• Progress in Superconductivity and Cryogenics
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• v.6 no.3
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• pp.21-26
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• 2004

Deposition condition of YBa$_2$Cu$_3$$O_{7-x}$ (YBCO) films on moving IBAD templates (CeO$_2$/IBAD-YSZ/SS) was studied in a hot-wall type metal organic chemical vapor deposition (MOCVD) process using single liquid source. The reel velocity was 40 cm/hr and the source mole ratios of Y(tmhd)$_3$:Ba(tmhd)$_2$:Cu(tmhd)$_2$ were 1:2.3:3.1 and 1:2.1:2,9, Two different types of IBAD templates with thin CeO$_2$ and thick CeO$_2$ layers were used, The YBCO films were successfully deposited at the deposition temperatures of 780~89$0^{\circ}C$ ; the a-axis growth was observed together with the c-axis growth up to 83$0^{\circ}C$. while the c-axis growth became dominant above 83$0^{\circ}C$. The top surface of the c-axis film was fairly dense and included a small amount of the a-axis growth, although the peaks of the a-axis grains were not observed in XRD pattern, The YBCO film deposited on IBAD template with thin CeO$_2$ layer showed low critical current of 2.5 A/cm-width. while the YBCO film deposited on IBAD template with thick CeO$_2$ layer showed higher critical current of 50 A/cm-width. This result indicates that thick CeO$_2$ layer is thermally more stable than thin CeO$_2$ layer at the high deposition temperature of the MOCVD process.s.

• Transactions on Electrical and Electronic Materials
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• v.4 no.2
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• pp.20-23
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• 2003

Piezoelectric powder with the composition of PbTiO$_3$-PbZrO$_3$-Pb(Mn$\_$1/3/Nb$\_$2/3/)O$_3$ and small particle size of 0.3 $\mu\textrm{m}$ was investigated for low-temperature firing of PZT thick films. PbTiO$_3$-PbZrO$_3$-Pb(Mn$\_$1/3/Nb$\_$2/3)O$_3$ ceramics showed dense microstructure and superior piezoelectric properties, electromechanical coupling factor (k$\_$p/) of 0.501 and piezoelectric constant (d$\_$33/) of 224. The PZT paste was made of the powder and organic vehicles, and screen-printed on Pt(450nm)/YSZ(110nm)/SiO$_2$(300nm)/Si substrates and fired at 800∼900$^{\circ}C$. Any interface reaction between the PZT thick film and the bottom electrode was not observed in the PZT thick films. The PZT thick film fired at 800$^{\circ}C$ showed moderate electrical properties, the remanent polarization(p$\_$r/) of 16.0 ${\mu}$C/$\textrm{cm}^2$, the coercive field(E$\_$c/) of 36.7 ㎸/cm, and dielectric constant ($\varepsilon$$\_$r/) of 531. Low-temperature sinterable piezoelectric composition and high activity of fine particles reduced the sintering temperature of the thick film. This PZT thick film could be utilized for piezoelectric microactuators or microsensors that require Si micromachining technology.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1988-1990
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• 2002

마이크로 바이오칩용 미세 무게 감지 소자를 개발하기 위해 통상적인 MEMS 공정에 PZT sol solution을 함침하여 binder로서 적용하는 복합적인 스크린 인쇄 방법을 적용해 $800-850^{\circ}C}$의 비교적 저온에서 높은 소결밀도와 우수한 전기적인 특성을 가지는 PZT-0.12PCW 후막 구동형 캔틸레버 소자를 Pt/$TiO_2$/YSZ/$SiO_2$/Si 기판에 제조하였다. 제조된 PZT-0.12PCW 후막 구동형 캔틸레버 소자의 공진 주파수와 변위를 레이저 미소 변위 측정 시스템을 이용하여 공기 중 및 액체 중에서 측정함으로써 캔틸레버 크기에 따른 공진 특성 변화, 액체 내에서의 댐핑 효과 등을 분석할 수 있었다. 또한 Au를 증착하거나biotin-streptoavidin 반응을 통해 단백질을 고정화시켜 무게변화를 야기시킨 후 소자의 감도를 평가함으로써 PZT-0.12PCW 후막 구동형 캔틸레버를 우수한 성능의 바이오칩용 미세 무게 감지 소자로 응용할 수 있음을 알 수 있었다.

• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.70.1-70.1
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• 2012

In-situ X-ray photoelectron spectroscopy (XPS) and infrared (IR) spectroscopy studies of SOFC cathode materials will be discussed in this presentation. The mixed conducting perovskites (ABO3) containing rare and alkaline earth metals on the A-site and a transition metal on the B-site are commonly used as cathodes for solid oxide fuel cells (SOFC). However, the details of the oxygen reduction reaction are still not clearly understood. The information about the type of adsorbed oxygen species and their concentration is important for a mechanistic understanding of the oxygen incorporation into these cathode materials. XPS has been widely used for the analysis of adsorbed species and surface structure. However, the conventional XPS experiments have the severe drawback to operate at room temperature and with the sample under ultrahigh vacuum (UHV) conditions, which is far from the relevant conditions of SOFC operation. The disadvantages of conventional XPS can be overcome to a large extent with a "high pressure" XPS setup installed at the BESSY II synchrotron. It allows sample depth profiling over 2 nm without sputtering by variation of the excitation energy, and most importantly measurements under a residual gas pressure in the mbar range. It is also well known that the catalytic activity for the oxygen reduction is very sensitive to their electrical conductivity and oxygen nonstoichiometry. Although the electrical conductivity of perovskite oxides has been intensively studied as a function of temperature or oxygen partial pressure (Po2), in-situ measurements of the conductivity of these materials in contact with the electrolyte as a SOFC configuration have little been reported. In order to measure the in-plane conductivity of an electrode film on the electrolyte, a substrate with high resistance is required for excluding the leakage current of the substrate. It is also hardly possible to measure the conductivity of cracked thin film by electrical methods. In this study, we report the electrical conductivity of perovskite $La_{0.6}Sr_{0.4}CoO_{3-{\delta}}$ (LSC) thin films on yttria-stabilized zirconia (YSZ) electrolyte quantitatively obtained by in-situ IR spectroscopy. This method enables a reliable measurement of the electronic conductivity of the electrodes as part of the SOFC configuration regardless of leakage current to the substrate and cracks in the film.

• Journal of the Microelectronics and Packaging Society
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• v.22 no.4
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• pp.77-82
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• 2015

To increase the performance of solid oxide fuel cell operating at intermediate temperature ($600^{\circ}C{\sim}800^{\circ}C$), $Sm_{0.2}Ce_{0.8}O_2$ (SDC) thin layer was applied to the $La_{0.8}Sr_{0.2}Mn_{0.8}Cu_{0.2}O_3$ (LSMCu) cathode by sol-gel coating method. The SDC was employed as a diffusion barrier layer on the yttria-stabilized zirconia(YSZ) to prevent the interlayer by-product formation of $SrZrO_3$ or $La_2Zr_2O_7$. The by-products were hardly formed at the electrolyte-cathode interlayer resulting to reduce the cathode polarization resistance. Moreover, SDC thin film was coated on the cathode pore wall surface to extend the triple phase boundary (TPB) area.

• 한국초전도학회:학술대회논문집
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• v.9
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• pp.95-98
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• 1999

The crystalline alignment of Ni substrates textured by RABiTS have a probability distribution in the surface plane. This makes it difficult to obtain a high quality of textures over all the range of a long Ni tape. In order to improve the textures of Ni tape, we have investigated a new method of texturing. We obtained non-cube textured Ni tapes by rolling and annealing a high purity Ni. In these tapes, the [001]-axes were tilted around the rolling direction, and the [100]-axes were parallel to the rolling direction. The average grain size was several cm$^2$. We deposited buffer layer (CeO$^2$/YSZ/CeO$^2$) and YBCO on those tapes. We found out that a YBCO film with grows normal with respect to the surface and this feature is independent of the tilting angles of the Ni [001]-axes.

• Progress in Superconductivity and Cryogenics
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• v.6 no.4
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• pp.13-16
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• 2004

Three film deposition systems (pulsed laser deposition, sputtering, and evaporation) equipped with reel-to-reel metal tape moving apparatus were installed and used to make meter-long coated conductor. Buffer architecture of $CeO_2/YSZ/Y_2O_3$ was deposited on Ni alloy using sputtering, evaporation, and PLD. YBCO superconducting layer was continuously deposited on buffered metal tape by PLD. End-to-end critical current ($I_c$) of 107 A at 77 K, self-field has been achieved in 1 em-wide tape (thickness 0.6∼1.0${\mu}{\textrm}{m}$, tape moving speed 54∼72 cm/hr) over 1 meter length.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07a
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• pp.104-106
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• 2003

다층의 산화물 박막으로 이루어진 coated conductor의 제조를 위하여 각층의 증착조건이 최적화되어야 한다. 가공/열처리를 통하여 2축배향성을 가지는 Ni 금속 기판위에 $Y_2O_3$, YSZ, $CeO_2$ 등의 산화물 완충층을 증착한 후 초전도층인 YBCO를 증착하였다. 12도와 8도의 in-plane fwhm (full width at half maximum)과 out-of-plane fwhm을 가지는 Ni 기판을 이용하여 13도와 4.5도의 in-plane 및 out-of-plane fwhm을 가지는 YBCO coated conductor를 제조하였다. 임계온도 (Tc), 임계전류 (Ic), 및 임계전류밀도 (Jc) 는 각각 84K, 3.3A, 및 $310,000\;A/cm^2$ 이었다.

• Journal of the Korean institute of surface engineering
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• v.30 no.5
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• pp.333-346
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• 1997

Plasma spray processes for functional coatings of tubular SOFC ( Soild oxide Fuel Cell).consisting of air electrode, oxide electrolyte, an fuel electrode, are optimized by fully saturated fractional factorial testing. Material and electric characteristics of each coating are analtsed by the implementation of SEM and optical microscope for evaluating microstructure and porosity, X-ray diffraction method for investigating compositional change between raw powder and sprayed coating, and Van der Pauw method for measuring electrical conductivity. LSM ($La_{0.65}Sr_{0.35}MnO_3$air electrode and Ni-YSL fuel electrode coatings have porosities of around 23~30% sufficient for effective fuel and oxidant gas supply to electrochemical reaction interfaces and electrical conductivities of around 90 S/cm and 1000 S/cm, respectively, enough for acting as current collecting electrodes. YSZ($ZrO_2-8mol%Y_2O_3$) electrolyte film has a high ionic conductivities of 0.05~0.07 S/cm at $1000^{\circ}C$ in air atmosphere, but appears to be somewhat too porous to reduce the thickness. for enhancing the cell efficiency. A unit tubular SOFC has beem fabricated by the optimized plasma spray processes for each functional coating and the cell. Its electrochemical chracteristics are investigated by measuring voltage-current and power density with variation of operationg temperature, radio of fuel to air gas flowrates, and total gas flowrate of reactants.

• Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference
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• 2003.10a
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• pp.150-152
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• 2003

YBa$_2$Cu$_3$O$_{7-{\delta}}$(YBCO) coated conductors were deposited by pulsed laser deposition (PLD) on short buffered substrate in continuous PLD reel-to-reel system. The oxide multilayer buffered substrate of architectures of CeO$_2$/YSZ/Y$_2$O$_3$was fabricated by PLD at steady status. The degree of texture of each layer was investigated using X-ray diffraction including $\theta$-2$\theta$ scans, $\omega$-scans and $\Phi$-scans analysis. Their surface morphology was observed by scanning electron microscopy (SEM) The FWHM of the X-ray $\omega$-scans and $\Phi$-scans indicated that YBCO and buffer layers closely replicate the in-plane and out-of-plane texture of metal tape. Critical current at 77K self-field of 19A, critical temperature of 86K, and current density of 2MA/$\textrm{cm}^2$ were measured. The film also exhibits a homogeneous and dense surface morphology.e morphology.