequency of cantilever beams. Reading the data from the traditional Linux kernel with the same method, we analyze the natural frequency of the cantilever beams using Smart Office Analyzer. Finally, to review the validity of Xenomai for WSNs, we obtain vibration data on the z-axis from the accelerometer via wired network and compared and analyzed them the same way.